Zhengzhou Protech
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3-temperature zone tube CVD system
model:PT-TCVD1600-L80LB3

3-temperature zone tube CVD system

    Application:  3-temperature zone tube CVD system is a CE-certified three-temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Specific Introduction:

PT-TCVD1600-L80LB3 is a CE certified three temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm. The vacuum pump adopts a dual rotating mechanical pump, and the gas mixing system is a 4-way mass gas mixing system. The working temperature of the furnace can reach 1600 ℃ and the vacuum degree can reach 10pa. It belongs to a type of CVD system.TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Actual photo of the 3-temperature zone tube CVD systemTcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Actual photo of the 3-temperature zone tube CVD systemTcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Features:

1. The heating element is made of high-quality MoSi2, and the furnace is made of ceramic fiber material, which has good thermal insulation performance, durability, high tensile strength, no miscellaneous balls, high purity, and energy-saving effect is obviously better than that of domestic fiber materials.TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Over temperature alarm and power off, leakage protection, safe and reliable operation.TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. Independent temperature controller. 30-level programmable temperature.
TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical parameters:
Heating System(Tube Furnace)
Max. temperature 1700 
Working temperature 1600
Display LED display
Tube size 80mm(OD)
Tube Material High Quality alumina tube
Hot zone length 220+220+220mm(There will be a gap between each zones)
Heating Element MoSi2
Heating rate 0-5℃/min
Temperature control ● PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
● 30 programmable segments for precise control of heating rate, cooling rate and dwell time.TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
● Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
● Over temperature protection and alarm allows for operation without attendant.
Thermocouple
  1. 3pcs thermocouple(Both measurement & temperature control function) located in the middle of the each hot zones(out side the tube)
  2. 1pcs thermocouple(Only measure the temperature) located inside the tube.
Temperature accuracy ±1℃
Furnace structure
  1. 1.Double layer steel casing with dual cooling fan, temperature of furnace shell below 60℃.
  2. Non-Splitable door design.
Vacuum Flange Stainless Steel vacuum flange with valve.
Working voltage 220V 50Hz
Max. Power 6KW
Gas System
4 Channel Mass Flow Meter Four precision mass flow meters:TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1: Gas flow range from 0~100 sccmTcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2: Control range from 0~200 sccmTcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC3: Control range from 0-500sccmTcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC4: Control range from 0~200 sccmTcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(or according to your requirement)TcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank is installed on bottom case with liquid release valveTcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing.
Vacuum Pump +Vacuum Gauge System
Vacuum Pump+Vacuum Gauge Equipped with rotary vane pump which makes the vacuum Rate can reach 10Pa(Cool State)

Actual photo of the 3-temperature zone tube CVD systemTcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Actual photo of the 3-temperature zone tube CVD systemTcyMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

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