Zhengzhou Protech
Zhengzhou Protech
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PECVD tube furnace
model:PT-1200PECVD

PECVD tube furnace

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

Description:VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD tube furnace is widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Descriptions of PECVD furnace:
PCVED by microwave or radio frequency make gas ionization containing film the constituent atoms,in a local plasma formation,and plasma chemical activity is very strong,is easy to react,sedimentary out the desired film on substrate,it widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Outstanding features of PECVD furnace :VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. Lower temperature processing compared to conventional CVD. VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Film stress can be controlled by high/low frequency mixing techniques. VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Control over stoichiometry via process conditions.VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy andAmorphous silicon (a-Si:H) deposition.VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical parameters of PECVD furnace :

VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube furnaceVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
· Input power: 208 – 240V AC, 1.2kWVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1200°C Max. working temperature for < 60 minutesVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1100°C Max for continuous heatingVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High purity quartz tube 2"OD x 1.7"ID x  39.4" Length VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 30 segments programmable precision digital temperature controllerVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 8" (200mm), single zone. 2.3" (60mm)  
VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF GeneratorVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Output Power:          5 -500W adjustable with ± 1% stabilityVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· RF frequency:          13.56 MHz ±0.005% stabilityVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Reflection Power:      200W max.VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Matching:                 AutomaticVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· RF Output Port:        50 Ω, N-type, femaleVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Noise:                      <50 dB. VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Cooling:                    Air cooling. VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Power :                     208-240VAC, 50/60HzVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Anti-corrosive Pressure GaugeVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 3.8x10-5 to 1125 Torr measurement rangeVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliableVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· atmospheric pressure detectionVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortensVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· process cycleVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor elementVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click pic to view detal spec.
Mass Flow metersVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Four precision mass flow meters (0.02% accuracy)VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· with digital display are installed on the bottom case to control gasVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
flow rate automatically.VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 1: Gas flow range from 0~100 sccmVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 2&3: Control range from 0~200 sccm  VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 4: Control range from 0~500 sccmVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One gas mixing tank is installed on bottom case with liquid release valveVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 4 stainless steel needle valves is installed on left side of bottomVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
case to control 4type gases mixing manuallyVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas inlet fitting: four 1/4NPSVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas outlet fitting: four 1/4NPS 
Vacuum Pump VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· AC 220V 50 Hz  1/2HP  375WVNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 2 Liter /S  or 120 liter/m VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Oil trap (inlet) and exhaust filter (outlet) are installed.
Warranty  VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One year limited warranty with lift time support (Consumable parts such VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
as processing tubes, o-rings and heating elements are not covered VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
by the warranty, please order the eplacement at related products below.)VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 The furnace can be customized according to customers’ requirements.
VNOMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD tube furnace
PECVD furnace can be customized according to customers’requirements.

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