OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control PannelOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· All parameters of ALD vapor puls time , and Gas flow are controlled by PLC via a 6" touch screen panel in a mobile cart OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control Two ALD valves with puls duation time and cycling with mico-second precisionOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Control For channels gas delivery with ±0.2%F.S via MFCOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Display vacuum pressure OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Other parameter upon request of customerOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Please click picture below to see control interfaceOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ALD valveOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Two ALD valves with pulse controller (min 10 ms duration )OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Capable of heating with thermal actuatorsOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Liquid-Vapor GeneratorOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Automatic liquid vapor generator is included and connect to ALD valveOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Dual Zone Split Tube furnace OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Max 1100ºC for continuous heatingOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two programmable precision digital temperature controllers with 30 segments.OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two separate controlled Heating ZonesOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 200mm length for each heating zoneOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 400mm total in heating lengthOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 250mm constant central temperature heating area if both zones were heated at the same temperatureOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 500ºC max temperature difference between two zones with thermal blocks in betweenOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Input power: 208 – 240V AC input, single phase at max. 4KWOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Optional: ALD control system can be installed with a short tube furnace or rotation tube furnace as picture belowOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Anti-corrosive Pressure GaugeOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· 3.8x10-5 to 1125 Torr measurement rangeOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detectionOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortens process cycleOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor elementOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click the picture to view detail spec.OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( optional)OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· 10E-2 Torr vacuum can be achieved inside processing tubeOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture belowOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
More Bubbler OptionalOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Click picture below to order bubbler or evaporator for CVD, and below right for Constant temperature control moduleOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Could add Quartz Crystal and thermocouple to monitoring thin film thickness and temperature at extra costOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Update Idea OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnaceOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· ( PE-ALD+CVD) ( PE-ALD+PVD +CVD)OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Warranty OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ComplianceOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Built-in Pfeiffer's pump is ELT CertificationOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· CE CertifiedOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· All electric components ( >24V) are UL / MET / CSA certifiedOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application NotesOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MpaOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tubeOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°COozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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ApplicationOozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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· Using ALD to significant decrease the high solid–solid interfacial impedance between the garnet electrolyte and electrode materials. OozMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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