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Tube Furnace with Solid Precursor Sublimator for CVD Growth
model:PT-1200X

Tube Furnace with Solid Precursor Sublimator for CVD Growth

    Application:  Widely used in experiments and small batch production in universities, scientific research institutes, industrial and mining enterprises, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Introduction:

     PT-1200X is a compact 1100°C CVD tube furnace with precursor sublimating attachment. Totally four-channel gas inlets are built on the sublimation which allows feedings of various gases to carry the source vapor into the main heater for further decomposition and deposition. The sample holder fixture mounted on the right flange is slidable for easy sample loading/unloading. Such a system configuration is suitable for growing a wide range of transitional metal dichalcogenides (such as MoSe2, MoS2...) and wide bandgap semiconductors (such as h-BN) layers on substrate up to 3" diameter. JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace and PreheaterJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Compact CVD furnace system is modified from PT-1200X-100 single zone tube furnace:JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · 4.33" O.D x 4.05" I.D x 29.13" Length quartz tubeJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · 1100ºC Max. working temperatureJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 ·  Water cooling flange on right-side is slidable for easy sample loadingJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 ·  Water cooling flange on left-side between the heater and furnace is used for pre-heated gas input and sealingJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flangeJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One small heater is attached to the left side flange of the furnace to preheat input gas, liquid,  or evaporate solid chemical, which will be then delivered to CVD furnace:JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Please click picture left for more details:JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1.2''O.D x 6''L SS tube as the heating chamberJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 600ºC Max. working temperatureJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · Flange on the left side is for gas sealing and inputJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated VoltageJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug)JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power consumptionJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. 3600 W (20 A breaker required)JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating ZoneJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace:  440 mmJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Constant temperature zone: 100 mm JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Gas Heater:     150mmJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Working TemperatureJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace:JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 Max heating temperature: 1100°C ( < 2 hour )JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous working temperature: 200~1000°CJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max heating & cooling rate: 20°C/minJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Heater: JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous working temperature: RT~600°CJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max heating & cooling rate: 20°C/minJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace and Heater (separate temp control):JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Digital controllers with PID/self-tuning functions and 30 segments programmableJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Thermocouple:  K type thermocouples, which feed through the right side flange and control furnace temperature.JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Control accuracy: +/- 1°CJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RS485 Communications PortJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum and Gas Sealing & FlangeJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The right flange of CVD furnaceJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Water cooling to prevent sealing o-ring from melting (water cooler is not included, please click water chiller to order)JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· KF25 vacuum fitting (to a vacuum pump, please click to order a pump,  vacuum hose, valve and sealing gasket)JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Slidable for the customer to easily and fast push/pull in/out sampleJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One quartz wafer holder ( 3" Dia. ) is included and the flange with heating radiation block JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· An anti-corrosive capacitance diaphragm gauge is includedJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Left flange (between CVD Furnace and Heater) with four 1/8'' fittings for 1/8'' tube:JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two 1/8'' fitting on the flange for independently and directly delivering any gas into the CVD furnace JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/8'' fitting for delivering heated gas from heater to CVD furnaceJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/4'' fitting for bypassing the gas (without heating) to the CVD furnace (inside the CVD furnace, the gas tube is merged with the heated gas pipe by a T fitting)JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Note: How gas pipe assembled in the CVD furnace through above 1/8'' fitting:JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/4'' quartz tube delivers the vapor gas from heater(also the bypass gas by a T fitting)JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two 1/4'' quartz tube delivery extra gas via the two separate 1/8'' fitting on the big furnace left the flangeJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· These three 1/4'' quartz tubes inside CVD furnace is in parallel and vertically 1'' higher than sample holderJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  These three 1/4'' quartz tubes can be easily removed to clean or replaced once get stuck or corrodedJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heater:JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Left flange: one 1/8'' gas fitting to deliver gas to the heater for pre-heating and then to CVD furnace JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· On the right side to CVD furnace with necessary thermal block material to minimize the temperature gradient at the interface between the heater and CVD furnaceJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Furnace Chamber InstallationJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 2- 1/4" pipe adapter is installed on each flangeJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The optional Liquid Injection deviceJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

For direct liquid CVD  ( DLCVD), you may consider below devices for liquid injection:JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
                   
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Net weightJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

110kgJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DimensionsJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Standard:    62"L X 18"W X 23"HJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Maximum:   80"L X 18"W X 32"H  (Lid open and right-side flange slided out)JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WarrantyJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and etc are not covered by the warranty)JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· You may order replacement quartz tube here.JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Laptop, software & WiFi Control (Optional)fJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Temperature Control System enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for PT furnaces.JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· A wireless remote control provides up to 300 meters operating range.JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Above features are available upon request at an extra cost. Please contact us for more information.JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ComplianceJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CE CertifiedJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· NRTL(UL61010)  or CSA certifications are available at extra cost. JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WarningJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The tube furnaces with quartz tube are designed for use under vacuum and low pressure <0.2 bars JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  Vacuum pressures may only be safely used up to 1000°C JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The flow rate for gasses should be limited to< 200ml/min) for reducing thermal shocks to the tubeJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Operation Demo Video & InstructionsJFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

     JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

JFbMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace

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