Zhengzhou Protech
Zhengzhou Protech
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PECVD Furnace System
model:PT-1200PECVD

PECVD Furnace System

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

Description:uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PECVD furnace(Plasma Enhanced Chemical Vapor Deposition), which consists of 500W RF plasma source, 2"  or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump.The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state.uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Descriptions of PECVD furnace:      PCVED by microwave or radio frequency make gas ionization containing film the constituent atoms,in a local plasma formation,and plasma chemical activity is very strong,is easy to react,sedimentary out the desired film on substrate,it widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Outstanding features of PECVD furnace :uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. Lower temperature processing compared to conventional CVD. uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Film stress can be controlled by high/low frequency mixing techniques. uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Control over stoichiometry via process conditions.uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy andAmorphous silicon (a-Si:H) deposition.uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical parameters of PECVD furnace :
uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Split Tube furnace · Input power: 208 – 240V AC, 1.2kWuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1200°C Max. working temperature for < 60 minutesuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1100°C Max for continuous heatinguSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High purity quartz tube 2"OD x 1.7"ID x  39.4" Length uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 30 segments programmable precision digital temperature controlleruSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 8" (200mm), single zone. 2.3" (60mm)  
uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Generator
uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Output Power:          5 -500W adjustable with ± 1% stabilityuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· RF frequency:          13.56 MHz ±0.005% stabilityuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Reflection Power:      200W max.uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Matching:                 AutomaticuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· RF Output Port:        50 Ω, N-type, femaleuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Noise:                      <50 dB. uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Cooling:                    Air cooling. uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Power :                     208-240VAC, 50/60HzuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Anti-corrosive Pressure Gauge
· 3.8x10-5 to 1125 Torr measurement rangeuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliableuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· atmospheric pressure detectionuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortensuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· process cycleuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor elementuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click pic to view detal spec.
Mass Flow meters uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Four precision mass flow meters (0.02% accuracy)uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· with digital display are installed on the bottom case to control gasuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
flow rate automatically.uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 1: Gas flow range from 0~100 sccmuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 2&3: Control range from 0~200 sccm  uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 4: Control range from 0~500 sccmuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One gas mixing tank is installed on bottom case with liquid release valveuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 4 stainless steel needle valves is installed on left side of bottomuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
case to control 4type gases mixing manuallyuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas inlet fitting: four 1/4NPSuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas outlet fitting: four 1/4NPS 
Vacuum Pump  uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· AC 220V 50 Hz  1/2HP  375WuSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 2 Liter /S  or 120 liter/m uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Oil trap (inlet) and exhaust filter (outlet) are installed.
Warranty  uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One year limited warranty with lift time support (Consumable parts such uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
as processing tubes, o-rings and heating elements are not covered uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
by the warranty, please order the eplacement at related products below.)uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 The furnace can be customized according to customers’ requirements.
uSuMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD Furnace System
PECVD furnace can be customized according to customers’requirements.

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