Zhengzhou Protech
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PT-T1200 Double Zones CVD System
model:PT-T1200

PT-T1200 Double Zones CVD System

    Application:  PT-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion. 
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
    PT-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion. KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
Model PT-T1200
Part I: Standard Parts
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube Furnace 
Display LED type
Max. Temp. 1200℃ for limiting
Woking Temp. ≤1100℃
Heating Rate Suggestion: 0~10℃/min,max. 15℃/min
Temperature Zone 300mm + 300mm dual zones
Heating Element Resistance wire
Thermocouple K type
Temperature Control Accuracy ±1℃ ()
Tube Size 60 / 52mmx 1000mm (OD/ID x L)
Material:  Quartz tube 
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange.KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One end of the flange has 2 barbed needle valves, with installed Mechanical Pressure Gauge.KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Another end of the flange has a KF25 port with a barbed needle valve KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Power 220V, 50 Hz, single phase at max. 6KW
Vacuum Pump Rotary Vane Vacuum Pump Ultimate vacuum 10-3 Torr.KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum inside the tube is around 10-1 Torr.KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(RM temp. And empty tube condition)KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Flow rate: 2.6 L/SKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 (pump photo is only for reference, actual appearance depends on final desgin)KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessoriesKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Digital vacuum gauge is includedKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3.8x10-5 to 1125 Torr measurement rangeKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Anti-corrosive, gas-type independentKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Customized Mass Flow MetersKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(Seven Star Brand)KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
With LCD Touch Screen ControllerKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
One Float flowmeter + Four  precision mass flow meters :KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC Accuracy is: ±1.5% F.S.KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1 for Nitrogen : Gas flow range from 0~100 sccmKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2 for Hydrogen : Gas flow range from 0~100 sccmKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 3 for Methan : Gas flow range from 0~100 sccmKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 4 for Argon: Gas flow range from 0~100 sccmKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 5 for Oxygen: Gas flow range from 0~100 sccmKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
FFC 1 for Argon and nitrogen mixing gas: Gas flow range 0~100sccmKidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank (for 5 MFC only) is installed on bottom case with 5 stainless steel needle valves is installed on left side of bottom case to control 5 type gases mixing manually.
KidMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 

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