Zhengzhou Protech
Zhengzhou Protech
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PT-T1200 Double Zones CVD System
model:PT-T1200

PT-T1200 Double Zones CVD System

    Application:  PT-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion. 
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  
    PT-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion. 
 
Technical Parameter:
Model PT-T1200
Part I: Standard Parts
 
 
 
 
 
 
 
Tube Furnace 
Display LED type
Max. Temp. 1200℃ for limiting
Woking Temp. ≤1100℃
Heating Rate Suggestion: 0~10℃/min,max. 15℃/min
Temperature Zone 300mm + 300mm dual zones
Heating Element Resistance wire
Thermocouple K type
Temperature Control Accuracy ±1℃ ()
Tube Size 60 / 52mmx 1000mm (OD/ID x L)
Material:  Quartz tube 
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange.
One end of the flange has 2 barbed needle valves, with installed Mechanical Pressure Gauge.
 
Another end of the flange has a KF25 port with a barbed needle valve 
Power 220V, 50 Hz, single phase at max. 6KW
Vacuum Pump Rotary Vane Vacuum Pump Ultimate vacuum 10-3 Torr.
Vacuum inside the tube is around 10-1 Torr.
(RM temp. And empty tube condition)
Flow rate: 2.6 L/S
 (pump photo is only for reference, actual appearance depends on final desgin)
The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories
 
Digital vacuum gauge is included
3.8x10-5 to 1125 Torr measurement range
Anti-corrosive, gas-type independent
 
Customized Mass Flow Meters
(Seven Star Brand)
 
With LCD Touch Screen Controller
 
One Float flowmeter + Four  precision mass flow meters :
MFC Accuracy is: ±1.5% F.S.
MFC 1 for Nitrogen : Gas flow range from 0~100 sccm
MFC 2 for Hydrogen : Gas flow range from 0~100 sccm
MFC 3 for Methan : Gas flow range from 0~100 sccm
MFC 4 for Argon: Gas flow range from 0~100 sccm
MFC 5 for Oxygen: Gas flow range from 0~100 sccm
 
FFC 1 for Argon and nitrogen mixing gas: Gas flow range 0~100sccm
 
One gas mixing tank (for 5 MFC only) is installed on bottom case with 5 stainless steel needle valves is installed on left side of bottom case to control 5 type gases mixing manually.

 

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