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model:PT-T1200RTR

Roll-to-roll PECVD Furnace

Application

Detailed Parameters Of The Product

Brief introdction:
Roll-to-roll PECVD is a plasma-enhanced chemical vapor deposition equipment (PECVD), and is equipped with a rewinding and unwinding device. This equipment can be used in the continuous heat treatment process of wire, such as carbon fiber preparation, alloy and other material wire modification treatment and other applications. It is also suitable for continuous growth of graphene on coils. The equipment includes five parts: roll-to-roll rewinding and unwinding movement module, 1200℃ dual temperature zone openable tube furnace module, PE plasma enhancement module, vacuum system and three-way proton flow meter gas supply system. The whole system can be used in vacuum/atmosphere. Work in a protected environment. The speed of the unwinding and unwinding mechanism is adjustable from 1 to 400mm/min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation to ensure that the speed of the sample is stable and not aliased, thereby ensuring the accuracy of the experiment

Detail intruduction:

Technical parameters of roll-to-roll PECVD:

1200℃ double temperature zone tube furnace	Power supply voltage	AC220V，50Hz
	*High power	3KW
	Heating temperature zone	Double temperature zone 200mm+200mm
	Working temperature	≤1200℃
	Temperature control accuracy	±1℃
	Temperature control method	AI-PID 30-segment process curve, can store multiple
	Furnace tube material	high purity quartz
	Furnace tube size	φ80mm I.D x 1400mm L
	Sealing method	Stainless steel vacuum flange
	Vacuum measurement	resistance gauge
	Working gas	Hydrogen, nitrogen, argon, oxygen and other non-corrosive gases
	Vacuum pump	Bipolar rotary vane vacuum pump
	Ultimate vacuum degree	10^-1Pa
Three-way mass flow meter	Valve type	Stainless steel needle valve
	Number of gas channels	Three channels
	Pressure range	0.05~0.3MPa
	Range	1~100 SCCM（Ar） 1~200 SCCM（H2） 1~500 SCCM (CH4)
	Flow control range	±1.5%
	Mixing tank volume	750mL
	Gas path material	304 stainless steel
	Pipe connection	6.35mm ferrule joint
	Power supply	AC220V 50Hz
S RF power supply	Output power	500W
	Output accuracy	±1%
	RF frequency	13.56MHz
	RF stability	±0.005%
	Cooling method	Air cooling