Two Channels ALD Tube Furnace System

Control Pannel

· All parameters of  ALD vapor puls time , and  Gas flow  are controlled by PLC via a 6" touch screen panel in a mobile cart 

·  Control Two  ALD valves with puls duation time and cycling with   mico-second precision

· Control For channels gas delivery with ±0.2%F.S via MFC

· Display vacuum pressure 

· Other parameter upon request of customer

· Please click picture below to see control interface

ALD valve

· Two ALD valves with pulse controller  (min 10 ms duration )

· Capable of heating with thermal actuators

Liquid-Vapor Generator

· Automatic liquid vapor generator is included and connect to  ALD valve

Dual Zone Split Tube furnace 

· Max 1100ºC for continuous heating

· Two programmable precision digital temperature controllers with 30 segments.

· Two separate controlled Heating Zones

· 200mm length for each heating zone

· 400mm total in heating length

· 250mm constant central temperature heating area if both zones were heated at the same temperature

· 500ºC max temperature difference between two zones with thermal blocks in between

· Input power: 208 – 240V AC input, single phase at max. 4KW

· Optional:  ALD control system can be installed with a short tube furnace or rotation tube furnace as picture below

Anti-corrosive Pressure Gauge

· 3.8x10^-5 to 1125 Torr measurement range

· Anti-corrosive, gas-type independent 

· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection

· Fast atmospheric detection eliminates waiting time and shortens process cycle

· Easy to exchange plug & play sensor element

· Click the picture to view detail spec.

Vacuum Pump 
( optional)

· 10E-2 Torr vacuum can be achieved inside processing tube

· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below

More Bubbler Optional


                    

· Click picture below to order bubbler or evaporator for CVD, and  below right for Constant temperature control module

· Could add Quartz Crystal and thermocouple  to monitoring thin film thickness and temperature at extra cost

Update Idea 

· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD  and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnace

· ( PE-ALD+CVD)            ( PE-ALD+PVD +CVD)

Warranty 

One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).

Compliance

· Built-in Pfeiffer's pump is ELT Certification

· CE Certified

· All electric components ( >24V) are UL / MET / CSA certified

· The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost.

Application Notes

· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 

· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube

· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

Application

· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials.