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Zhengzhou Protech
Zhengzhou Protech

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0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER

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Home > Products > Coating Equipment > PECVD System
1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail
model:PT-T1600-PECVD

1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail

    Application:  1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail can put solid material in the heater for evaporation and mixing with the vapor phase.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Technical Parameter:
Pre-heating furnace   Small tube furnace with 200mm length single heating zone
Max. temperature:  1600ºC
30 segment programmable temperature control
The vapor goes through the heater first before getting in the RF Plasma generator.
It can put solid material in the heater for evaporation and mixing with the vapor phase.
Vacuum flange:  included 

Tube Furnace
 		 Display LED
LED 
Optional LCD Touch Screen  
Chamber Split type and upper part can be opened
Limiting Temp. 1600℃
Continuous Woking Temp. ≤1500℃
Heating Rate Suggestion: 0~10℃/min
Temperature Zone 200mm+200+200mm
Two programmable precision digital temperature controllers with 30 segments.
Heating Element MoSi2 heaters
Thermocouple B type
Temperature Control Accuracy ±1℃
Tube Size 80mm OD x 3200 mm L  
Tube Material Quartz Tube
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum Flange
 		 Stainless Steel vacuum flange with valve
flange
 
Power 380V, 50 Hz, three phases at max. 14KW
Sliding Manually
Plasma RF Power supply 
Plasma RF Power supply 
Output Power 5 -300W adjustable with ± 1% stability
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic
RF Output Port 50 Ω, N-type, female
Noise <50 dB.
Cooling Air cooling.
Power 220V, 50Hz

Vacuum Pump
 		 Rotary Vane Vacuum Pump+molecular pump system Vacuum level:6*10-5torr
The rotary vane vacuum pump and molecular pump will be designed into a cart with wheel.

 

1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail

1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail

1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail

 

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