Description:mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD furnace for producing large area graphene films,is widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Descriptions of PECVD furnace:mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PCVED by microwave or radio frequency make gas ionization containing film the mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
constituent atoms,in a local plasma formation,and plasma chemical activity is very strong,is easy to react,sedimentary out the desired film on substrate,it widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Outstanding features of PECVD furnace :mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. Lower temperature processing compared to conventional CVD. mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Film stress can be controlled by high/low frequency mixing techniques. mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Control over stoichiometry via process conditions.mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy andAmorphous silicon (a-Si:H) deposition.mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical parameters of PECVD furnace :mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Model |
PT-1200-4-80(440) PECVD |
Tube Furnace |
Display |
LED |
Max. Temperature |
1200℃ |
Continuous Woking Temp. |
≤1100℃ |
Heating Rate |
0~10℃/min |
Temperature Zone |
Single |
Accuracy |
±1℃ |
Tube Size |
80*440mm(OD*heating zone) |
Temperature Control |
PID automatic control via SCR power control |
Heating curves |
30 steps programmable |
Power |
220V,50 Hz Single phase, |
Plasma RF Powermp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
supply |
Output Power |
5 -300W adjustable with ± 1% stability |
RF frequency |
13.56 MHz ±0.005% stability |
Reflection Power |
200W max. |
Matching |
Automatic |
RF Output Port |
50 Ω, N-type, female |
Noise |
<50 dB. |
Cooling |
Air cooling. |
Power |
220V, 50Hz |
Vacuum Pump |
KFD25 adapter and stainless steel pipe are connected between pumpmp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tube flange with precision ball valvemp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Digital vacuum pressure gauge and display are installed with the furnace |
Mass Flow meters |
Four precision mass flow meters :mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1: O2 flow range from 0~500 sccmmp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2: H2 flow range from 0~500 sccmmp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 3: N2 flow range from 0~500 sccm mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 4: Ar flow range from 0~500 sccmmp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank is installed on bottom case with liquid release valvemp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4 stainless steel needle valves is installed on left side of bottom case tomp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
control 4type gases mixing manuallymp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas inlet fitting: four 1/4NPSmp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas outlet fitting: four 1/4NPS |
mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD furnace can be customized according to customers’requirements.mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!mp9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac