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High vacuum rotating tilt pecvd system
model:PT-PECVD

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Product Description:QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ModelQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-PECVDQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Part I: Standard PartsQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube FurnaceQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DisplayQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

LCD touch screenQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ChamberQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Split type and upper part can be openedQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. TemperatureQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200℃ for short timeQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous Woking Temp.QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤1100℃QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating RateQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Suggestion: 0~10℃/min (max. 20℃/min)QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ZoneQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

400mm CustomizableQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating ElementQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Resistance wire with MoQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ThermocoupleQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

N typeQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Accuracy
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OD60mm x 100mm x 60mmQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Length :1600 mmQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Customizable
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Material: Quartz TubeQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PID automatic control via SCR power controlQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating curvesQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

30 steps programmableQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum FlangeQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless Steel vacuum flange with valve, gas inlet and output portQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Magnetic fluid seal rotary jointQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Customized FunctionQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rotary and tiltQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tilt angle: 0-30° (suggestion:0-15°)QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube rotation speed:  0-10r/minQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Communicate PortQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Power supplyQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MatchingQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AutomaticQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF Output PortQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

50 Ω, N-type, femaleQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

NoiseQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

<50 dB.QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CoolingQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Air cooling.QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Pump SystemQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Turbo Vacuum PumpQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Ultimate vacuum 2.7*10-3 Pa.QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: GSP-5QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 6L/SQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated Speed(rpm): 1800QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

dB(A): 54QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: FF-620FQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 600L/SQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated speed(rpm): 27000QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Bearing: Ceramic bearing Oil Filling: 150mlQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The turbo vacuum pump will be designed intoQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

a cart with wheel.QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four precision mass flow meters :QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 1: Gas flow range from 0~100 sccmQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 2&3: Gas flow range from 0~100 sccmQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 4: Gas flow range from 0~100sccmQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One gas mixing tank is installed on bottom case with 4 stainless steel needleQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

valves is installed on left side of bottom case to control 4 type gases mixingQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

manuallyQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Reference Photo:
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

pecvd tube furnaceQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
QYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pecvd tube furnaceQYnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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After-sales serveces