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Description：
Dual Zone Quartz tubular furnace is a CE certified and ready to pass UL/CSA certification spiltable dual zone Tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion.
| Heating Temperature | Max. Temperature: 1200°C Continuous Temperature: 1000°C |
| Heating Zone | Two Zones: 200 mm (8") for each zone and total 400 mm heating zone length (Can be customized according to customer needs) |
| Constant Temperature Zone | If two zones are set at the same temperature, constant temperature zone is 10" (250 mm) long with a temperature discrepancy of +/- 1°C. If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1°C. |
| Max. Heating Rate | <= 20 °C /min (20 °C /min below 800°C; <5 °C /min over 1000°C) |
| Tube Size and material | Quartz Tube: 80 ODx 72 IDx 1000 L (Can be customized according to customer needs) |
| Temperature Accuracy | +/- 1°C |
| Heating Elements | Fe-Cr-Al Alloy doped by Mo |
| Temperature Controller | Two precision temperature controllers to control two zones separately. PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built in overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communications Port. |
| Gas Mix Station | Four precision mass flow controller ( MFC) with digital display · MFC 1: Control range from 0~100 sccm · MFC 2: Control range from 0~200 sccm · MFC 3: Control range from 0~200 sccm · MFC 4: Control range from 0~500 sccm Gas route: 4 routes Flowing rate accuracy: 0.2% accuracy Gas inlet and outlet: 1/4" swagelok tube connector One gas mixing tank installed on bottom case with liquid release valve. Each gas route with SS needle valve to on-off control independently. |
| Vacuum pump | 120 L/m Rotary Vane Vacuum Pump with Oil Trap (220V single phase) and stainless steel hose tube are included for connecting to tube furnace. Max. achievable vacuum pressure is 10^-2 torr. |
| Vacuum gauge | Power Connection:9 pins D-sub connector. Power Adapter:One 24V,1A DC power adapter is included and ready to use. Input voltage for the adpter is 110~240V. Measurement Range:3.8x10-5 to 1125 Torr. Display:Digital display (20x14mm) with measurement unit torr Gauge Fitting:Small Foot-Print with 1/8"NPT fitting Dimensions:46mm×28mm×126mm ( L x W x H) |
No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City,
Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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