model:PT-PECVD
High vacuum rotating tilt pecvd system
Application: This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize
send-email:
info@lab-furnace.com
Detailed Parameters Of The Product
Product description:
PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.
Technical Parameter:
Model
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PT-PECVD
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Part I: Standard Parts
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Tube Furnace

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Display
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LCD touch screen
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Chamber
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Split type and upper part can be opened
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Max. Temperature
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1200℃ for short time
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Continuous Woking Temp.
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≤1100℃
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Heating Rate
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Suggestion: 0~10℃/min (max. 20℃/min)
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Temperature Zone
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400mm
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Heating Element
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Resistance wire with Mo
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Thermocouple
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K type
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Temperature Control
Accuracy
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±1℃
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Tube Size
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OD60mm x 100mm x 60mm
Tube Length :1600 mm
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Material: Quartz Tube

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Temperature Control
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PID automatic control via SCR power control
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Heating curves
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30 steps programmable
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Vacuum Flange
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Stainless Steel vacuum flange with valve, gas inlet and output port
Magnetic fluid seal rotary joint

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Power
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220V, 50 Hz, single phase
(or according to your requirements)
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Customized Function
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Rotary and tilt
Tilt angle: 0-30° (suggestion:0-15°)
Tube rotation speed: 0-10r/min
Communicate Port
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.
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Plasma RF Power supply

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Output Power
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5 -500W adjustable with ± 1% stability
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RF frequency
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13.56 MHz ±0.005% stability
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Reflection Power
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200W max.
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Matching
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Automatic
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RF Output Port
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50 Ω, N-type, female
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Noise
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<50 dB.
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Cooling
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Air cooling.
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Power
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220V, 50Hz
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Vacuum Pump System
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Turbo Vacuum Pump
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Ultimate vacuum 2.7*10-3 Pa.
Model: GSP-5
Pumping speed: 6L/S
Input voltage: 500W
Rated Speed(rpm): 1800
dB(A): 54
Model: FF-620F
Pumping speed: 600L/S
Rated speed(rpm): 27000
Bearing: Ceramic bearing Oil Filling: 150ml
The turbo vacuum pump will be designed into
a cart with wheel.
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|
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Four precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2&3: Gas flow range from 0~100 sccm
MFC 4: Gas flow range from 0~100sccm
One gas mixing tank is installed on bottom case with 4 stainless steel needle
valves is installed on left side of bottom case to control 4 type gases mixing
manually
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Reference Photo:

