Zhengzhou Protech
Zhengzhou Protech
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PECVD Furnace System
model:PT-1200PECVD

PECVD Furnace System

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Description:R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PECVD furnace(Plasma Enhanced Chemical Vapor Deposition), which consists of 500W RF plasma source, 2"  or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump.The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state.R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Descriptions of PECVD furnace:      PCVED by microwave or radio frequency make gas ionization containing film the constituent atoms,in a local plasma formation,and plasma chemical activity is very strong,is easy to react,sedimentary out the desired film on substrate,it widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Outstanding features of PECVD furnace :R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. Lower temperature processing compared to conventional CVD. R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Film stress can be controlled by high/low frequency mixing techniques. R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Control over stoichiometry via process conditions.R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy andAmorphous silicon (a-Si:H) deposition.R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical parameters of PECVD furnace :
R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Split Tube furnace · Input power: 208 – 240V AC, 1.2kWR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1200°C Max. working temperature for < 60 minutesR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 1100°C Max for continuous heatingR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High purity quartz tube 2"OD x 1.7"ID x  39.4" Length R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 30 segments programmable precision digital temperature controllerR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 8" (200mm), single zone. 2.3" (60mm)  
R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Plasma RF Generator
R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Output Power:          5 -500W adjustable with ± 1% stabilityR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· RF frequency:          13.56 MHz ±0.005% stabilityR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Reflection Power:      200W max.R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Matching:                 AutomaticR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· RF Output Port:        50 Ω, N-type, femaleR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Noise:                      <50 dB. R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Cooling:                    Air cooling. R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Power :                     208-240VAC, 50/60HzR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Anti-corrosive Pressure Gauge
· 3.8x10-5 to 1125 Torr measurement rangeR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Anti-corrosive, gas-type independent R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· High accuracy and reproducibility at atmosphere for reliableR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· atmospheric pressure detectionR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Fast atmospheric detection eliminates waiting time and shortensR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· process cycleR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Easy to exchange plug & play sensor elementR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Click pic to view detal spec.
Mass Flow meters R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Four precision mass flow meters (0.02% accuracy)R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· with digital display are installed on the bottom case to control gasR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
flow rate automatically.R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 1: Gas flow range from 0~100 sccmR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 2&3: Control range from 0~200 sccm  R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· MFC 4: Control range from 0~500 sccmR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· One gas mixing tank is installed on bottom case with liquid release valveR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 4 stainless steel needle valves is installed on left side of bottomR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
case to control 4type gases mixing manuallyR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas inlet fitting: four 1/4NPSR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Gas outlet fitting: four 1/4NPS 
Vacuum Pump  R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· AC 220V 50 Hz  1/2HP  375WR9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· 2 Liter /S  or 120 liter/m R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
· Oil trap (inlet) and exhaust filter (outlet) are installed.
Warranty  R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One year limited warranty with lift time support (Consumable parts such R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
as processing tubes, o-rings and heating elements are not covered R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
by the warranty, please order the eplacement at related products below.)R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 The furnace can be customized according to customers’ requirements.
R9IMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD Furnace System
PECVD furnace can be customized according to customers’requirements.

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