Zhengzhou Protech
Zhengzhou Protech
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Large-diameter dynamic plasma assisted roll-to-roll graphene preparation equipment

Large-diameter dynamic plasma assisted roll-to-roll graphene preparation equipment

    Application:  It is mainly used for continuous growth of graphene films or continuous special equipment for linear materials.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.
1.heating system

max. temp 1200℃
working temp. ≤1100℃
tube size Φ150mm
insulation material Alumina, high temperature fiber products
thermocouple K type
temp. accuracy ±1℃
temp. control · PID automatic control and auto-tune function.
· 30 programmable segments for precise thermal processing.
· Built-in protection for the over-heated and broken thermocouple. 
Heating Zone Length 200+200+200mm
Heating Element Fe-Cr-Al Alloy doped by Mo
power single phase,220V,50Hz

2、RF generator
Power output 0W~1000W
Maximum reflected power 200W
RF output interface 50 Ω, N-type, female
Power stability ≤5W
Harmonic component ≤-50dbc
voltage single phase (187V-253V) 50/60HZ
Machine efficiency >=70%
cooling air cooling

3、3 channels MFC
Connector style  Double cutting ferrule stainless steel connector
Standard range(N2) 200sccm,500sccm、1000sccm
Accuracy ±1.5%F.S
Linearity ±1%F.S
Repeat accuracy ±0.2%F.S
Response time gas:1~4 Sec,electricity:10 Sec
Working pressure range 0.1~0.5 MPa
Max.pressure 3MPa
Connector Φ6,1/4''
display 4-digit display
Working temp. environment 5~45High purity gas
Pressure vacuum gauge  -0.1~0.15 MPa, 0.01 MPa/grid
Shut-off valve Φ6
Internal and external Polished ss pipe Φ6

4、low vacuum unit
Relative air humidity  ≤85%
Working temp. environment 5℃~40℃
voltage 380V
pumping rate 32m³/h
ultimate vacuum 5X10-1Pa(No-load & cold state)
Working pressure range 1.01325X105~1.33X10-2Pa
Inlet diameter KF40
outlet diameter KF40
connetcing method Use bellows, manual baffle valve connected to bellows
Large-diameter dynamic plasma assisted roll-to-roll graphene preparation equipment


Zhengzhou Protech

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