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wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control PannelwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· All parameters of ALD vapor puls time , and Gas flow are controlled by PLC via a 6" touch screen panel in a mobile cart wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control Two ALD valves with puls duation time and cycling with mico-second precisionwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control For channels gas delivery with ±0.2%F.S via MFCwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Display vacuum pressure wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Other parameter upon request of customerwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Please click picture below to see control interfacewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ALD valvewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Two ALD valves with pulse controller (min 10 ms duration )wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Capable of heating with thermal actuatorswEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Liquid-Vapor GeneratorwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Automatic liquid vapor generator is included and connect to ALD valvewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Max 1100ºC for continuous heatingwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two programmable precision digital temperature controllers with 30 segments.wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two separate controlled Heating ZoneswEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 200mm length for each heating zonewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 400mm total in heating lengthwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 250mm constant central temperature heating area if both zones were heated at the same temperaturewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 500ºC max temperature difference between two zones with thermal blocks in betweenwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Input power: 208 – 240V AC input, single phase at max. 4KWwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Optional: ALD control system can be installed with a short tube furnace or rotation tube furnace as picture belowwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Anti-corrosive Pressure GaugewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· 3.8x10-5 to 1125 Torr measurement rangewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detectionwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortens process cyclewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor elementwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click the picture to view detail spec.wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· 10E-2 Torr vacuum can be achieved inside processing tubewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture belowwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler OptionalwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Click picture below to order bubbler or evaporator for CVD, and below right for Constant temperature control modulewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Could add Quartz Crystal and thermocouple to monitoring thin film thickness and temperature at extra costwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Update Idea wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnacewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 · ( PE-ALD+CVD)  ( PE-ALD+PVD +CVD)wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CompliancewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Built-in Pfeiffer's pump is ELT CertificationwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· CE CertifiedwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· All electric components ( >24V) are UL / MET / CSA certifiedwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application NoteswEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MpawEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tubewEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°CwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ApplicationwEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. wEaMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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