Detailed Parameters Of The Product
This sliding PECVD system with preheating system is a new exploration tool for growing nanowires or using CVD methods to make various thin films.
The sliding PECVD system with a preheating system and it consists of a plasma frequency power supply, preheating furnace, sliding tube furnace, 4MFC and a vacuum system. Can be used to grow nano or CVD methods to make various thin films.
|Part I: Sliding Tube Furnace
|Hot Zone length
|Two zones independently control temperature, each zone has intelligent 30-segment PID programmable control, with over-temperature and thermo broken protection functions
|Electric Wire with mo
|AC 220V Single phase 50/60HZ
|Two sets of vacuum flanges are installed on two ends of the tube,One pressure gauge is installed on the end of gas inlet.
|The tube and flange adopt O-ring extrusion seal, which is convenient for disassembly and assembly, repeatable disassembly and assembly, and wihth great air tightness.
|Max temperature is 1100 degrees, and the temperature is controlled by multi-stage programs. The solid and liquid raw materials can be placed in the preheating furnace and mixed with the gas raw materials after gasification
|With rotary vane pump, can reach rough vacuum level
|4MFC（Gas type and flow rate is base on customer request）
|0-500W adjustable with ± 1% stability
|One year warranty&lifetime technical support（not including the wear parts）
|More pls contact us for customize