Zhengzhou Protech
Zhengzhou Protech
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High vacuum rotating tilt pecvd system
model:PT-PECVD

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

Product description:5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-PECVD5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Part I: Standard Parts5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Furnace5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Display5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

LCD touch screen5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Chamber5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Split type and upper part can be opened5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. Temperature5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200℃ for short time5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous Woking Temp.5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤1100℃5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating Rate5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Suggestion: 0~10℃/min (max. 20℃/min)5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature Zone5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

400mm5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating Element5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Resistance wire with Mo5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Thermocouple5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

K type5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature Control5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Accuracy
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OD60mm x 100mm x 60mm5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Length :1600 mm
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Material: Quartz Tube5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature Control5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PID automatic control via SCR power control5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating curves5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

30 steps programmable5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Flange5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless Steel vacuum flange with valve, gas inlet and output port5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Magnetic fluid seal rotary joint5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50 Hz, single phase5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(or according to your requirements)
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Customized Function5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rotary and tilt5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tilt angle: 0-30° (suggestion:0-15°)5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube rotation speed:  0-10r/min5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Communicate Port5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Power supply5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Output Power5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5 -500W adjustable with ± 1% stability5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF frequency5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.56 MHz ±0.005% stability5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Reflection Power5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

200W max.5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Matching5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Automatic5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF Output Port5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

50 Ω, N-type, female5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Noise5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

<50 dB.5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Cooling5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Air cooling.5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50Hz5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Pump System5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Turbo Vacuum Pump5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Ultimate vacuum 2.7*10-3 Pa.5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: GSP-55veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 6L/S5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Input voltage: 500W5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated Speed(rpm): 18005veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

dB(A): 545veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: FF-620F5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 600L/S5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated speed(rpm): 270005veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Bearing: Ceramic bearing Oil Filling: 150ml5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The turbo vacuum pump will be designed into5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

a cart with wheel.5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four precision mass flow meters :5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 1: Gas flow range from 0~100 sccm5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 2&3: Gas flow range from 0~100 sccm5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 4: Gas flow range from 0~100sccm5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One gas mixing tank is installed on bottom case with 4 stainless steel needle5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

valves is installed on left side of bottom case to control 4 type gases mixing5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

manually5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Reference Photo:
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

pecvd tube furnace5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pecvd tube furnace5veMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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Zhengzhou Protech

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