Zhengzhou Protech
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Low Vacuum CVD System
model:PT-T1200-S60-CVD

Low Vacuum CVD System

    Application:  Product Name Low Vacuum CVD System Model PT-T1200-S60-CVD Tube furnace part Furnace structure Double-layer shell structure.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Product description:8ltMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Product Name Low Vacuum CVD System Model PT-T1200-S60-CVD Tube furnace part Furnace structure Double-layer shell structure.Belongs to a type of CVD System.8ltMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
8ltMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Product parameters:
Product Name Low Vacuum CVD System
Model PT-T1200-S60-CVD
Tube furnace part
Furnace structure Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 45 ℃
Furnace Material High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field.
Max.Temperature 1200℃
Continuous working temperature 1100℃
Heating rate Recommended ≤10°C/min, the fastest heating rate is 20°C/min
Furnace tube material High purity quartz tube
Furnace tube size OD:60mm* ID:54mm * length 1200mm
The instrument must be plugged in before use to prevent heat radiation
Heating zone length 220+220+220mm
flange Stainless steel sealing flange, easy to disassemble, precision needle valve is installed on the flange
Temperature Control System The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions
1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs
2. Temperature control accuracy ±1ºC
3. With over-temperature protection and burnout protection
4. The instrument has the function of temperature self-tuning
Heating element Molybdenum alloy resistance wire
Temperature measuring element K type thermocouple
Working power AC220V,50/60Hz
Rated power 5KW
Air inlet and outlet The flange contains vacuum connection port, air inlet and outlet
Air system part
Mass flowmeter Four-way precision mass flowmeter: digital display, automatic control of gas flow.
MFC1 range: 0-500 sccm (range optional)
MFC2 range: 0-500 sccm (range optional)
MFC3 range: 0-500 sccm (range optional)
MFC4 range: 0-500 sccm (range optional)
Gas circuit: 4 channels
Vacuum system part
vacuum pump DRV10 rotary vane pump pumping

8ltMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Low Vacuum CVD System8ltMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
8ltMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Low Vacuum CVD System8ltMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
8ltMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Low Vacuum CVD System8ltMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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