Two Channels ALD Tube Furnace System

CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control PannelCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All parameters of  ALD vapor puls time , and  Gas flow  are controlled by PLC via a 6" touch screen panel in a mobile cart CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

·  Control Two  ALD valves with puls duation time and cycling with   mico-second precisionCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Control For channels gas delivery with ±0.2%F.S via MFCCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Display vacuum pressure CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Other parameter upon request of customerCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Please click picture below to see control interfaceCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

  CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ALD valveCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two ALD valves with pulse controller  (min 10 ms duration )CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Capable of heating with thermal actuatorsCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Liquid-Vapor GeneratorCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Automatic liquid vapor generator is included and connect to  ALD valveCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Max 1100ºC for continuous heatingCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two programmable precision digital temperature controllers with 30 segments.CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Two separate controlled Heating ZonesCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 200mm length for each heating zoneCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 400mm total in heating lengthCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 250mm constant central temperature heating area if both zones were heated at the same temperatureCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 500ºC max temperature difference between two zones with thermal blocks in betweenCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Optional:  ALD control system can be installed with a short tube furnace or rotation tube furnace as picture belowCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Anti-corrosive Pressure GaugeCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 3.8x10^-5 to 1125 Torr measurement rangeCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Anti-corrosive, gas-type independent CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detectionCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Fast atmospheric detection eliminates waiting time and shortens process cycleCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Easy to exchange plug & play sensor elementCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click the picture to view detail spec.CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· 10E-2 Torr vacuum can be achieved inside processing tubeCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture belowCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

      CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler OptionalCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
                    CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Click picture below to order bubbler or evaporator for CVD, and  below right for Constant temperature control moduleCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Could add Quartz Crystal and thermocouple  to monitoring thin film thickness and temperature at extra costCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

             CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Update Idea CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD  and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnaceCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· ( PE-ALD+CVD)            ( PE-ALD+PVD +CVD)CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ComplianceCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Built-in Pfeiffer's pump is ELT CertificationCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· All electric components ( >24V) are UL / MET / CSA certifiedCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application NotesCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MpaCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tubeCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ApplicationCmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. CmcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac