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High vacuum rotating tilt pecvd system
model:PT-PECVD

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

Product Description:rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ModelrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-PECVDrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Part I: Standard PartsrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube FurnacergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DisplayrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

LCD touch screenrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ChamberrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Split type and upper part can be openedrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. TemperaturergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200℃ for short timergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous Woking Temp.rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤1100℃rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating RatergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Suggestion: 0~10℃/min (max. 20℃/min)rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ZonergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

400mm CustomizablergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating ElementrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Resistance wire with MorgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ThermocouplergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

N typergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Accuracy
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OD60mm x 100mm x 60mmrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Length :1600 mmrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Customizable
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Material: Quartz TubergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PID automatic control via SCR power controlrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating curvesrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

30 steps programmablergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum FlangergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless Steel vacuum flange with valve, gas inlet and output portrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Magnetic fluid seal rotary jointrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Customized FunctionrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rotary and tiltrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tilt angle: 0-30° (suggestion:0-15°)rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube rotation speed:  0-10r/minrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Communicate PortrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Power supplyrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MatchingrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AutomaticrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF Output PortrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

50 Ω, N-type, femalergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

NoisergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

<50 dB.rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CoolingrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Air cooling.rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Pump SystemrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Turbo Vacuum PumprgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Ultimate vacuum 2.7*10-3 Pa.rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: GSP-5rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 6L/SrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated Speed(rpm): 1800rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

dB(A): 54rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: FF-620FrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 600L/SrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated speed(rpm): 27000rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Bearing: Ceramic bearing Oil Filling: 150mlrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The turbo vacuum pump will be designed intorgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

a cart with wheel.rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four precision mass flow meters :rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 1: Gas flow range from 0~100 sccmrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 2&3: Gas flow range from 0~100 sccmrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 4: Gas flow range from 0~100sccmrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One gas mixing tank is installed on bottom case with 4 stainless steel needlergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

valves is installed on left side of bottom case to control 4 type gases mixingrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

manuallyrgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Reference Photo:
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

pecvd tube furnacergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
rgmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pecvd tube furnacergmMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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