Product name |
Tube PECVD system (CE certification) |
Slide tube furnace part |
Model |
PT-T1200 |
Heating zone length |
300mm |
Furnace tube size |
diameter 120*1600mm |
Working temperature |
≦1100℃ |
Max. temperature |
1200℃ |
Temperature measuring element |
K type thermocouple |
Temperature Control System |
30-segment PID microcomputer programmable automatic control |
Insulation temperature control accuracy |
±1℃ |
temperature protection |
With over temperature and burnout protection function |
Heating rate |
0-20ºC/min |
Heating element |
High resistance electric heating alloy wire OCr27A17Mo |
Operating Voltage |
AC220V single phase 50HZ |
rated power |
4KW |
chamber material |
Using polycrystalline fiber furnace material, the material has good thermal insulation performance, high reflectivity and balanced temperature field |
sealing system |
The furnace tube and the flange are squeezed and sealed with O-rings, which are easy to disassemble, can be disassembled repeatedly, and have good air tightness. |
Furnace tube |
High purity quartz tube |
French |
304 stainless steel sealing flange, installed mechanical pressure gauge and stainless steel globe valve, easy to disassemble and take out materials |
Furnace structure |
Cr-plated thick steel plate two-way slide rails can realize the movement of the tube furnace to achieve rapid heating and cooling |
Furnace shell temperature |
≤45℃ |
vacuum system part |
name |
DRV16 Rotary Vane Pump 4L/S |
The main parameters |
Ultimate vacuum degree 10Pa (including KF25 interface, vacuum baffle valve and movable box) |
vacuum display |
Resistance digital display vacuum gauge, display range standard atmospheric pressure--10-1pa |
Air system part |
name |
Four-way mass flow meter |
Gas line |
four way |
flow control |
Digital display, each channel of gas contains a needle valve for separate control, and the gas flow is automatically controlled |
Air inlet and outlet |
Four in and one out, built-in precision mixing tank |
link method |
Double Ferrule Fitting |
flow range |
MFC1-MFC4:0-500sccm(range optional) |
control precision |
About ±1.5%F.S, different ranges, slightly different |
Working temperature |
5℃-45℃ |
Plasma radio frequency part |
name |
RF automatic matcher |
Matching power range |
0-500W |
working frequency |
13.56MHZ+0.005% |
Normal working reflected power |
<3W |
match time |
<3S |
transmission efficiency |
>90% |
Matching power supply |
AC220V/50-60HZ |