Zhengzhou Protech
Zhengzhou Protech
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ALD PECVD System
model:PT-PECVD-LM

ALD PECVD System

    Application:  ALD PECVD System is a tube furnace with 80mm diameter alumina tube, vacuum pump and six channels mass flow meters gas flowing system. It can mix 1-6 types of gases for PECVD or diffusion. 
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
It is a tube furnace with 80mm diameter alumina tube, vacuum pump and six channels mass flow meters gas flowing system. It can mix 1-6 types of gases for PECVD or diffusion. Belongs to a type of  PECVD device.JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
Model PT-PECVD
Part I: Standard Parts
 
Tube Furnace
 
Display LCD Touch ScreenJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Continuous Woking Temp. ≤1100℃ for 1st zoneJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
≤1100℃ for 2nd zoneJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
≤1600℃ for 3rd zone
Heating Rate Suggestion: 0~10℃/min
Temperature Zone 220mm+220+220mm
Heating Element Sic heater and MoSi2 heaters
Thermocouple K type and B type
Temperature Control Accuracy ±1℃
Tube Size 80x1600mm (OD x minimum L) Approx.
Material: alumina 
Temperature Control PID automatic control via SCR power control
Tilt function 0-15 degreeJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(it is not suggested to work in tilt function at 1100C, since the MoSi2 heating element may broken easily. It will become soft at high temperature, pls be kindly noted.)
Heating curves 30 steps programmable
Vacuum FlangeJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Stainless Steel vacuum flange with valveJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Right side flange is sliding type.JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
And the flange will be water cooling type.
Power 220V, 50 Hz, single phase at max. 8KW
 
supply Plasma RF Power
 JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Power Range 0-300W(continuous adjustable)
Control Mode Manual / PLC / PC232/485
Working Frequency 13.56MHz
Machine Protection DC overload protection, DC/amplifier over-temperature protection, reflected power protection, matching timeout protection
RF Output Impedance Interface (50Ω) N-type, female
Power Stability ≤ 1 W
Maximum Reflected Power 200 W
Harmonic Components ≤ d Bc -50
Supply Voltage 187V - 253V
Overall Efficiency ≧ % 70
Cooling Method forced air cooling
 
Vacuum Pump
 
Molecular Pump SystemJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Ultimate vacuum:6.7*10-5 Torr.JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Include digital vacuum gauge JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
   
Mass Flow Meters (LCD Touch Screen) Six precision mass flow meters :JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC Accuracy is: ±1.5% F.S.JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1 for Ar : Gas flow range depends on customer’s requirementJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2 for N2 : Gas flow range depends on customer’s requirementJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 3 for O2 : Gas flow range depends on customer’s requirementJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 4 for C2H2: Gas flow range depends on customer’s requirementJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 5 for CH4: Gas flow range depends on customer’s requirementJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 6 for H2: Gas flow range depends on customer’s requirementJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(above flow range is only for reference, Pls confirm gas flow range before palce order. )JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually.JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
LCD Touch Screen (designed by kejia, with Kejia Logo) for MFC is as below:JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(this valve is not supplied by us)ALD valve
 
Two ALD valves with pulse controller  (min 10 ms duration )JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
And connect to touch screen JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Liquid-Vapor Generator Automatic liquid vapor generator is included and connect to  ALD valveJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.7MHZ ultrasonic Atomization
 
Equipped with a 1.7MHz ultrasonic atomizer, the liquid can be atomized into liquid particles and introduced into a tube furnace.JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
20VAC, 1.7MHz ultrasonic atomizerJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
• The liquid tank comes standard with 316 stainless steel,and sealed with a fluorine rubber seal;JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
• Atomization amount can be set from 1 to 8, and the amount of atomization can be controlled by adjusting the size of the gear;JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
• It can realize two functions of continuous operation atomization and regular operation atomization. The timing can be adjusted from 30 minutes to 180 minutes (adjust the gear every 30 minutes).
Liquid injection system • A standard set of liquid injection pumps for automatic liquid feedingJS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
• The syringe pump is equipped with a plastic syringe with a maximum volume of 60ml for holding liquids;JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
• Syringe pump speed adjustment range:JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
0.004ml / min—70ml / min
Water Chiller Used to cool down water cooled flange and vacuum pump.JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Pls note: C2H2  CH4 and H2 are flammable gas,suggest customer to operate system in ventilation environment,and it is better to prepare gas alarm equipment at customer side.JS0Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 

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