Zhengzhou Protech
Zhengzhou Protech
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Vertical PECVD System
model:PT-VT1200-S60LD

Vertical PECVD System

    Application:  PECVD system, by ionizing atom-containing gas with microwave or radio frequency, creates active plasma locally. Compared with traditional CVD system, it will react easily to deposit and form the expected thin film in low temperature. It widely used to product high-quality sio2 film, si3N4 film, diamond film, hard thin film, optical thin film, CNT, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Range of Application:xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PECVD system, by ionizing atom-containing gas with microwave or radio frequency, creates active plasma locally. Compared with traditional CVD system, it will react easily to deposit and form the expected thin film in low temperature. It widely used to product high-quality sio2 film, si3N4 film, diamond film, hard thin film, optical thin film, CNT, etc.xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Parameters:
Product name Vertical PECVD System
Model PT-VT1200-S60LD
Tube Furnace Structure Split-type
  Insulation layer Alumina ceramic fiber
  Max. Temperature 1200℃
  Working Temperature ≤1100℃
  Outside Shell Temperature ≤45℃
  Heating Rate 20℃/min (Suggestion 10℃/min)
  Heating Zone Length 440mm (Single Zone)
  Heating Element 0Cr27Al7Mo2 resistance wire
  Temperature Sensor K-type thermocouple
  Temperature Control Accuracy ±1℃
  Tube Quartz tubexlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Φ50, 60, 80, 100, 150mm available.
  Temperature Controller PID automatic control with 30 programmable segments for precise control
  Sealing Flanges made of 304SS and silicon rubber ringsxlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas valve on left flangexlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum angle valve with KF25 connector on the right flangexlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Note: Standard flange, KF flange and hinge flange are available.
  Power Supply Single phase, 220V, 50Hz.
  Power Power 3kW
Vacuum pump unit Vacuum pumpxlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(With movable box)
10pa with a mechanical vacuum pumpxlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
0.001pa with a mechanical vacuum pump and a diffusion vacuum pump.
  Pressure Gauge Inficon Digital Pressure Gauge with high accuracyxlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Measurement Range 1×105--1×10-5Pa
Plasma RF Power Supply Output Power Range 5-300W AdjustablexlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
200w/300w/500w/1000w available.
  RF frequency 13.56 MHz ±0.005% stability
  Reflection Power 200W max
  Matching Automatic
  RF Output Port 50 Ω, N-type, female
  Noise  <50 dB
  Cooling Fans
  Power 208-240VAC, Single Phase, 50/60Hz
Gas-Mixing Unit with mass flow metersxlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(Float flow meters are available.)
Three precise mass flow meters (0.02% accuracy) are installed to control gas flow rate with touchscreen control for easy operation.xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank is installed on the bottom case.xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1: Gas flow range from 0~100 SCCMxlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2: Control range from 0~200 SCCM  xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 3: Control range from 0~500 SCCMxlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas inlet fitting: four 1/4NPS.xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas outlet fitting: four 1/4NPS.xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Power: 185-220VAC 50/60HzxlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4 stainless steel needle valves are installed on the left side to manually control the inlet and outlet of gas.
Chiller (Optional) Be used to cool the tube and vacuum pump.
Notes Pressure higher than 1.02Mpa will break the tube.xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Since the pressure in the gas cylinder is high, a converter is necessary. The measurement range of our converter is 0.01mpa-0.1mpa, will ensure a safe gas supply.xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
No vacuum condition is allowed when the temperature is higher than 1000℃.xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Please keep the gas flow lower than 200sccm when the temperature is high to lower the impact of cold air to the hot tube.xlSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
If you have to keep the valves on the two ends of the tube closed at the same time, please watch the pressure gauge and open the valves once the pressure is higher than 1.02Mpa to avoid any tube breakage.
Warranty One year with lifetime technical support.

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