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Zhengzhou Protech
Zhengzhou Protech

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Plasma enhanced rotational PECVD system
model:PT-1200C-R-PECVD

Plasma enhanced rotational PECVD system

    Application:  Graphene growth, carbon nanotube development, silicon nitride film deposition, two-dimensional material growth, crystal material battery electrode field.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
Main features:ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
　　The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .　ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
　　Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to 35 degree.ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
　　Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameters
Furnace
Max. Tem 1200℃
Heating zone length 440mm Customizable
Constant zone length 200mm Customizable
ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Temperature ControllerErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 		 lPID automatic control and auto-tune function.ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
l30 programmable segments for precise thermal processing.ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
lBuilt-in protection for the over-heated and broken thermocouple. ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
lOperation interface is 7 "industrial control computer
Heating Elements ·Resistance wire, Fe-Cr-Al Alloy doped by Mo
Temperature Accuracy +/- 1℃
Processing tube Size：Φ60*420+Φ100*360+Φ60*420mmErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Furnace tube rotation rate：3~13r/minErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Customizable
Furnace body inclination angle 0~35°（adjustable）
RF generator 
Signal frequency 13.56 MHz±0.005%
Power output range 0-500W
RF output interface 50 Ω, N-type, female
Power stability ≤5W
Gas supply system
High precision mass Flowmeter（Range optional）  
Accuracy ±1.5%
Response accuracyErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 		 ±0.2%
Response time间ErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 		 Gas characteristics：1～4secErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Electrical characteristics:10sec
Working pressure difference range 0.1～0.5MPa
Max. pressureErSMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 		 3MPa
Connection  Φ6mmDouble clasp stainless steel joint
Vacuum unit
KF25 series bellows and manual stopper valves
Vacuum up to10-1Pa 
The value can be displayed intuitively by the digital display vacuum tester   
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