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Two Channels ALD  Tube Furnace System
model:PT-ALD-1200X

Two Channels ALD Tube Furnace System

    Application:  Widely used in experiments and small batch production in universities, scientific research institutes, industrial and mining enterprises, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Introduction:5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
     PT-ALD-1200X is a 4" tube furnace combining with two channel ALD valves and one channel liquid vapor delivery( Atomic Layer Deposition ) and as well as four channels gas delivery system for CVD growth of nanomaterial and pi film,   The smart design makes ALD  more cost effective and affordable for every research group.5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control Pannel5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All parameters of  ALD vapor puls time , and  Gas flow  are controlled by PLC via a 6" touch screen panel in a mobile cart 5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  Control Two  ALD valves with puls duation time and cycling with   mico-second precision5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Control For channels gas delivery with ±0.2%F.S via MFC5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Display vacuum pressure 5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Other parameter upon request of customer5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Please click picture below to see control interface5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

  Tube Furnace SystemTube Furnace System5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ALD valve5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two ALD valves with pulse controller  (min 10 ms duration )5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Capable of heating with thermal actuators5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Liquid-Vapor Generator5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Automatic liquid vapor generator is included and connect to  ALD valve5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace 5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Furnace5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Max 1100ºC for continuous heating5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two programmable precision digital temperature controllers with 30 segments.5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two separate controlled Heating Zones5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 200mm length for each heating zone5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 400mm total in heating length5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 250mm constant central temperature heating area if both zones were heated at the same temperature5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 500ºC max temperature difference between two zones with thermal blocks in between5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Input power: 208 – 240V AC input, single phase at max. 4KW5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Optional:  ALD control system can be installed with a short tube furnace or rotation tube furnace as picture below5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Tube Furnace5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Anti-corrosive Pressure Gauge5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 3.8x10-5 to 1125 Torr measurement range5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Anti-corrosive, gas-type independent 5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Fast atmospheric detection eliminates waiting time and shortens process cycle5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Easy to exchange plug & play sensor element5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click the picture to view detail spec.5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump 5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 10E-2 Torr vacuum can be achieved inside processing tube5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

      5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler Optional5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
                    
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click picture below to order bubbler or evaporator for CVD, and  below right for Constant temperature control module5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Could add Quartz Crystal and thermocouple  to monitoring thin film thickness and temperature at extra cost5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

             5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Update Idea 5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD  and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnace5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 PE-ALD+CVD· ( PE-ALD+CVD)           PE-ALD+PVD +CVD ( PE-ALD+PVD +CVD)5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty 5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Compliance5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Built-in Pfeiffer's pump is ELT Certification5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CE Certified5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All electric components ( >24V) are UL / MET / CSA certified5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. 5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application Notes5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Application5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. 5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5glMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Furnace System

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