model:PT-T1200RTR-III-80-PE
Plasma Enhanced Roll to Roll Chemical Vapor Deposition System for graphene production
Application: It is mainly used for continuous growth of graphene films or continuous special equipment for linear materials.
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info@lab-furnace.com
Detailed Parameters Of The Product
Introduction
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.
1.Heating furnace
Max. Temp |
1200℃ |
working temp |
≤1100℃ |
tube zie |
Φ80mm |
insulation material |
Alumina, high temperature fiber products |
thermocouple |
K type |
Temperature Accuracy |
±1℃ |
Temp. control |
· PID automatic control and auto-tune function.
· 30 programmable segments for precise thermal processing.
· Built-in protection for the over-heated and broken thermocouple. |
Heating Zone Length |
200+200+200mm |
Heating Element |
Fe-Cr-Alloy adopted by Mo |
power |
single phase,220V,50Hz |
2、PE system
Power output range |
0W~500W |
Maximum reflected power |
100W |
RF output interface |
50 Ω, N-type, female |
Power stability |
≤5W |
Harmonic component |
≤-50dbc |
Supply voltage |
Single-phase AC (187V-253V) Frequency 50/60HZ |
Overall efficiency |
>=70% |
Power Factor |
>=90% |
cooling method |
Forced air cooling |
3、Three-way proton flow control system
Connector type |
Double ferrule stainless steel joint |
Standard range (N2) |
200sccm,500sccm、1000sccm
(Can be customized according to user requirements) |
Accuracy |
±1.5%F.S |
Linear |
±1%F.S |
Repeat accuracy |
±0.2%F.S |
Response time |
Gas characteristics: 1~4 Sec, electrical characteristics: 10 Sec |
Working pressure range |
0.1~0.5 MPa |
greatest pressure |
3MPa |
interface |
Φ6,1/4'' |
display |
4-digit display |
Working temperature |
5~45 high purity gas |
Pressure vacuum gauge |
-0.1~0.15 MPa, 0.01 MPa/div |
Shut-off valve |
Φ6 |
Internal and external double throwing stainless steel pipe |
Φ6 |
4、Low vacuum unit
relative humidity |
≤85% |
working environment |
5℃~40℃ |
Working voltage |
220V±10% 50~60HZ |
power |
1KW |
Pumping rate |
10m³/h |
Ultimate vacuum |
5X10-1Pa |
Working pressure range |
1.01325X105~1.33X10-2Pa |
Withstand voltage |
0.03MPa |
Oil capacity |
1.1L |
Inlet port diameter |
KF25 |
Exhaust port diameter |
KF25 |
noise |
50dB |
Connection method |
Using bellows, the manual flapper valve is connected to the bellows |