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model:PT-TG1100-S215CK3W

3 Zone Vacuum Tube Furnace for Wafer Annealing

Application

Detailed Parameters of the Product

Introduction

The PT-TG1100-S215CK3W is a fully integrated horizontal dual-chamber tube furnace engineered for high-uniformity wafer annealing at up to 1200 °C. A single 1600 mm fused-quartz tube runs through two motorized furnace doors, providing 900 mm of three-zone heated length (250 + 400 + 250 mm) around a 203 mm inner-diameter process chamber. Vacuum to 100 Pa is achieved by an oil-free scroll pump, while a two-channel Ar gas train delivers stable, low-contamination process atmosphere. The entire system—hot zone, vacuum train, gas panels, chiller, and control—is housed in one caster-mounted, safety-interlocked cabinet.

Advantages

1. Wide thermal window with tight control — 1200 °C design / 1100 °C continuous, with ±1 °C temperature control accuracy across three independently regulated zones.
2. Large process chamber, high uniformity — 203 mm ID quartz tube and 900 mm heated length accommodate full wafer batches; three N-type thermocouples and a center 400 mm zone deliver uniform soak.
3. Vacuum + inert atmosphere in one tool — 100 Pa ultimate vacuum (cold, empty) plus dedicated Ar (100–1000 sccm) process and Ar (500–5000 sccm) purge lines support annealing, oxidation, and diffusion recipes on the same platform.
4. Clean, oil-free pumping — IDSP-10 oil-free scroll vacuum pump eliminates hydrocarbon contamination, protecting wafer surface quality.
5. Energy-efficient, cool-to-touch shell — alumina fiber hot zone combined with a double-walled steel jacket and forced air cooling keeps the outer cabinet safe and reduces standby power.
6. Ergonomic, automated loading — motorized split furnace doors and hinged 215 mm stainless flanges simplify wafer-boat insertion without breaking tube alignment.
7. Comprehensive safety — over-temperature and thermocouple-break protection with automatic heater cut-off, audible/visual alarm, pneumatic KF25 gate valves, pressure-relief solenoid, and a hardwired emergency stop.
8. Process-friendly exhaust handling — outlet condenser tank with chiller, mechanical and digital pressure gauges, and a dedicated external exhaust port for safe removal of process by-products.

Technical Parameters

Product Model	PT-TG1100-S215CK3W
Heating unit structure	Alumina fiber furnace
	Double-layer steel structure, equipped with air-cooling system
	Split-type furnace door design , electric opening furnace door
Heating section	Design temperature: 1200 ℃
	Long-term operating temperature: 1100 ℃
	Heating rate: Adjustable from 0-20℃ per minute
	The total length of the heating zone is 900mm, with 3 temperature zones (250+400+250mm).
	Furnace tube material : Quartz tube
	Furnace tube dimensions: outer diameter 215mm, inner diameter 203mm, length approximately 1600mm
	Furnace stopper: Quartz furnace stopper
	Heating element: molybdenum-containing resistance wire
	Thermocouples: 3 Type N thermocouples
flange	Left end: 215mm stainless steel hinged flange Right end: 215mm stainless steel hinged flange with air inlet and valve.
Intake and exhaust units	The air inlet is a compression fitting with an outer diameter of 6 mm .
	Air intake: Equipped with 2 float flow meters 1. Argon (Ar): Range 100～1000 sccm (annealing process) 2. Argon (Ar): Range 500–5000 sccm (pipeline purging)
	Exhaust: The exhaust port is equipped with a KF25 pneumatic baffle valve.
	Automatic pressure relief solenoid valve + digital pressure gauge
	The air outlet is equipped with a condenser tank and a chiller.
	One mechanical pressure gauge
	The equipment has a reserved external exhaust interface, using a 6mm outer diameter compression fitting for connecting to the matching exhaust device.
	Vacuum Pump: IDSP-10 Oil-Free Scroll Vacuum Pump
Vacuum unit	Ultimate vacuum: 100 Pa (cold state, empty furnace)
	Resistance vacuum gauge
	KF25 Pneumatic vacuum baffle valve.

control system	7-inch touchscreen operation
	It features over-temperature protection and thermocouple circuit break protection . The heating circuit of the electric furnace is automatically cut off in case of over-temperature or thermocouple failure. It also provides audible and visual alarms for over-temperature/thermocouple faults.
	Temperature control accuracy : +/- 1°C
	Yudian Temperature Controller
	Equipped with an emergency stop button

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No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City,
Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司

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