Zhengzhou Protech
Zhengzhou Protech
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Single Zone CVD System

Single Zone CVD System

    Application:  PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion. 
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  
    PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion. 
Technical Parameter:
Model PT-T1200
Part I: Standard Parts
Tube Furnace

Display 7” LCD Touch Screen
Max. Temp. 1200℃ for short time
Woking Temp. ≤1100℃
Heating Rate Suggestion: 0~10℃/min 
Temperature Zone 440mm
Heating Element Resistance wire with Mo
Thermocouple K type
Temperature Control Accuracy ±1℃
Tube Size 100 x 1000mm (OD x minimum L)
Material:  Quartz tube 
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange.
One end of the flange has 1barbed needle valves, with installed Mechanical Pressure Gauge. 
Another end of the flange has a KF25 port with a barbed needle valve
Power 220V, 50 Hz, single phase at max. 4KW
Vacuum Pump Rotary Vane Vacuum Pump Ultimate vacuum 10-3 Torr.
Vacuum inside the tube is around 10-1 Torr.
(RM temp. And empty tube condition)
Flow rate: 2L/S 
The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories 
Digital vacuum gauge is included
Mass Flow Meters
(Seven Star Brand)
With LCD Touch Screen Controller
(Desigen by Kejia with Kejia logo)

One Float flowmeter + Five precision mass flow meters :
MFC Accuracy is: ±1.5% F.S.
MFC 1 for nitrogen : Gas flow range from 0~100 sccm
MFC 2 for hydrogen : Gas flow range from 0~200 sccm
MFC 3 for methan : Gas flow range from 0~300 sccm
MFC 4 for argon: Gas flow range from 0~400 sccm
MFC 5 for oxygen: Gas flow range from 0~500 sccm
One gas mixing tank (for 5 MFC only) is installed on bottom case with 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.


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