Zhengzhou Protech
Zhengzhou Protech
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High vacuum rotating tilt pecvd system

High vacuum rotating tilt pecvd system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Product description:
    PT-PECVD is a splitable tube furnace with 60mm diameter size quartz tube, vacuum pump and 4channels mass flow meters gas flowing system. It can mix 1-4 types of gases for PECVD furnace. It widely used to product highquality SiO2 film, Si3N4 film, har.

Technical Parameter:



Part I: Standard Parts

Tube Furnace



LCD touch screen


Split type and upper part can be opened

Max. Temperature

1200℃ for short time

Continuous Woking Temp.


Heating Rate

Suggestion: 0~10℃/min (max. 20℃/min)

Temperature Zone


Heating Element

Resistance wire with Mo


K type

Temperature Control


Tube Size

OD60mm x 100mm x 60mm
Tube Length :1600 mm

Material: Quartz Tube


Temperature Control

PID automatic control via SCR power control

Heating curves

30 steps programmable

Vacuum Flange

Stainless Steel vacuum flange with valve, gas inlet and output port
Magnetic fluid seal rotary joint



220V, 50 Hz, single phase
(or according to your requirements)

Customized Function

Rotary and tilt
Tilt angle: 0-30° (suggestion:0-15°)
Tube rotation speed:  0-10r/min
Communicate Port
Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.

Plasma RF Power supply

Output Power

5 -500W adjustable with ± 1% stability

RF frequency

13.56 MHz ±0.005% stability

Reflection Power

200W max.



RF Output Port

50 Ω, N-type, female


<50 dB.


Air cooling.


220V, 50Hz

Vacuum Pump System

Turbo Vacuum Pump

Ultimate vacuum 2.7*10-3 Pa.

Model: GSP-5

Pumping speed: 6L/S

Input voltage: 500W

Rated Speed(rpm): 1800

dB(A): 54

Model: FF-620F

Pumping speed: 600L/S

Rated speed(rpm): 27000

Bearing: Ceramic bearing Oil Filling: 150ml



The turbo vacuum pump will be designed into

a cart with wheel.



Four precision mass flow meters :

MFC 1: Gas flow range from 0~100 sccm

MFC 2&3: Gas flow range from 0~100 sccm

MFC 4: Gas flow range from 0~100sccm

One gas mixing tank is installed on bottom case with 4 stainless steel needle

valves is installed on left side of bottom case to control 4 type gases mixing


Reference Photo:


pecvd tube furnace

pecvd tube furnace


Zhengzhou Protech

After-sales serveces

After-sales serveces