model:PT-T1200
PT-T1200 Double Zones CVD System
Application: PT-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion.
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Detailed Parameters Of The Product
Brief Introduction:
PT-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion.
Technical Parameter:
Model |
PT-T1200 |
Part I: Standard Parts |
Tube Furnace |
Display |
LED type |
Max. Temp. |
1200℃ for limiting |
Woking Temp. |
≤1100℃ |
Heating Rate |
Suggestion: 0~10℃/min,max. 15℃/min |
Temperature Zone |
300mm + 300mm dual zones |
Heating Element |
Resistance wire |
Thermocouple |
K type |
Temperature Control Accuracy |
±1℃ () |
Tube Size |
60 / 52mmx 1000mm (OD/ID x L) |
Material: Quartz tube |
Temperature Control |
PID automatic control via SCR power control |
Heating curves |
30 steps programmable |
Vacuum Flange |
Stainless Steel vacuum flange. One end of the flange has 2 barbed needle valves, with installed Mechanical Pressure Gauge.  Another end of the flange has a KF25 port with a barbed needle valve
 |
Power |
220V, 50 Hz, single phase at max. 6KW |
Vacuum Pump |
Rotary Vane Vacuum Pump |
Ultimate vacuum 10-3 Torr. Vacuum inside the tube is around 10-1 Torr. (RM temp. And empty tube condition) Flow rate: 2.6 L/S (pump photo is only for reference, actual appearance depends on final desgin) The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories Digital vacuum gauge is included 3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent |
Customized Mass Flow Meters (Seven Star Brand) With LCD Touch Screen Controller |
One Float flowmeter + Four precision mass flow meters : MFC Accuracy is: ±1.5% F.S. MFC 1 for Nitrogen : Gas flow range from 0~100 sccm MFC 2 for Hydrogen : Gas flow range from 0~100 sccm MFC 3 for Methan : Gas flow range from 0~100 sccm MFC 4 for Argon: Gas flow range from 0~100 sccm MFC 5 for Oxygen: Gas flow range from 0~100 sccm FFC 1 for Argon and nitrogen mixing gas: Gas flow range 0~100sccm One gas mixing tank (for 5 MFC only) is installed on bottom case with 5 stainless steel needle valves is installed on left side of bottom case to control 5 type gases mixing manually. |