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Tube Furnace with Solid Precursor Sublimator for CVD Growth
model:PT-1200X

Tube Furnace with Solid Precursor Sublimator for CVD Growth

    Application:  Widely used in experiments and small batch production in universities, scientific research institutes, industrial and mining enterprises, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

Introduction:AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PT-1200X is a compact 1100°C CVD tube furnace with precursor sublimating attachment. Totally four-channel gas inlets are built on the sublimation which allows feedings of various gases to carry the source vapor into the main heater for further decomposition and deposition. The sample holder fixture mounted on the right flange is slidable for easy sample loading/unloading. Such a system configuration is suitable for growing a wide range of transitional metal dichalcogenides (such as MoSe2, MoS2...) and wide bandgap semiconductors (such as h-BN) layers on substrate up to 3" diameter. AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace and PreheaterAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Compact CVD furnace system is modified from PT-1200X-100 single zone tube furnace:AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · 4.33" O.D x 4.05" I.D x 29.13" Length quartz tubeAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · 1100ºC Max. working temperatureAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 ·  Water cooling flange on right-side is slidable for easy sample loadingAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 ·  Water cooling flange on left-side between the heater and furnace is used for pre-heated gas input and sealingAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flangeAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One small heater is attached to the left side flange of the furnace to preheat input gas, liquid,  or evaporate solid chemical, which will be then delivered to CVD furnace:AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Please click picture left for more details:AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1.2''O.D x 6''L SS tube as the heating chamberAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 600ºC Max. working temperature
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 · Flange on the left side is for gas sealing and inputAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating ZoneAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace:  440 mmAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Constant temperature zone: 100 mm AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Gas Heater:     150mmAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(Can be customized according to customer needs)
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Working TemperatureAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace:AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 Max heating temperature: 1100°C ( < 2 hour )AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous working temperature: 200~1000°CAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max heating & cooling rate: 20°C/minAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Heater: AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous working temperature: RT~600°CAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max heating & cooling rate: 20°C/minAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
graphite tube furnace
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· CVD Furnace and Heater (separate temp control):AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Digital controllers with PID/self-tuning functions and 30 segments programmableAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Thermocouple:  K type thermocouples, which feed through the right side flange and control furnace temperature.AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Control accuracy: +/- 1°CAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RS485 Communications PortAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum and Gas Sealing & FlangeAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The right flange of CVD furnaceAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Water cooling to prevent sealing o-ring from melting (water cooler is not included, please click water chiller to order)AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· KF25 vacuum fitting (to a vacuum pump, please click to order a pump,  vacuum hose, valve and sealing gasket)AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Slidable for the customer to easily and fast push/pull in/out sampleAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One quartz wafer holder ( 3" Dia. ) is included and the flange with heating radiation block AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· An anti-corrosive capacitance diaphragm gauge is includedAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Left flange (between CVD Furnace and Heater) with four 1/8'' fittings for 1/8'' tube:AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two 1/8'' fitting on the flange for independently and directly delivering any gas into the CVD furnace AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/8'' fitting for delivering heated gas from heater to CVD furnaceAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/4'' fitting for bypassing the gas (without heating) to the CVD furnace (inside the CVD furnace, the gas tube is merged with the heated gas pipe by a T fitting)AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Note: How gas pipe assembled in the CVD furnace through above 1/8'' fitting:AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One 1/4'' quartz tube delivers the vapor gas from heater(also the bypass gas by a T fitting)AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two 1/4'' quartz tube delivery extra gas via the two separate 1/8'' fitting on the big furnace left the flangeAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· These three 1/4'' quartz tubes inside CVD furnace is in parallel and vertically 1'' higher than sample holderAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  These three 1/4'' quartz tubes can be easily removed to clean or replaced once get stuck or corrodedAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heater:AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Left flange: one 1/8'' gas fitting to deliver gas to the heater for pre-heating and then to CVD furnace AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· On the right side to CVD furnace with necessary thermal block material to minimize the temperature gradient at the interface between the heater and CVD furnaceAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Furnace Chamber InstallationAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 2- 1/4" pipe adapter is installed on each flangeAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The optional Liquid Injection deviceAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

For direct liquid CVD  ( DLCVD), you may consider below devices for liquid injection:AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
                   
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WarrantyAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and etc are not covered by the warranty)AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· You may order replacement quartz tube here.AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Laptop, software & WiFi Control (Optional)fAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Temperature Control System enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for PT furnaces.AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· A wireless remote control provides up to 300 meters operating range.AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Above features are available upon request at an extra cost. Please contact us for more information.AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
WarningAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The tube furnaces with quartz tube are designed for use under vacuum and low pressure <0.2 bars AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  Vacuum pressures may only be safely used up to 1000°C AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The flow rate for gasses should be limited to< 200ml/min) for reducing thermal shocks to the tubeAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Operation Demo Video & InstructionsAWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

     AWLMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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After-sales serveces

After-sales serveces