Furnace and PreheatertQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Compact CVD furnace system is modified from PT-1200X-100 single zone tube furnace:tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 4.33" O.D x 4.05" I.D x 29.13" Length quartz tubetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1100ºC Max. working temperaturetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Water cooling flange on right-side is slidable for easy sample loadingtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Water cooling flange on left-side between the heater and furnace is used for pre-heated gas input and sealingtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flangetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One small heater is attached to the left side flange of the furnace to preheat input gas, liquid, or evaporate solid chemical, which will be then delivered to CVD furnace:tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Please click picture left for more details:tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac · 1.2''O.D x 6''L SS tube as the heating chambertQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac · 600ºC Max. working temperaturetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Flange on the left side is for gas sealing and inputtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Rated VoltagetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug)tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Power consumptiontQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Max. 3600 W (20 A breaker required)tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Heating ZonetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· CVD Furnace: 440 mmtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Constant temperature zone: 100 mm tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas Heater: 150mmtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Working TemperaturetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· CVD Furnace:tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max heating temperature: 1100°C ( < 2 hour )tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Continuous working temperature: 200~1000°CtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max heating & cooling rate: 20°C/mintQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Heater: tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Continuous working temperature: RT~600°CtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max heating & cooling rate: 20°C/mintQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Temperature ControltQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· CVD Furnace and Heater (separate temp control):tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Digital controllers with PID/self-tuning functions and 30 segments programmabletQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Thermocouple: K type thermocouples, which feed through the right side flange and control furnace temperature.tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control accuracy: +/- 1°CtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
RS485 Communications PorttQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Vacuum and Gas Sealing & FlangetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
The right flange of CVD furnacetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Water cooling to prevent sealing o-ring from melting (water cooler is not included, please click water chiller to order)tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· KF25 vacuum fitting (to a vacuum pump, please click to order a pump, vacuum hose, valve and sealing gasket)tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Slidable for the customer to easily and fast push/pull in/out sampletQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One quartz wafer holder ( 3" Dia. ) is included and the flange with heating radiation block tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· An anti-corrosive capacitance diaphragm gauge is includedtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Left flange (between CVD Furnace and Heater) with four 1/8'' fittings for 1/8'' tube:tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two 1/8'' fitting on the flange for independently and directly delivering any gas into the CVD furnace tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One 1/8'' fitting for delivering heated gas from heater to CVD furnacetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One 1/4'' fitting for bypassing the gas (without heating) to the CVD furnace (inside the CVD furnace, the gas tube is merged with the heated gas pipe by a T fitting)tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Note: How gas pipe assembled in the CVD furnace through above 1/8'' fitting:tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One 1/4'' quartz tube delivers the vapor gas from heater(also the bypass gas by a T fitting)tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Two 1/4'' quartz tube delivery extra gas via the two separate 1/8'' fitting on the big furnace left the flangetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· These three 1/4'' quartz tubes inside CVD furnace is in parallel and vertically 1'' higher than sample holdertQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· These three 1/4'' quartz tubes can be easily removed to clean or replaced once get stuck or corrodedtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heater:tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Left flange: one 1/8'' gas fitting to deliver gas to the heater for pre-heating and then to CVD furnace tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· On the right side to CVD furnace with necessary thermal block material to minimize the temperature gradient at the interface between the heater and CVD furnacetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Furnace Chamber InstallationtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 2- 1/4" pipe adapter is installed on each flangetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac The optional Liquid Injection devicetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
For direct liquid CVD ( DLCVD), you may consider below devices for liquid injection:tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Net weighttQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
110kgtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
DimensionstQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· Standard: 62"L X 18"W X 23"HtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Maximum: 80"L X 18"W X 32"H (Lid open and right-side flange slided out)tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac WarrantytQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and etc are not covered by the warranty)tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· You may order replacement quartz tube here.tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Laptop, software & WiFi Control (Optional)ftQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Temperature Control System enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for PT furnaces.tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· A wireless remote control provides up to 300 meters operating range.tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Above features are available upon request at an extra cost. Please contact us for more information.tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
CompliancetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· CE CertifiedtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· NRTL(UL61010) or CSA certifications are available at extra cost. tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac WarningtQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
· The tube furnaces with quartz tube are designed for use under vacuum and low pressure <0.2 bars tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Vacuum pressures may only be safely used up to 1000°C tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· The flow rate for gasses should be limited to< 200ml/min) for reducing thermal shocks to the tubetQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Operation Demo Video & InstructionstQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
tQcMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |