Zhengzhou Protech
Zhengzhou Protech
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PECVD furnace for producing large area graphene films
model:PT-PECVD

PECVD furnace for producing large area graphene films

    Application:  Suitable for the growth of graphene, carbon nanotubes and carbon nanowires
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product

Description:n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PECVD furnace for producing large area graphene films,is widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Descriptions of PECVD furnace:n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PCVED by microwave or radio frequency make gas ionization containing film the n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
constituent atoms,in a local plasma formation,and plasma chemical activity is very strong,is easy to react,sedimentary out the desired film on substrate,it widely used product high quality sio2 film,si3N4 film,diamond film,hard thin film,optical thin film and CNT etc.n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Outstanding features of PECVD furnace :n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. Lower temperature processing compared to conventional CVD. n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Film stress can be controlled by high/low frequency mixing techniques. n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Control over stoichiometry via process conditions.n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy andAmorphous silicon (a-Si:H) deposition.
n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PECVD furnacen8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Technical parameters of PECVD furnace :n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Model PT-1200-4-80(440) PECVD
Tube Furnace Display LED
Max. Temperature 1200℃
Continuous Woking Temp. ≤1100℃
Heating Rate 0~10℃/min
Temperature Zone Single
Accuracy ±1℃
Tube Size 80*440mm(OD*heating zone)
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Power 220V,50 Hz Single phase,
Plasma RF Powern8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
supply 
Output Power 5 -300W adjustable with ± 1% stability
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic
RF Output Port 50 Ω, N-type, female
Noise <50 dB.
Cooling Air cooling.
Power 220V, 50Hz
Vacuum Pump KFD25 adapter and stainless steel pipe are connected between pumpn8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tube flange with precision ball valven8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Digital vacuum pressure gauge and display are installed with the furnace
Mass Flow meters Four precision mass flow meters :n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1: O2 flow range from 0~500 sccmn8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2: H2 flow range from 0~500 sccmn8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 3: N2 flow range from 0~500 sccm  n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 4: Ar flow range from 0~500 sccmn8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank is installed on bottom case with liquid release valven8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4 stainless steel needle valves is installed on left side of bottom case ton8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
control 4type gases mixing manuallyn8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas inlet fitting: four 1/4NPSn8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Gas outlet fitting: four 1/4NPS
 n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PECVD furnace can be customized according to customers’requirements.n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!n8sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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