Zhengzhou Protech
Zhengzhou Protech
Home > Products > Tube Furnace > PECVD Furnace

Product

Contact Us

Leave Message

Contact Us

All products are customizable, leave message immediately, we will reply as soon as possible.

Name

Tel/WhatsApp

E-mail *

Country *

Raw Materia

Message *

Verification code *

I can't see clearly, refresh
PECVD system with small sliding tube furnace
model:PT-1200C-S-SL-PECVD

PECVD system with small sliding tube furnace

    Application:  Graphene growth, carbon nanotube development, silicon nitride film deposition, two-dimensional material growth, crystal material battery electrode field.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
This sliding PECVD system is a modular combined assembly equipment. Consists of manual sliding heat field (multiple temperature regions of thermal field, optional heating length,) vacuum unit, gas supply system, RF power supply plasma excitation system, etc. Each module can be moved independently.SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials . 
SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 1.heating system
max. temp. 1200℃
working temp. ≤1100℃
tube size Φ50mm Customizable
insulation material Alumina fiber
thermocouple N type
temp. accuracy ±1℃
temp. control l PID automatic control and auto-tune function.SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
l 30 programmable segments for precise thermal processing.SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
l Built-in protection for the over-heated and broken thermocouple. 
heating zone length 230mm Customizable
constant zone length 100mm Customizable
heating element Resistance wire, Fe-Cr-Al Alloy doped by Mo
 SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2、RF generator
Output power 0W~150W
RF output port 50 Ω, N-type, female
Power stability ≤5W
Harmonic component ≤-50dbc
Overall efficiency >=70%
Power factor >=90%
Cooling air cooling  
SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3、Gas supply system
connnector double cover stainless steel fitting
standard range(N2) 50sccm,100sccm、500sccmSjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(optional)
Accuracy ±1.5%F.S
liner ±1%F.S
Max. pressure 3MPa
SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4、vacuum unit
Rotate rate 1450rpm
Pumping rate 10m³/h
ultimate vacuum 5X10-1Pa
Oil Capacity  SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.1LSjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Zhengzhou Protech

After-sales serveces

After-sales serveces