model:PT-1200C-S-SL-PECVD
PECVD system with small sliding tube furnace
Application: Graphene growth, carbon nanotube development, silicon nitride film deposition, two-dimensional material growth, crystal material battery electrode field.
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Detailed Parameters Of The Product
This sliding PECVD system is a modular combined assembly equipment. Consists of manual sliding heat field (multiple temperature regions of thermal field, optional heating length,) vacuum unit, gas supply system, RF power supply plasma excitation system, etc. Each module can be moved independently.SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials . SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere FurnacSjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 1.heating system
max. temp. |
1200℃ |
working temp. |
≤1100℃ |
tube size |
Φ50mm Customizable |
insulation material |
Alumina fiber |
thermocouple |
N type |
temp. accuracy |
±1℃ |
temp. control |
l PID automatic control and auto-tune function.SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac l 30 programmable segments for precise thermal processing.SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac l Built-in protection for the over-heated and broken thermocouple. |
heating zone length |
230mm Customizable |
constant zone length |
100mm Customizable |
heating element |
Resistance wire, Fe-Cr-Al Alloy doped by Mo |
SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac2、RF generator
Output power |
0W~150W |
RF output port |
50 Ω, N-type, female |
Power stability |
≤5W |
Harmonic component |
≤-50dbc |
Overall efficiency |
>=70% |
Power factor |
>=90% |
Cooling |
air cooling |
SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac3、Gas supply system
connnector |
double cover stainless steel fitting |
standard range(N2) |
50sccm,100sccm、500sccmSjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac (optional) |
Accuracy |
±1.5%F.S |
liner |
±1%F.S |
Max. pressure |
3MPa |
SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac4、vacuum unit
Rotate rate |
1450rpm |
Pumping rate |
10m³/h |
ultimate vacuum |
5X10-1Pa |
Oil Capacity |
SjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 1.1LSjMMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |