model:PT-T1200RTR
Large-diameter dynamic plasma assisted roll-to-roll graphene preparation equipment
Application: It is mainly used for continuous growth of graphene films or continuous special equipment for linear materials.
Contact us for customize
send-email:
info@lab-furnace.com
Detailed Parameters Of The Product
Introdution
The system consists of heating furnace,3 channels MFC,vacuum unit,RF generator,cooling device,Sealing device for collecting and releasing copper foil and automatic control system.The unwinding roller and the winding roller are respectively installed in the sealing device for collecting and releasing copper foil, and a cooling device is installed between the output material exhaust cavity and the furnace body.
1.heating system
max. temp |
1200℃ |
working temp. |
≤1100℃ |
tube size |
Φ150mm |
insulation material |
Alumina, high temperature fiber products |
thermocouple |
K type |
temp. accuracy |
±1℃ |
temp. control |
· PID automatic control and auto-tune function.
· 30 programmable segments for precise thermal processing.
· Built-in protection for the over-heated and broken thermocouple. |
Heating Zone Length |
200+200+200mm |
Heating Element |
Fe-Cr-Al Alloy doped by Mo |
power |
single phase,220V,50Hz |
2、RF generator
Power output |
0W~1000W |
Maximum reflected power |
200W |
RF output interface |
50 Ω, N-type, female |
Power stability |
≤5W |
Harmonic component |
≤-50dbc |
voltage |
single phase (187V-253V) 50/60HZ |
Machine efficiency |
>=70% |
|
|
cooling |
air cooling |
3、3 channels MFC
Connector style |
Double cutting ferrule stainless steel connector |
Standard range(N2) |
200sccm,500sccm、1000sccm
(optional) |
Accuracy |
±1.5%F.S |
Linearity |
±1%F.S |
Repeat accuracy |
±0.2%F.S |
Response time |
gas:1~4 Sec,electricity:10 Sec |
Working pressure range |
0.1~0.5 MPa |
Max.pressure |
3MPa |
Connector |
Φ6,1/4'' |
display |
4-digit display |
Working temp. environment |
5~45High purity gas |
Pressure vacuum gauge |
-0.1~0.15 MPa, 0.01 MPa/grid |
Shut-off valve |
Φ6 |
Internal and external Polished ss pipe |
Φ6 |
4、low vacuum unit
Relative air humidity |
≤85% |
Working temp. environment |
5℃~40℃ |
voltage |
380V |
pumping rate |
32m³/h |
ultimate vacuum |
5X10-1Pa(No-load & cold state) |
Working pressure range |
1.01325X105~1.33X10-2Pa |
Inlet diameter |
KF40 |
outlet diameter |
KF40 |
connetcing method |
Use bellows, manual baffle valve connected to bellows |