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Home > Products > Coating Equipment > Roll-to-roll graphene film growth equipment

model:PT-T1200RTR-III-80-PE

Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production

Application

Contact us for customize send-email: info@lab-furnace.com

Detailed Parameters Of The Product

Introduction
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.

1.Heating furnace

Max. Temp	1200℃
working temp	≤1100℃
tube zie	Φ80mm
insulation material	Alumina, high temperature fiber products
thermocouple	K type
Temperature Accuracy	±1℃
Temp. control	· PID automatic control and auto-tune function. · 30 programmable segments for precise thermal processing. · Built-in protection for the over-heated and broken thermocouple.
Heating Zone Length	200+200+200mm
Heating Element	Fe-Cr-Alloy adopted by Mo
power	single phase，220V，50Hz

2、PE system

Power output range	0W~500W
Maximum reflected power	100W
RF output interface	50 Ω, N-type, female
Power stability	≤5W
Harmonic component	≤-50dbc
Supply voltage	Single-phase AC (187V-253V) Frequency 50/60HZ
Overall efficiency	>=70%
Power Factor	>=90%
cooling method	Forced air cooling

3、Three-way proton flow control system

Connector type	Double ferrule stainless steel joint
Standard range (N2)	200sccm，500sccm、1000sccm (Can be customized according to user requirements)
Accuracy	±1.5%F.S
Linear	±1%F.S
Repeat accuracy	±0.2%F.S
Response time	Gas characteristics: 1～4 Sec, electrical characteristics: 10 Sec
Working pressure range	0.1～0.5 MPa
greatest pressure	3MPa
interface	Φ6,1/4''
display	4-digit display
Working temperature	5~45 high purity gas
Pressure vacuum gauge	－0.1～0.15 MPa, 0.01 MPa/div
Shut-off valve	Φ6
Internal and external double throwing stainless steel pipe	Φ6

4、Low vacuum unit

relative humidity	≤85%
working environment	5℃～40℃
Working voltage	220V±10% 50~60HZ
power	1KW
Pumping rate	10m³/h
Ultimate vacuum	5X10-1Pa
Working pressure range	1.01325X105～1.33X10-2Pa
Withstand voltage	0.03MPa
Oil capacity	1.1L
Inlet port diameter	KF25
Exhaust port diameter	KF25
noise	50dB
Connection method	Using bellows, the manual flapper valve is connected to the bellows