Zhengzhou Protech
Zhengzhou Protech
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Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production

Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production

    Application:  It is mainly used for continuous growth of graphene films or continuous special equipment for linear materials.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.  

1.Heating furnace

Max. Temp 1200℃
working temp ≤1100℃
tube zie Φ80mm
insulation material Alumina, high temperature fiber products
thermocouple K type
Temperature Accuracy ±1℃
Temp. control · PID automatic control and auto-tune function.
· 30 programmable segments for precise thermal processing.
· Built-in protection for the over-heated and broken thermocouple. 
Heating Zone Length 200+200+200mm
Heating Element Fe-Cr-Alloy adopted by Mo
power single phase,220V,50Hz

2、PE system
Power output range 0W~500W
Maximum reflected power 100W
RF output interface 50 Ω, N-type, female
Power stability ≤5W
Harmonic component ≤-50dbc
Supply voltage Single-phase AC (187V-253V) Frequency 50/60HZ
Overall efficiency >=70%
Power Factor >=90%
cooling method Forced air cooling

3、Three-way proton flow control system
Connector type Double ferrule stainless steel joint
Standard range (N2) 200sccm,500sccm、1000sccm
(Can be customized according to user requirements)
Accuracy ±1.5%F.S
Linear ±1%F.S
Repeat accuracy ±0.2%F.S
Response time Gas characteristics: 1~4 Sec, electrical characteristics: 10 Sec
Working pressure range 0.1~0.5 MPa
greatest pressure 3MPa
interface Φ6,1/4''
display 4-digit display
Working temperature 5~45 high purity gas
Pressure vacuum gauge -0.1~0.15 MPa, 0.01 MPa/div
Shut-off valve Φ6
Internal and external double throwing stainless steel pipe Φ6
4、Low vacuum unit

relative humidity ≤85%
working environment 5℃~40℃
Working voltage 220V±10%  50~60HZ
power 1KW
Pumping rate 10m³/h
Ultimate vacuum 5X10-1Pa
Working pressure range 1.01325X105~1.33X10-2Pa
Withstand voltage 0.03MPa
Oil capacity 1.1L
Inlet port diameter KF25
Exhaust port diameter KF25
noise 50dB
Connection method Using bellows, the manual flapper valve is connected to the bellows
roll to roll pecvd
roll to roll pecvd
Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production


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