Zhengzhou Protech
Zhengzhou Protech
Home > Products > Coating Equipment > PECVD System
PT-T1200 PECVD Tube Furnace System

PT-T1200 PECVD Tube Furnace System

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product
Brief Introduction:  
    PT-T1200 PECVD is a is PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system which consists of 500W RF power supply, splitable tube furnace with 200mm diameter quartz tube, vacuum pump and three channels mass flow meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion. 
Technical Parameter:
Part I: Standard Parts
Output Power 5 -500W adjustable with ± 1% stability
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic
RF Output Port 50 Ω, N-type, female
Noise <50 dB.
Cooling Air cooling.
Display LED
Chamber Split type and upper part can be opened
Continuous Woking Temp. ≤1100℃
Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
Temperature Zone 500mm
Heating Element Resistance wire with Mo
Thermocouple K type
Temperature Control Accuracy ±1℃
Tube Size 200mm OD X Length 1600 mm
Material: Quarz Tube
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange with valve
Power 380V, 50 Hz, three phases at max.20KW
Rotary Vane Vacuum Pump
Flow rate: 4L/S
The rotary vane vacuum pump will be designed into a cart with wheel.
Three precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2: Gas flow range from 0~100 sccm
MFC 3: Gas flow range from 0~100 sccm
(or according to your requirement)
One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
Pirani digital vacuum gauge                         
 pecvd tube furnace

PECVD Tube Furnace System


Zhengzhou Protech

After-sales serveces

After-sales serveces