PRODUCT

0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER

Ask for a free consultation Ask for technical support

Home > Products > Tube Furnace > PECVD Furnace

model:PT-PECVD

Compact Auto PECVD Furnace

Application

Detailed Parameters Of The Product

1. Introduction to the system
Plasma-enhanced chemical vapor deposition (PECVD) technology is a series of preparation technology that uses glow discharge (plasma) to chemically react gaseous substances containing thin films to achieve thin film technology growth. Our company designs and manufactures this equipment according to the experimental requirements to meet the needs of various thin film researches.

2. Main Functions and Features
2.1 It adopts professional heating elements, and the furnace heat preservation material adopts polycrystalline fiber material, which has good heat preservation performance, durability, high tensile strength, no impurities, high purity, and energy saving effect is obviously better than domestic fiber materials.
2.2 The whole furnace body adopts a double-layer inner liner structure with an air gap in the middle. Even if the furnace temperature reaches the highest point, the surface of the furnace body can still be touched safely without hot feeling.
2.3 The furnace is made of energy-saving materials, and the energy consumption of the whole machine is only 1/3 of the same traditional electric furnace, which is energy-saving and environmentally friendly.
2.4 Over-temperature alarm and power off, leakage protection, safe and reliable operation, with multiple protection functions.
2.5 The PECVD tube furnace system consists of: RF power supply, sliding tube furnace, mass flow meter gas mixing station, vacuum system and pressure control system

3.Technical Parameter

Item Name	PECVD System
RF Power supply	Output Power	5 -500W adjustable with ± 1% stability
	RF frequency	13.56 MHz ±0.005% stability
	Reflection Power	200W max.
	Matching	Automatic
	RF Output Port	50 Ω, N-type, female
	Noise	<50 dB.
	Cooling	Air cooling.
	Power	220V, 50Hz
Sliding Tube Furnace	Rail	Manual or Automatically
	Hot Zone	300mm
	Tube Size	60mm x1600mm OD*L
	Tube Material	High Purity Quartz Tube（SiO2 ≥ 99.99%）
	Working Temp.	≤1100℃
	Temperature Control	PID automatic control via SCR power control
	Temp. Control Accuracy	±1℃
	Heating Rate	Suggest: 0~10℃/min
	Heating Element	Resistance Wire
	Rated Voltage	220V 50Hz Single Phase
	Thermocouple	K type
	Structure	Double shell structure with air cooling system
	Vacuum Flange	One of flange is with 1/4" valve gas inlet, 60mm to KF50 flange. The other side is with pressure control valve, a pneumatic pressure relief valve and an air release valve.
Mass Flow Meter Gas Mixing Station	Four Channels precision proton flowmeter: Measurement accuracy: ±1.5% F.S. Flow rate range: 0~200 sccm Flow rate range: 0~200 sccm Flow rate range: 0~200 sccm Flow range: 0~500 sccm Adjust the gas flow through the touch screen
Vacuum System	Rotary vane vacuum pump,max. vacuum degree: 1pa in the cold state of the empty furnace, Vacuum gauge: Imported digital display vacuum gauge displays the vacuum degree in real time, with high accuracy.
Pressure Control System	Controllable Range: -15Kpa to 15Kpa (Can also customize according to your customer’s requirement)
Automatic Control LCD Touch Screen	The touch screen interface integrates and controls the furnace, vacuum pump, mass flow meter and RF power supply. The furnace part needs to set the temperature-time curve first. The integrated control part can control the start and stop of the temperature curve, vacuum degree, gas flow, radio frequency power and radio frequency start and stop, pressure relief valve, etc.