Furnace and PreheaterQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Compact CVD furnace system is modified from PT-1200X-100 single zone tube furnace:QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 4.33" O.D x 4.05" I.D x 29.13" Length quartz tubeQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1100ºC Max. working temperatureQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Water cooling flange on right-side is slidable for easy sample loadingQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Water cooling flange on left-side between the heater and furnace is used for pre-heated gas input and sealingQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flangeQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One small heater is attached to the left side flange of the furnace to preheat input gas, liquid, or evaporate solid chemical, which will be then delivered to CVD furnace:QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Please click picture left for more details:QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac · 1.2''O.D x 6''L SS tube as the heating chamberQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac · 600ºC Max. working temperatureQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Flange on the left side is for gas sealing and inputQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Rated VoltageQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug)QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Power consumptionQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Max. 3600 W (20 A breaker required)QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Heating ZoneQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· CVD Furnace: 440 mmQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Constant temperature zone: 100 mm QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas Heater: 150mmQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Working TemperatureQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· CVD Furnace:QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max heating temperature: 1100°C ( < 2 hour )QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Continuous working temperature: 200~1000°CQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max heating & cooling rate: 20°C/minQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Heater: QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Continuous working temperature: RT~600°CQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max heating & cooling rate: 20°C/minQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Temperature ControlQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· CVD Furnace and Heater (separate temp control):QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Digital controllers with PID/self-tuning functions and 30 segments programmableQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Thermocouple: K type thermocouples, which feed through the right side flange and control furnace temperature.QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control accuracy: +/- 1°CQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
RS485 Communications PortQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Vacuum and Gas Sealing & FlangeQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
The right flange of CVD furnaceQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Water cooling to prevent sealing o-ring from melting (water cooler is not included, please click water chiller to order)QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· KF25 vacuum fitting (to a vacuum pump, please click to order a pump, vacuum hose, valve and sealing gasket)QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Slidable for the customer to easily and fast push/pull in/out sampleQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One quartz wafer holder ( 3" Dia. ) is included and the flange with heating radiation block QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· An anti-corrosive capacitance diaphragm gauge is includedQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Left flange (between CVD Furnace and Heater) with four 1/8'' fittings for 1/8'' tube:QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two 1/8'' fitting on the flange for independently and directly delivering any gas into the CVD furnace QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One 1/8'' fitting for delivering heated gas from heater to CVD furnaceQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One 1/4'' fitting for bypassing the gas (without heating) to the CVD furnace (inside the CVD furnace, the gas tube is merged with the heated gas pipe by a T fitting)QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Note: How gas pipe assembled in the CVD furnace through above 1/8'' fitting:QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One 1/4'' quartz tube delivers the vapor gas from heater(also the bypass gas by a T fitting)QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two 1/4'' quartz tube delivery extra gas via the two separate 1/8'' fitting on the big furnace left the flangeQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· These three 1/4'' quartz tubes inside CVD furnace is in parallel and vertically 1'' higher than sample holderQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· These three 1/4'' quartz tubes can be easily removed to clean or replaced once get stuck or corrodedQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heater:QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Left flange: one 1/8'' gas fitting to deliver gas to the heater for pre-heating and then to CVD furnace QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· On the right side to CVD furnace with necessary thermal block material to minimize the temperature gradient at the interface between the heater and CVD furnaceQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Furnace Chamber InstallationQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 2- 1/4" pipe adapter is installed on each flangeQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac The optional Liquid Injection deviceQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
For direct liquid CVD ( DLCVD), you may consider below devices for liquid injection:QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
![](/d/file/uploads/allimg/200722/1-200H2105203a8.jpg) ![](/d/file/uploads/allimg/200722/1-200H2105221N8.jpg) QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Net weightQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
110kgQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
DimensionsQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· Standard: 62"L X 18"W X 23"HQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Maximum: 80"L X 18"W X 32"H (Lid open and right-side flange slided out)QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac WarrantyQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and etc are not covered by the warranty)QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· You may order replacement quartz tube here.QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Laptop, software & WiFi Control (Optional)fQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Temperature Control System enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for PT furnaces.QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· A wireless remote control provides up to 300 meters operating range.QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Above features are available upon request at an extra cost. Please contact us for more information.QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
ComplianceQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· CE CertifiedQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· NRTL(UL61010) or CSA certifications are available at extra cost. QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac WarningQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· The tube furnaces with quartz tube are designed for use under vacuum and low pressure <0.2 bars QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum pressures may only be safely used up to 1000°C QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The flow rate for gasses should be limited to< 200ml/min) for reducing thermal shocks to the tubeQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Operation Demo Video & InstructionsQIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
QIIMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |