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1100℃ Vacuum Chamber Furnace
model:PT-1200X-H8

1100℃ Vacuum Chamber Furnace

    Application:  PT-1200X-H8 is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C. It also can also be used as a vacuum brazing furnace for fusing small parts.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Specific Introduction:Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-1200X-H8 is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C. It also can also be used as a vacuum brazing furnace for fusing small parts.
crucible furanceCrucible FurnaceRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameters:
Working Temperature ≤1000 °C continuouslyRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max. 1100 °C, < 30 minutesRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Temperature Uniformity: +/- 2°C
Heating Rate Max. 20°C/ minRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Recommended. 10°C/ min
Heating Elements     High-quality Ni-Cr-Al resistance wire 
Quartz Tube & Effective Heating     Tube size: 8" O.D. x 7.5" I.D x 13.4" L. Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Heating area: 7.5" ID x 8.5" Depth (7.6Liter)Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Uniform Temperature zone:  4"Dia x 3.5" depth in center position within +/- 5ºCRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The quartz tube is replaceable 
Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Flange
Stainless steel vacuum flange with dual high-temperature silicone O-rings at the front door with water colling portsRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1/4 gas inlet & outlet included which allow continuous gas delivery during operation. A gas quartz tube (6.35mm O.D) is provided to reach the location of the sample and deliver reactive gas to the sample directly. Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One 1/4 thermocouple feedthrough port allows a 1/4 O.D thermocouple probe to be inserted into the chamber and measure the temperature of the sample independently. (Thermocouple is optional. Click here to find one). Four probes electric resistance measurement feedthrough also is available upon request.Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
M15 x 1.5mm Thread for both 1/4" feedthroughRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One bored Al2O3 foam refractory block (190Dia *  50mm) is provided.Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
N type 1/4" OD x 18" L thermocouple is included.  Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas Inlet Tube (O.D 6.35mm, I.D 4.0 mm, L 300mm) is included.  Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa.
Gas Inlet and Outlet & Water coolingRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
   
One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The inert gas can be introduced into the chamber via the inlet for purging purposes. Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below.Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
A water cooling jacket has been built inside the flange to protect the vacuum sealing O-tings. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (16L/minute water flow is required). 
Temperature ControllerRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
     
NRTL certified digital temperature controller is included.Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Proportional–integral–derivative control (PID control) and auto-tune functionRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
30 segments programmed with ramping, cooling, and dwelling stepsRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Built-in over-temperature alarm and thermocouple failure alarmRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
±- 1 ºC temperature control accuracyRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
THE Default DB9 PC communication port included for connecting to PCRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Temperature Controller is available at the extra cost with +/-0.1°C accuracy. 
Options Digital Pressure Gauge (optional) A gas-type independent(above 10mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr.Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate.
The sample holder is not provided with the furnace. You may Contact us to order the sample holder separately. Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please contact us order Quartz Thermal Block.Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g. Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pressure
Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, Kejia's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.10-2 torr via mechanical pump within 30 minutes without thermal BlockRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.10-4  torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900CRg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Optional:Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The vacuum pump and pipe are not included, please contact us to order.Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
For achieving a higher vacuum level, a Turbopump is necessary.Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Spare sealing O-ring is available at extra cost .Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KF25 Right-Angle Valve for quick connection to KF25 Bellows.
Warranty One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty.).  Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of One Year Limited Warranty.
Warning Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure <  0.2 bars.Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Never heat the furnace while the gas release valve is closed when a positive pressure condition exists within the furnace chamber. Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max. 1000°C is limited on all quartz tube furnaces to avoid the quartz tubes' deformation.
Rg3Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
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