Zhengzhou Protech
Zhengzhou Protech
Home > Products > Coating Equipment > PECVD System
PECVD tube furnace
model:PT-1200PECVD

PECVD tube furnace

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Description:uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD tube furnace is widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Descriptions of PECVD furnace:
PCVED by microwave or radio frequency make gas ionization containing film the constituent atoms,in a local plasma formation,and plasma chemical activity is very strong,is easy to react,sedimentary out the desired film on substrate,it widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Outstanding features of PECVD furnace :uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. Lower temperature processing compared to conventional CVD. uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Film stress can be controlled by high/low frequency mixing techniques. uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Control over stoichiometry via process conditions.uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy andAmorphous silicon (a-Si:H) deposition.uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical parameters of PECVD furnace :

uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube furnaceuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
· Input power: 208 – 240V AC, 1.2kWuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1200°C Max. working temperature for < 60 minutesuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1100°C Max for continuous heatinguVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High purity quartz tube 2"OD x 1.7"ID x  39.4" Length uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 30 segments programmable precision digital temperature controlleruVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 8" (200mm), single zone. 2.3" (60mm)  
uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF GeneratoruVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Output Power:          5 -500W adjustable with ± 1% stabilityuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· RF frequency:          13.56 MHz ±0.005% stabilityuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Reflection Power:      200W max.uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Matching:                 AutomaticuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· RF Output Port:        50 Ω, N-type, femaleuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Noise:                      <50 dB. uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Cooling:                    Air cooling. uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Power :                     208-240VAC, 50/60HzuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Anti-corrosive Pressure GaugeuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 3.8x10-5 to 1125 Torr measurement rangeuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliableuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· atmospheric pressure detectionuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortensuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· process cycleuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor elementuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click pic to view detal spec.
Mass Flow metersuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Four precision mass flow meters (0.02% accuracy)uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· with digital display are installed on the bottom case to control gasuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
flow rate automatically.uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 1: Gas flow range from 0~100 sccmuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 2&3: Control range from 0~200 sccm  uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 4: Control range from 0~500 sccmuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One gas mixing tank is installed on bottom case with liquid release valveuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 4 stainless steel needle valves is installed on left side of bottomuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
case to control 4type gases mixing manuallyuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas inlet fitting: four 1/4NPSuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas outlet fitting: four 1/4NPS 
Vacuum Pump uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· AC 220V 50 Hz  1/2HP  375WuVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 2 Liter /S  or 120 liter/m uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Oil trap (inlet) and exhaust filter (outlet) are installed.
Warranty  uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One year limited warranty with lift time support (Consumable parts such uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
as processing tubes, o-rings and heating elements are not covered uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
by the warranty, please order the eplacement at related products below.)uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 The furnace can be customized according to customers’ requirements.
uVQMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD tube furnace
PECVD furnace can be customized according to customers’requirements.

Product

Zhengzhou Protech

After-sales serveces

After-sales serveces
livechat