High vacuum rotating tilt pecvd system

Model

PT-PECVD

Part I: Standard Parts

 
 
 
 
 
 
 
 
 
 
 
 
Tube Furnace
 

 
 
 
 
 
 
 
 
 
 
 
 
 

Display

LCD touch screen

Chamber

Split type and upper part can be opened

Max. Temperature

1200℃ for short time

Continuous Woking Temp.

≤1100℃

Heating Rate

Suggestion: 0~10℃/min (max. 20℃/min)

Temperature Zone

400mm

Heating Element

Resistance wire with Mo

Thermocouple

K type

Temperature Control
Accuracy

±1℃

 
 
 
 
Tube Size

OD60mm x 100mm x 60mm
Tube Length :1600 mm

Material: Quartz Tube
 

 

Temperature Control

PID automatic control via SCR power control

Heating curves

30 steps programmable

Vacuum Flange

Stainless Steel vacuum flange with valve, gas inlet and output port
 
Magnetic fluid seal rotary joint

 

Power

220V, 50 Hz, single phase
(or according to your requirements)

Customized Function

Rotary and tilt
Tilt angle: 0-30° (suggestion:0-15°)
Tube rotation speed:  0-10r/min
 
Communicate Port
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.
 

 
 
 
 
 
Plasma RF Power supply
 

Output Power

5 -500W adjustable with ± 1% stability

RF frequency

13.56 MHz ±0.005% stability

Reflection Power

200W max.

Matching

Automatic

RF Output Port

50 Ω, N-type, female

Noise

<50 dB.

Cooling

Air cooling.

Power

220V, 50Hz

Vacuum Pump System

Turbo Vacuum Pump

Ultimate vacuum 2.7*10-3 Pa.

Model: GSP-5

Pumping speed: 6L/S

Input voltage: 500W

Rated Speed（rpm）: 1800

dB(A): 54

Model: FF-620F

Pumping speed: 600L/S

Rated speed(rpm): 27000

Bearing: Ceramic bearing Oil Filling: 150ml

The turbo vacuum pump will be designed into

a cart with wheel.

Four precision mass flow meters :

MFC 1: Gas flow range from 0~100 sccm

MFC 2&3: Gas flow range from 0~100 sccm

MFC 4: Gas flow range from 0~100sccm

One gas mixing tank is installed on bottom case with 4 stainless steel needle

valves is installed on left side of bottom case to control 4 type gases mixing

manually