Single Zone CVD System
Application: PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion.
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Detailed Parameters Of The Product
PT-T1200 CVD is a tube furnace with 100mm diameter quartz tube, vacuum pump and five channels mass flow meters gas flowing system. It can mix 1-5 types of gases for CVD or diffusion.
|Part I: Standard Parts
||7” LCD Touch Screen
||1200℃ for short time
||Resistance wire with Mo
|Temperature Control Accuracy
||100 x 1000mm (OD x minimum L)
|Material: Quartz tube
||PID automatic control via SCR power control
||30 steps programmable
||Stainless Steel vacuum flange.
One end of the flange has 1barbed needle valves, with installed Mechanical Pressure Gauge.
Another end of the flange has a KF25 port with a barbed needle valve
||220V, 50 Hz, single phase at max. 4KW
||Rotary Vane Vacuum Pump
||Ultimate vacuum 10-3 Torr.
Vacuum inside the tube is around 10-1 Torr.
(RM temp. And empty tube condition)
Flow rate: 2L/S
The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories
Digital vacuum gauge is included
|Mass Flow Meters
(Seven Star Brand)
With LCD Touch Screen Controller
(Desigen by Kejia with Kejia logo)
|One Float flowmeter + Five precision mass flow meters :
MFC Accuracy is: ±1.5% F.S.
MFC 1 for nitrogen : Gas flow range from 0~100 sccm
MFC 2 for hydrogen : Gas flow range from 0~200 sccm
MFC 3 for methan : Gas flow range from 0~300 sccm
MFC 4 for argon: Gas flow range from 0~400 sccm
MFC 5 for oxygen: Gas flow range from 0~500 sccm
One gas mixing tank (for 5 MFC only) is installed on bottom case with 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.