Zhengzhou Protech
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Single Zone CVD System
model:PT-T1200

Single Zone CVD System

    Application:  PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion. 
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion. JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
Model PT-T1200
Part I: Standard Parts
 JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube FurnaceJI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Display 7” LCD Touch Screen
Max. Temp. 1200℃ for short time
Woking Temp. ≤1100℃
Heating Rate Suggestion: 0~10℃/min 
Temperature Zone 440mm
Heating Element Resistance wire with Mo
Thermocouple K type
Temperature Control Accuracy ±1℃
Tube Size 100 x 1000mm (OD x minimum L)
Material:  Quartz tube 
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange.JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One end of the flange has 1barbed needle valves, with installed Mechanical Pressure Gauge. JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Another end of the flange has a KF25 port with a barbed needle valve
Power 220V, 50 Hz, single phase at max. 4KW
Vacuum Pump Rotary Vane Vacuum Pump Ultimate vacuum 10-3 Torr.JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum inside the tube is around 10-1 Torr.JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(RM temp. And empty tube condition)JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Flow rate: 2L/S JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Digital vacuum gauge is included
Mass Flow MetersJI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(Seven Star Brand)JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
With LCD Touch Screen ControllerJI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(Desigen by Kejia with Kejia logo)
JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
One Float flowmeter + Five precision mass flow meters :JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC Accuracy is: ±1.5% F.S.JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1 for nitrogen : Gas flow range from 0~100 sccmJI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2 for hydrogen : Gas flow range from 0~200 sccmJI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 3 for methan : Gas flow range from 0~300 sccmJI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 4 for argon: Gas flow range from 0~400 sccmJI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 5 for oxygen: Gas flow range from 0~500 sccmJI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank (for 5 MFC only) is installed on bottom case with 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.JI5Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 

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