The device is a fully automated Plasma Enhanced CVD System (PECVD) with continuous temperature control and Plasma strength. Equipped with a vacuum system that can be used under low pressure conditions. The PECVD system enables the entire experimental chamber to be in the glow generation area. The light is uniform and equivalent, which solves the unstable operation of the traditional plasma. The tube of the device can rotate 360°, which helps the sintering of the powder to be more uniform, can be inclined at a large angle, and is convenient for feeding and discharging. The inclination angle is Between 0-35°, all pipeline materials passing through are made of non-metallic materials. For example, the inlet and outlet chambers are made of quartz, and the push rods are made of quartz and PTFE.
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical ParameteruHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating system:uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max. Temp：1200cuHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Working temp.：≤ 1100cuHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size：Ø60*420*2+Ø100*360mm* CustomizableuHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Furnace tube rotation rate：0~60r/minuHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Furnace body inclination angle：0~35°uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Temp accuracy：±1℃uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Temp control：PID automatic control with 30 steps programmableuHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Operation interface：10”LCD touch screen controluHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating zone length：200mm+200mm CustomizableuHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Constant zone length：250mm CustomizableuHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma system：uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The system generates plasma by means of glow discharge. In the glow discharge plasma, the electron density is high, and the reaction characteristics of the non-equilibrium plasma are effectively utilized by the reaction gas discharge, which fundamentally changes the energy supply mode of the reaction system.uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Feeding system：uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The speed is continuously adjustable. When the feeding is stopped and the furnace body is tilted to the maximum, the material will not leak . The feeding system is easy to disassemble, and the material can be manually fed after disassembly, and the equipment can operate normally.uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Discharge system：uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The discharging system can automatically discharge when the furnace body is inclined and discharged.uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas control system:uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The gas control system can control the mixing ratio of the two gases according to different flow rates, and can also be independently controlled. The mass flow meter is installed in a sealed movable cabinet, which is composed of super clean stainless steel tube and the precision double ferrule joint.uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Low vacuum system：uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Equipped with a vacuum mechanical pump that can be vacuumed to allow the unit to react in a vacuum environment.uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Separation system：uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
the system allows the separation of gas and material during the protection of the inflator or when vacuuming.uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Filtering system：uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The system prevents material from entering the vacuum pump and ensures proper operation of the vacuum pump.uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Furnace tube rotation system：uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Allows the tube to rotate 360° at a constant speed. The rotation speed is continuously adjustable from 0 to 60 r/min for a long time.uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uHTMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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