PT-T1200 Double Zones CVD System
Application: PT-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion.
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Detailed Parameters Of The Product
PT-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion.
|Part I: Standard Parts
||1200℃ for limiting
||Suggestion: 0~10℃/min,max. 15℃/min
||300mm + 300mm dual zones
|Temperature Control Accuracy
||60 / 52mmx 1000mm (OD/ID x L)
|Material: Quartz tube
||PID automatic control via SCR power control
||30 steps programmable
||Stainless Steel vacuum flange.
One end of the flange has 2 barbed needle valves, with installed Mechanical Pressure Gauge.
Another end of the flange has a KF25 port with a barbed needle valve
||220V, 50 Hz, single phase at max. 6KW
||Rotary Vane Vacuum Pump
||Ultimate vacuum 10-3 Torr.
Vacuum inside the tube is around 10-1 Torr.
(RM temp. And empty tube condition)
Flow rate: 2.6 L/S
(pump photo is only for reference, actual appearance depends on final desgin)
The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories
Digital vacuum gauge is included
3.8x10-5 to 1125 Torr measurement range
Anti-corrosive, gas-type independent
|Customized Mass Flow Meters
(Seven Star Brand)
With LCD Touch Screen Controller
|One Float flowmeter + Four precision mass flow meters :
MFC Accuracy is: ±1.5% F.S.
MFC 1 for Nitrogen : Gas flow range from 0~100 sccm
MFC 2 for Hydrogen : Gas flow range from 0~100 sccm
MFC 3 for Methan : Gas flow range from 0~100 sccm
MFC 4 for Argon: Gas flow range from 0~100 sccm
MFC 5 for Oxygen: Gas flow range from 0~100 sccm
FFC 1 for Argon and nitrogen mixing gas: Gas flow range 0~100sccm
One gas mixing tank (for 5 MFC only) is installed on bottom case with 5 stainless steel needle valves is installed on left side of bottom case to control 5 type gases mixing manually.