Zhengzhou Protech
Zhengzhou Protech
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Two Channels ALD  Tube Furnace System

Two Channels ALD Tube Furnace System

    Application:  Widely used in experiments and small batch production in universities, scientific research institutes, industrial and mining enterprises, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
     PT-ALD-1200X is a 4" tube furnace combining with two channel ALD valves and one channel liquid vapor delivery( Atomic Layer Deposition ) and as well as four channels gas delivery system for CVD growth of nanomaterial and pi film,   The smart design makes ALD  more cost effective and affordable for every research group.

Technical Parameter:

Control Pannel

· All parameters of  ALD vapor puls time , and  Gas flow  are controlled by PLC via a 6" touch screen panel in a mobile cart 

·  Control Two  ALD valves with puls duation time and cycling with   mico-second precision

· Control For channels gas delivery with ±0.2%F.S via MFC

· Display vacuum pressure 

· Other parameter upon request of customer

· Please click picture below to see control interface

  Tube Furnace SystemTube Furnace System

ALD valve

· Two ALD valves with pulse controller  (min 10 ms duration )

· Capable of heating with thermal actuators

Liquid-Vapor Generator

· Automatic liquid vapor generator is included and connect to  ALD valve

Dual Zone Split Tube furnace 
Tube Furnace

· Max 1100ºC for continuous heating

· Two programmable precision digital temperature controllers with 30 segments.

· Two separate controlled Heating Zones

· 200mm length for each heating zone

· 400mm total in heating length

· 250mm constant central temperature heating area if both zones were heated at the same temperature

· 500ºC max temperature difference between two zones with thermal blocks in between

· Input power: 208 – 240V AC input, single phase at max. 4KW

· Optional:  ALD control system can be installed with a short tube furnace or rotation tube furnace as picture below

Tube Furnace

Anti-corrosive Pressure Gauge

· 3.8x10-5 to 1125 Torr measurement range

· Anti-corrosive, gas-type independent 

· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection

· Fast atmospheric detection eliminates waiting time and shortens process cycle

· Easy to exchange plug & play sensor element

· Click the picture to view detail spec.

Vacuum Pump 
( optional)

· 10E-2 Torr vacuum can be achieved inside processing tube

· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below


More Bubbler Optional


· Click picture below to order bubbler or evaporator for CVD, and  below right for Constant temperature control module

· Could add Quartz Crystal and thermocouple  to monitoring thin film thickness and temperature at extra cost


Update Idea 

· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD  and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnace



One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).


· Built-in Pfeiffer's pump is ELT Certification

· CE Certified

· All electric components ( >24V) are UL / MET / CSA certified

· The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost.

Application Notes

· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 

· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube

· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C


· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. 

Tube Furnace System


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