0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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| Model | PT-O1200-4CPECVD |
| Display | LED (Customizable) |
| Max. Temperature | 1200℃ |
| Continuous Woking Temp | ≤1100℃ |
| Heating Rate | 0~20℃/min |
| Temperature Zone | Single |
| Accuracy | ±1℃ |
| Tube Size | Ø60*1250mm(OD×L) (Customizable) |
| Temperature Control | PID automatic control via SCR power control |
| Heating curves | 30 steps programmable |
| Heating zone | 440mm (Customizable) |
| constant heating zone | 150mm (Customizable) |
| Matching | Automatic |
| RF Output Port | 50 Ω, N-type, female |
| Noise | <50 dB. |
| Cooling | Air cooling. |
| Anti-corrosive Pressure Gauge | 3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent |
| Vacuum System | Rotary vane pump+diffusion pump, max vacuum rate 6.67*10pa |
| Mass Flow meters | Four precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2&3: Control range from 0~200 sccm MFC 4: Control range from 0~500 sccm One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually Gas inlet fitting: four 1/4NPS Gas outlet fitting: four 1/4NPS |
No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City,
Henan Province, China
Zhengzhou Protech Technology Co., Ltd
郑州诺泰科技有限公司
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