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model:PT-T1200-S60-CVD

Low Vacuum CVD System

Application

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Detailed Parameters Of The Product

Product description:
Product Name Low Vacuum CVD System Model PT-T1200-S60-CVD Tube furnace part Furnace structure Double-layer shell structure.Belongs to a type of CVD System.

Product parameters:

Product Name	Low Vacuum CVD System
Model	PT-T1200-S60-CVD
Tube furnace part
Furnace structure	Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 45 ℃
Furnace Material	High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field.
Max.Temperature	1200℃
Continuous working temperature	1100℃
Heating rate	Recommended ≤10°C/min, the fastest heating rate is 20°C/min
Furnace tube material	High purity quartz tube
Furnace tube size	OD:60mm* ID:54mm * length 1200mm The instrument must be plugged in before use to prevent heat radiation
Heating zone length	220+220+220mm
flange	Stainless steel sealing flange, easy to disassemble, precision needle valve is installed on the flange
Temperature Control System	The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions 1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs 2. Temperature control accuracy ±1ºC 3. With over-temperature protection and burnout protection 4. The instrument has the function of temperature self-tuning
Heating element	Molybdenum alloy resistance wire
Temperature measuring element	K type thermocouple
Working power	AC220V，50/60Hz
Rated power	5KW
Air inlet and outlet	The flange contains vacuum connection port, air inlet and outlet
Air system part
Mass flowmeter	Four-way precision mass flowmeter: digital display, automatic control of gas flow. MFC1 range: 0-500 sccm (range optional) MFC2 range: 0-500 sccm (range optional) MFC3 range: 0-500 sccm (range optional) MFC4 range: 0-500 sccm (range optional) Gas circuit: 4 channels
Vacuum system part
vacuum pump	DRV10 rotary vane pump pumping