PRODUCT

0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER

model:PT-T1600-PECVD

1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail

Application

Detailed Parameters Of The Product

Technical Parameter:

Pre-heating furnace		Small tube furnace with 200mm length single heating zone Max. temperature: 1600ºC 30 segment programmable temperature control The vapor goes through the heater first before getting in the RF Plasma generator. It can put solid material in the heater for evaporation and mixing with the vapor phase. Vacuum flange: included
Tube Furnace	Display	LED
	Optional LCD Touch Screen
	Chamber	Split type and upper part can be opened
	Limiting Temp.	1600℃
	Continuous Woking Temp.	≤1500℃
	Heating Rate	Suggestion: 0~10℃/min
	Temperature Zone	200mm+200+200mm Two programmable precision digital temperature controllers with 30 segments.
	Heating Element	MoSi2 heaters
	Thermocouple	B type
	Temperature Control Accuracy	±1℃
	Tube Size	80mm OD x 3200 mm L
	Tube Material	Quartz Tube
	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Vacuum Flange	Stainless Steel vacuum flange with valve
	Power	380V, 50 Hz, three phases at max. 14KW
	Sliding	Manually
Plasma RF Power supply	Output Power	5 -300W adjustable with ± 1% stability
	RF frequency	13.56 MHz ±0.005% stability
	Reflection Power	200W max.
	Matching	Automatic
	RF Output Port	50 Ω, N-type, female
	Noise	<50 dB.
	Cooling	Air cooling.
	Power	220V, 50Hz
Vacuum Pump	Rotary Vane Vacuum Pump+molecular pump system	Vacuum level:6*10^-5torr The rotary vane vacuum pump and molecular pump will be designed into a cart with wheel.