The device is a fully automated Plasma Enhanced CVD System (PECVD) with continuous temperature control and Plasma strength. Equipped with a vacuum system that can be used under low pressure conditions. The PECVD system enables the entire experimental chamber to be in the glow generation area. The light is uniform and equivalent, which solves the unstable operation of the traditional plasma. The tube of the device can rotate 360°, which helps the sintering of the powder to be more uniform, can be inclined at a large angle, and is convenient for feeding and discharging. The inclination angle is Between 0-35°, all pipeline materials passing through are made of non-metallic materials. For example, the inlet and outlet chambers are made of quartz, and the push rods are made of quartz and PTFE.
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical ParameterBvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating system:BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max. Temp：1200cBvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Working temp.：≤ 1100cBvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size：Ø60*420*2+Ø100*360mm* CustomizableBvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Furnace tube rotation rate：0~60r/minBvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Furnace body inclination angle：0~35°BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Temp accuracy：±1℃BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Temp control：PID automatic control with 30 steps programmableBvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Operation interface：10”LCD touch screen controlBvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating zone length：200mm+200mm CustomizableBvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Constant zone length：250mm CustomizableBvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma system：BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The system generates plasma by means of glow discharge. In the glow discharge plasma, the electron density is high, and the reaction characteristics of the non-equilibrium plasma are effectively utilized by the reaction gas discharge, which fundamentally changes the energy supply mode of the reaction system.BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Feeding system：BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The speed is continuously adjustable. When the feeding is stopped and the furnace body is tilted to the maximum, the material will not leak . The feeding system is easy to disassemble, and the material can be manually fed after disassembly, and the equipment can operate normally.BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Discharge system：BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The discharging system can automatically discharge when the furnace body is inclined and discharged.BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas control system:BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The gas control system can control the mixing ratio of the two gases according to different flow rates, and can also be independently controlled. The mass flow meter is installed in a sealed movable cabinet, which is composed of super clean stainless steel tube and the precision double ferrule joint.BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Low vacuum system：BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Equipped with a vacuum mechanical pump that can be vacuumed to allow the unit to react in a vacuum environment.BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Separation system：BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
the system allows the separation of gas and material during the protection of the inflator or when vacuuming.BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Filtering system：BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The system prevents material from entering the vacuum pump and ensures proper operation of the vacuum pump.BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Furnace tube rotation system：BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Allows the tube to rotate 360° at a constant speed. The rotation speed is continuously adjustable from 0 to 60 r/min for a long time.BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
BvVMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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