Model |
PT-PECVD |
Part I: Standard Parts |
Tube Furnace
|
Display |
LCD Touch Screenh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
|
Continuous Woking Temp. |
≤1100℃ for 1st zoneh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac ≤1100℃ for 2nd zoneh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac ≤1600℃ for 3rd zone |
Heating Rate |
Suggestion: 0~10℃/min |
Temperature Zone |
220mm+220+220mm |
Heating Element |
Sic heater and MoSi2 heaters |
Thermocouple |
K type and B type |
Temperature Control Accuracy |
±1℃ |
Tube Size |
80x1600mm (OD x minimum L) Approx. |
Material: alumina |
Temperature Control |
PID automatic control via SCR power control |
Tilt function |
0-15 degreeh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac (it is not suggested to work in tilt function at 1100C, since the MoSi2 heating element may broken easily. It will become soft at high temperature, pls be kindly noted.) |
Heating curves |
30 steps programmable |
Vacuum Flangeh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Stainless Steel vacuum flange with valveh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Right side flange is sliding type.h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac And the flange will be water cooling type. |
Power |
220V, 50 Hz, single phase at max. 8KW |
supply Plasma RF Power
h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Power Range |
0-300W(continuous adjustable) |
Control Mode |
Manual / PLC / PC232/485 |
Working Frequency |
13.56MHz |
Machine Protection |
DC overload protection, DC/amplifier over-temperature protection, reflected power protection, matching timeout protection |
RF Output Impedance Interface (50Ω) |
N-type, female |
Power Stability |
≤ 1 W |
Maximum Reflected Power |
200 W |
Harmonic Components ≤ d Bc |
-50 |
Supply Voltage |
187V - 253V |
Overall Efficiency ≧ % |
70 |
Cooling Method |
forced air cooling |
Vacuum Pump
|
Molecular Pump Systemh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Ultimate vacuum:6.7*10-5 Torr.h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac Include digital vacuum gauge h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac |
Mass Flow Meters (LCD Touch Screen) |
Six precision mass flow meters :h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC Accuracy is: ±1.5% F.S.h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 1 for Ar : Gas flow range depends on customer’s requirementh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 2 for N2 : Gas flow range depends on customer’s requirementh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 3 for O2 : Gas flow range depends on customer’s requirementh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 4 for C2H2: Gas flow range depends on customer’s requirementh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 5 for CH4: Gas flow range depends on customer’s requirementh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac MFC 6 for H2: Gas flow range depends on customer’s requirementh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac (above flow range is only for reference, Pls confirm gas flow range before palce order. )h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually.h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac LCD Touch Screen (designed by kejia, with Kejia Logo) for MFC is as below:h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 |
h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac (this valve is not supplied by us)ALD valve |
Two ALD valves with pulse controller (min 10 ms duration )h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac And connect to touch screen h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 |
Liquid-Vapor Generator |
Automatic liquid vapor generator is included and connect to ALD valveh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 |
h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 1.7MHZ ultrasonic Atomization
|
Equipped with a 1.7MHz ultrasonic atomizer, the liquid can be atomized into liquid particles and introduced into a tube furnace.h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 20VAC, 1.7MHz ultrasonic atomizerh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac • The liquid tank comes standard with 316 stainless steel,and sealed with a fluorine rubber seal;h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac • Atomization amount can be set from 1 to 8, and the amount of atomization can be controlled by adjusting the size of the gear;h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac • It can realize two functions of continuous operation atomization and regular operation atomization. The timing can be adjusted from 30 minutes to 180 minutes (adjust the gear every 30 minutes). |
Liquid injection system |
• A standard set of liquid injection pumps for automatic liquid feedingh2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac • The syringe pump is equipped with a plastic syringe with a maximum volume of 60ml for holding liquids;h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac • Syringe pump speed adjustment range:h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac 0.004ml / min—70ml / min |
Water Chiller |
Used to cool down water cooled flange and vacuum pump.h2dMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 |