Zhengzhou Protech
Zhengzhou Protech
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High vacuum rotating tilt pecvd system
model:PT-PECVD

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

Product description:neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ModelneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-PECVDneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Part I: Standard PartsneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube FurnaceneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DisplayneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

LCD touch screenneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ChamberneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Split type and upper part can be openedneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Max. TemperatureneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200℃ for short timeneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous Woking Temp.neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤1100℃neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating RateneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Suggestion: 0~10℃/min (max. 20℃/min)neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ZoneneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

400mmneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating ElementneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Resistance wire with MoneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

ThermocoupleneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

K typeneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Accuracy
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Size
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OD60mm x 100mm x 60mmneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Length :1600 mm
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Material: Quartz TubeneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature ControlneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PID automatic control via SCR power controlneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating curvesneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

30 steps programmableneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum FlangeneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless Steel vacuum flange with valve, gas inlet and output portneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Magnetic fluid seal rotary jointneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PowerneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50 Hz, single phaseneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(or according to your requirements)
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Customized FunctionneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rotary and tiltneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tilt angle: 0-30° (suggestion:0-15°)neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube rotation speed:  0-10r/minneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Communicate PortneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Power supplyneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Output PowerneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5 -500W adjustable with ± 1% stabilityneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF frequencyneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.56 MHz ±0.005% stabilityneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Reflection PowerneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

200W max.neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MatchingneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

AutomaticneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF Output PortneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

50 Ω, N-type, femaleneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

NoiseneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

<50 dB.neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

CoolingneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Air cooling.neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PowerneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

220V, 50HzneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum Pump SystemneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Turbo Vacuum PumpneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Ultimate vacuum 2.7*10-3 Pa.neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: GSP-5neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 6L/SneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Input voltage: 500WneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated Speed(rpm): 1800neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

dB(A): 54neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model: FF-620FneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pumping speed: 600L/SneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Rated speed(rpm): 27000neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Bearing: Ceramic bearing Oil Filling: 150mlneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The turbo vacuum pump will be designed intoneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

a cart with wheel.neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four precision mass flow meters :neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 1: Gas flow range from 0~100 sccmneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 2&3: Gas flow range from 0~100 sccmneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

MFC 4: Gas flow range from 0~100sccmneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

One gas mixing tank is installed on bottom case with 4 stainless steel needleneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

valves is installed on left side of bottom case to control 4 type gases mixingneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

manuallyneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Reference Photo:
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

pecvd tube furnaceneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
neQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pecvd tube furnaceneQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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