Zhengzhou Protech
Zhengzhou Protech
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High vacuum rotating tilt pecvd system
model:PT-PECVD

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

Product description:CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ModelCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-PECVDCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Part I: Standard PartsCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube FurnaceCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DisplayCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

LCD touch screenCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ChamberCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Split type and upper part can be openedCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. TemperatureCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200℃ for short timeCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous Woking Temp.CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤1100℃CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating RateCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Suggestion: 0~10℃/min (max. 20℃/min)CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ZoneCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

400mmCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating ElementCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Resistance wire with MoCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ThermocoupleCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

K typeCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Accuracy
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OD60mm x 100mm x 60mmCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Length :1600 mm
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Material: Quartz TubeCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PID automatic control via SCR power controlCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating curvesCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

30 steps programmableCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum FlangeCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless Steel vacuum flange with valve, gas inlet and output portCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Magnetic fluid seal rotary jointCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PowerCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50 Hz, single phaseCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(or according to your requirements)
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Customized FunctionCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rotary and tiltCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tilt angle: 0-30° (suggestion:0-15°)CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube rotation speed:  0-10r/minCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Communicate PortCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Power supplyCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Output PowerCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5 -500W adjustable with ± 1% stabilityCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF frequencyCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.56 MHz ±0.005% stabilityCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Reflection PowerCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

200W max.CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MatchingCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AutomaticCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF Output PortCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

50 Ω, N-type, femaleCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

NoiseCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

<50 dB.CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CoolingCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Air cooling.CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PowerCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50HzCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Pump SystemCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Turbo Vacuum PumpCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Ultimate vacuum 2.7*10-3 Pa.CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: GSP-5CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 6L/SCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Input voltage: 500WCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated Speed(rpm): 1800CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

dB(A): 54CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: FF-620FCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 600L/SCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated speed(rpm): 27000CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Bearing: Ceramic bearing Oil Filling: 150mlCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The turbo vacuum pump will be designed intoCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

a cart with wheel.CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four precision mass flow meters :CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 1: Gas flow range from 0~100 sccmCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 2&3: Gas flow range from 0~100 sccmCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 4: Gas flow range from 0~100sccmCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One gas mixing tank is installed on bottom case with 4 stainless steel needleCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

valves is installed on left side of bottom case to control 4 type gases mixingCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

manuallyCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Reference Photo:
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

pecvd tube furnaceCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pecvd tube furnaceCYoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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Zhengzhou Protech

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