Zhengzhou Protech
Zhengzhou Protech
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CVD system
model:PT-TCVD1200

CVD system

    Application:  CVD systems are widely used in the semiconductor industry to deposit a variety of materials. They can synthesize nanomaterials such as carbon nanotubes and are also used to manufacture electronic equipment components and prepare high-quality thin films.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
zgDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CVD system
Technical Parameters
Tube Furnace Part
Product model PT-TCVD1200
Maximum temperature 1200℃
Working temperature ≦1100℃
Heating zone 200mm Customizable
Heating element Molybdenum alloy resistance wire
Heating rate 0-20ºC/min, 10C/min recommended
Tube size Diameter 50*600mm Customizable
Tube material High-purity quartz tube
Tube plugging Metal screen on the left, detachable
Temperature control system 7-inch touch screen control
Temperature control protection With over-temperature and broken couple protection function
Temperature measuring element N-type thermocouple
Temperature control accuracy ±1℃
Furnace material Polycrystalline fiber material
Flange Stainless steel sealed water-cooled flange, quartz lens on the right flange end
Sealing system O-ring extrusion seal is used between the furnace tube and the flange;
Dynamic seal is used between the rotating motor and the flange
Furnace structure Outer shell is made of stainless steel, double-layer liner structure, and the furnace door is opened manually
Furnace shell temperature ≤55℃
 
 
Rotation System
Speed ​​​​ 200r/min
Connection method Coupling connection with shaft dynamic seal transmission
zgDMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum System
Name DRV10 rotary vane pump 2L/S
Main parameters Ultimate vacuum ≤10Pa
Vacuum gauge Resistance gauge + film gauge
Pressure control Working pressure 0.04-0.06Mpa
Filter Vacuum pump equipped with special filter device
Pressure gauge Mechanical pressure gauge
 
Gas System
Air path One nitrogen
Flow control Touch screen display
Flow range 500SCCM
Control accuracy ±1.5%F.S
Inlet interface 1 manual valve + 1 solenoid valve
Exhaust interface 1 manual valve
Zhengzhou Protech

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