5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control Pannel5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· All parameters of ALD vapor puls time , and Gas flow are controlled by PLC via a 6" touch screen panel in a mobile cart 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control Two ALD valves with puls duation time and cycling with mico-second precision5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control For channels gas delivery with ±0.2%F.S via MFC5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Display vacuum pressure 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Other parameter upon request of customer5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Please click picture below to see control interface5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ALD valve5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Two ALD valves with pulse controller (min 10 ms duration )5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Capable of heating with thermal actuators5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Liquid-Vapor Generator5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Automatic liquid vapor generator is included and connect to ALD valve5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Max 1100ºC for continuous heating5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two programmable precision digital temperature controllers with 30 segments.5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two separate controlled Heating Zones5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 200mm length for each heating zone5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 400mm total in heating length5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 250mm constant central temperature heating area if both zones were heated at the same temperature5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 500ºC max temperature difference between two zones with thermal blocks in between5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Input power: 208 – 240V AC input, single phase at max. 4KW5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Optional: ALD control system can be installed with a short tube furnace or rotation tube furnace as picture below5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Anti-corrosive Pressure Gauge5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· 3.8x10-5 to 1125 Torr measurement range5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortens process cycle5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor element5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click the picture to view detail spec.5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· 10E-2 Torr vacuum can be achieved inside processing tube5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler Optional5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Click picture below to order bubbler or evaporator for CVD, and below right for Constant temperature control module5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Could add Quartz Crystal and thermocouple to monitoring thin film thickness and temperature at extra cost5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Update Idea 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnace5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· ( PE-ALD+CVD) ( PE-ALD+PVD +CVD)5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Compliance5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Built-in Pfeiffer's pump is ELT Certification5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· CE Certified5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· All electric components ( >24V) are UL / MET / CSA certified5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application Notes5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Application5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. 5w3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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