model:PT-T1200
Single Zone CVD System
Application: PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion.
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Detailed Parameters Of The Product
Brief Introduction:
PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion.
Technical Parameter:
Model |
PT-T1200 |
Part I: Standard Parts |
Tube Furnace
 |
Display |
7” LCD Touch Screen |
Max. Temp. |
1200℃ for short time |
Woking Temp. |
≤1100℃ |
Heating Rate |
Suggestion: 0~10℃/min |
Temperature Zone |
440mm |
Heating Element |
Resistance wire with Mo |
Thermocouple |
K type |
Temperature Control Accuracy |
±1℃ |
Tube Size |
100 x 1000mm (OD x minimum L) |
Material: Quartz tube |
Temperature Control |
PID automatic control via SCR power control |
Heating curves |
30 steps programmable |
Vacuum Flange |
Stainless Steel vacuum flange. One end of the flange has 1barbed needle valves, with installed Mechanical Pressure Gauge. Another end of the flange has a KF25 port with a barbed needle valve |
Power |
220V, 50 Hz, single phase at max. 4KW |
Vacuum Pump |
Rotary Vane Vacuum Pump |
Ultimate vacuum 10-3 Torr. Vacuum inside the tube is around 10-1 Torr. (RM temp. And empty tube condition) Flow rate: 2L/S The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories Digital vacuum gauge is included |
Mass Flow Meters (Seven Star Brand) With LCD Touch Screen Controller (Desigen by Kejia with Kejia logo) |
One Float flowmeter + Five precision mass flow meters : MFC Accuracy is: ±1.5% F.S. MFC 1 for nitrogen : Gas flow range from 0~100 sccm MFC 2 for hydrogen : Gas flow range from 0~200 sccm MFC 3 for methan : Gas flow range from 0~300 sccm MFC 4 for argon: Gas flow range from 0~400 sccm MFC 5 for oxygen: Gas flow range from 0~500 sccm One gas mixing tank (for 5 MFC only) is installed on bottom case with 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.   |