Zhengzhou Protech
Zhengzhou Protech
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High vacuum PECVD system

High vacuum PECVD system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
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Detailed Parameters Of The Product

Product Overview:
   PT high vacuum PECVD system is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in the growth of metal thin films, ceramic thin films, composite thin films, graphene, etc. The PECVD system is easy to add functions and can expand the functions of plasma cleaning and etching. The PECVD system has the advantages of high film deposition rate, good uniformity, high consistency and stability.

Main features of high vacuum PECVD system :

1. Change the gas in the quartz vacuum chamber to an ion state through the radio frequency power supply.

2. PECVD requires a lower temperature than ordinary CVD for chemical vapor deposition.

3. The stress of the deposited film can be controlled by the frequency of the radio frequency power supply.

4. PECVD has higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.

5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-Si:H).

Technical Parameter:

product name

High vacuum PECVD system

Slide rail tube furnace part

Product number


Furnace tube size


Furnace tube material

Quartz tube

Heating zone


Operating temperature


Maximum temperature


Temperature control method

K-type thermocouple

way to control

Touch screen control, with independent rocker arm, you can adjust the angle of the temperature control screen according to actual needs, making it more convenient to use

Temperature control accuracy


Temperature control protection

With over-temperature and burnout protection function

Heating rate

0-20ºC/min, recommended 10ºC/min

Heating element

Molybdenum resistance wire

Operating Voltage

AC 220V single-phase 50HZ (circuit voltage users can choose to customize)

heating power


Furnace material

Alumina polycrystalline fiber

Furnace structure

The furnace body has a slide rail, which can realize rapid heating and cooling

Flange joint

Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installed

Sealing system

The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness.


Stainless steel housing


Auxiliary cooling fan

                     Vacuum system part


Vacuum system

The main parameters

1. Using imported Agilent high vacuum molecular pump set, the ultimate vacuum degree can reach 10-3pa

2. KF25 quick connection, stainless steel bellows, manual flapper valve and flange, vacuum pump connection;

3. Digital vacuum display, its measuring range is 5×10-5-1500mbar, with high measuring accuracy

Pneumatic system part


Four-way mass flow meter

The main parameters

Four-channel precision mass flow meter: touch screen control, digital display, automatic control. Flow range Flow range:

1. MFC 1-MFC4: 0-1000sccm adjustable

2. A mixing tank

3.4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases;

4. Air inlet and outlet: 3 in and 1 out

Flow control: manual rotary adjustment

Connection mode: double card sleeve connection

Plasma power supply part


500W plasma power supply

Power range

0-500W (continuously adjustable)

working frequency


Operating mode

Continuous output

RF output impedance interface

N-type, female (50Ω)

Power stability


Maximum reflected power


Power protection settings

DC over current protection, power amplifier over temperature protection, reflected power protection

Supply voltage/frequency

Single-phase AC (187V-253V) 50-60HZ

cooling method

Wind cooling

Overall size

88X483X550 MM

Total Weight



ISO certification, CE certification

After-sales service

One year warranty and lifetime warranty (consumables: high temperature sealing ring, furnace tube, heating element, etc. are not covered by the warranty)

PECVD system


Zhengzhou Protech

After-sales serveces

After-sales serveces