Zhengzhou Protech
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Two Channels ALD  Tube Furnace System
model:PT-ALD-1200X

Two Channels ALD Tube Furnace System

    Application:  Widely used in experiments and small batch production in universities, scientific research institutes, industrial and mining enterprises, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Introduction:UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
     PT-ALD-1200X is a 4" tube furnace combining with two channel ALD valves and one channel liquid vapor delivery( Atomic Layer Deposition ) and as well as four channels gas delivery system for CVD growth of nanomaterial and pi film,   The smart design makes ALD  more cost effective and affordable for every research group.UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control PannelUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All parameters of  ALD vapor puls time , and  Gas flow  are controlled by PLC via a 6" touch screen panel in a mobile cart UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  Control Two  ALD valves with puls duation time and cycling with   mico-second precisionUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Control For channels gas delivery with ±0.2%F.S via MFCUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Display vacuum pressure UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Other parameter upon request of customerUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Please click picture below to see control interfaceUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

  Tube Furnace SystemTube Furnace SystemUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ALD valveUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two ALD valves with pulse controller  (min 10 ms duration )UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Capable of heating with thermal actuatorsUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Liquid-Vapor GeneratorUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Automatic liquid vapor generator is included and connect to  ALD valveUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube FurnaceUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Max 1100ºC for continuous heatingUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two programmable precision digital temperature controllers with 30 segments.UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two separate controlled Heating ZonesUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 200mm length for each heating zoneUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 400mm total in heating lengthUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 250mm constant central temperature heating area if both zones were heated at the same temperatureUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 500ºC max temperature difference between two zones with thermal blocks in betweenUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Input power: 208 – 240V AC input, single phase at max. 4KWUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Optional:  ALD control system can be installed with a short tube furnace or rotation tube furnace as picture belowUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Tube FurnaceUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Anti-corrosive Pressure GaugeUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 3.8x10-5 to 1125 Torr measurement rangeUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Anti-corrosive, gas-type independent UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detectionUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Fast atmospheric detection eliminates waiting time and shortens process cycleUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Easy to exchange plug & play sensor elementUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click the picture to view detail spec.UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 10E-2 Torr vacuum can be achieved inside processing tubeUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture belowUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

      UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler OptionalUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
                    
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click picture below to order bubbler or evaporator for CVD, and  below right for Constant temperature control moduleUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Could add Quartz Crystal and thermocouple  to monitoring thin film thickness and temperature at extra costUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

             UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Update Idea UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD  and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnaceUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 PE-ALD+CVD· ( PE-ALD+CVD)           PE-ALD+PVD +CVD ( PE-ALD+PVD +CVD)UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ComplianceUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Built-in Pfeiffer's pump is ELT CertificationUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CE CertifiedUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All electric components ( >24V) are UL / MET / CSA certifiedUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application NotesUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MpaUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tubeUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ApplicationUQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

UQgMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Furnace System

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