Zhengzhou Protech
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Customized  CVD System
model:PT-T1600-CVD

Customized CVD System

    Application:  PT-T1600-CVD crucible furnace evaporation system forms a dense HfCl4、TiCl4 etc coating on the surface of the target material. It consists of an evaporator, a mixer and a reactor.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
1.Tube Furnace Part:4ifMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4ifMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
Tube Furnace
Max. Temperature 1600℃
Tube Size Φ100mm Customizable
Heat zone length 300mm Customizable
Heating element MoSi2 rods
Thermo couple B Type
Display LED Customizable
Tube material Alumina
Chamber material Ceramic fiber
Furnace shell material Carbon steel
Temperature Control PID automatic control via SCR power control
Heating Rate 0~20℃/max.(Suggest 0-10℃/min)
Temperature control accuracy ±1℃
Temperature uniformity ±5℃
Heating curves 30 steps programmable
Vacuum Flange Water cooling flange with valve
flowmeter part
Five flowmeters FFC 1+MFC 1: H2 Gas flow range from 0~500 sccm4ifMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
FFC 2+MFC 2: CH4 Gas flow range from 0~100 sccm4ifMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
FFC 3+MFC 3: Ar1: Gas flow range from 0~700 sccm4ifMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
FFC 4+MFC 4: Ar2: Gas flow range from 0~700 sccm4ifMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
FFC 5+MFC 5: Gasification gas:Gas flow range from 0~700 sccm4ifMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( Gas flow range according to your requirement)
4ifMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.Gas mixer part:4ifMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter :
 
Display LED Customizable
Max. Temperature 1200℃ for short time
Continuous Working Temp. ≤1100℃
Heating Rate Suggestion 0~10℃/min(max. 20℃/min)
Tube material 310S
Temperature heating zone About 200mm(According to design)
Diameter About OD165mm(According to design)
Temperature Control Accuracy ±1℃
Heating Element Resistance wire
Thermocouple N Type
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Chamber material Alumina Fiber
Max Temperature 1200℃
Crucible diameter 250mm Customizable
Crucible depth 400mm Customizable
Heating element Resistance wire
Thermo couple N Type
Chamber material Ceramic fiber
Furnace shell material Carbon steel
Crucible material Stainless steel 310S
Temperature Control PID automatic control
Heating Rate Max. 0~20℃/min
Temperature control accuracy ±1℃
Temperature uniformity ±5℃
Zhengzhou Protech

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