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High vacuum rotating tilt pecvd system
model:PT-PECVD

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Product description:qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ModelqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-PECVDqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Part I: Standard PartsqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube FurnaceqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DisplayqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

LCD touch screenqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ChamberqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Split type and upper part can be openedqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. TemperatureqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200℃ for short timeqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous Woking Temp.qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤1100℃qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating RateqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Suggestion: 0~10℃/min (max. 20℃/min)qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ZoneqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

400mmqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating ElementqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Resistance wire with MoqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ThermocoupleqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

K typeqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Accuracy
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OD60mm x 100mm x 60mmqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Length :1600 mm
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Material: Quartz TubeqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PID automatic control via SCR power controlqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating curvesqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

30 steps programmableqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum FlangeqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless Steel vacuum flange with valve, gas inlet and output portqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Magnetic fluid seal rotary jointqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PowerqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50 Hz, single phaseqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(or according to your requirements)
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Customized FunctionqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rotary and tiltqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tilt angle: 0-30° (suggestion:0-15°)qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube rotation speed:  0-10r/minqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Communicate PortqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Power supplyqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Output PowerqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5 -500W adjustable with ± 1% stabilityqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF frequencyqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.56 MHz ±0.005% stabilityqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Reflection PowerqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

200W max.qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MatchingqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AutomaticqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF Output PortqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

50 Ω, N-type, femaleqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

NoiseqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

<50 dB.qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CoolingqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Air cooling.qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PowerqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50HzqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Pump SystemqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Turbo Vacuum PumpqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Ultimate vacuum 2.7*10-3 Pa.qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: GSP-5qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 6L/SqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Input voltage: 500WqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated Speed(rpm): 1800qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

dB(A): 54qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: FF-620FqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 600L/SqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated speed(rpm): 27000qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Bearing: Ceramic bearing Oil Filling: 150mlqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The turbo vacuum pump will be designed intoqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

a cart with wheel.qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four precision mass flow meters :qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 1: Gas flow range from 0~100 sccmqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 2&3: Gas flow range from 0~100 sccmqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 4: Gas flow range from 0~100sccmqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One gas mixing tank is installed on bottom case with 4 stainless steel needleqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

valves is installed on left side of bottom case to control 4 type gases mixingqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

manuallyqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Reference Photo:
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

pecvd tube furnaceqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
qVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pecvd tube furnaceqVWMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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