0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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| Model | PT-T1400-4CVD | |||
| Part I: Single Zone Sliding Type Tube Furnace | ||||
| Tube Furnace (The furmace will be sliding type) |
Display | LED | ||
| Furnace Structure | Split type and upper part can be opened. Double layer steel casing with air cooling to keep furnace surface temperature lower than 60°C. High purity fibrous alumina insulation for Max. energy saving. |
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| Max. Temperature | 1400℃ for short time | |||
| Continuous Working Temp. | ≤1300℃ | |||
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |||
| Temperature Zone | 300mm single zone | |||
| Heating Element | SiC rods | |||
| Thermocouple | K type | |||
| Temperature Control Accuracy | ±1℃ | |||
| Processing Tube | 60 x 1200mm (OD x L) | |||
| Material: High pure Quartz | ||||
| Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating). | ||||
| Temperature Controller | -PID automatic control via SCR (Silicon Controlled Rectifier) power control -30 programmable segments for precise control of heating rate, cooling rate and dwell time. -Built-in over temperature alarm and protection allows for operation without an attendant. - +/- 1 ºC temperature control accuracy. |
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| Power | 220V, 50 Hz, single phase at max. 4KW | |||
| Part II:Water Cooling System | ||||
| Water cooled flange + water chiller (Below photo is only for reference, please only reference water cooling part) |
Water cooled Vacuum Flange | Water Cooled Sealing flange with valve and Mechanical vacuum gauge. Made of Stainless Steel with double high temperature silicon O-rings on the flange. Stainless steel needle valve with 1/4" pipe adapter. Mechanical vacuum gauge is installed in one side of flange. Water Cool System is an ideal tool for supplying cooling water to this flange set |
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| Water Chiller |  Max. Flow rate 10L/min |
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| Part III: 4 Channels Mass Flow Meter and Controllers | ||||
| Mass Flow Meter (touch screen for option need extra cost) |
Four precision mass flow meters : MFC 1: Gas flow range from 0~500 sccm Ar MFC 2: Gas flow range from 0~5 sccm 02 MFC 3: Gas flow range from 0~20 sccm CH4 MFC 4: Gas flow range from 0~100 sccm H2 One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually. |
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| Forepump model | WXG-4B |
| Displacement Speed | 4L/S |
| Ultimate pressure(Pa) | ≤1.5 |
| Scroll pump leakage rate | 1×10-6 Pa.m3/S，special gas can be 1×10-8Pa.m3/S |
| Water vapor handling capacity | 25g/day |
| Rotational Speed of pump(50HZ) | 1450rpm |
| Inlet flange | KF25 |
| Outlet flange | KF25 |
| Turbomolecular model | FJ-110 |
| Turbo pump speed | 110L/S |
| Inlet flange | DN100CF |
| Compression Ratio | N2:＞108, H2:5x102 |
| Ultimate vacuum (Pa) | 6x10-7Pa |
| Suggest run vacuum(Pa) | ＜100 |
| Cooling method | Air /water |
| Weight(kg) | 52 |
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Heat treatment equipment
Vacuum Furnace
Tube Furnace
Box Furnace
Customize Furnace
Accessory For Heating Treatment Equipment
Solution for Ultra Hard Tools
Equipment for Ultra Hard Tools
PCD and PCBN for Ultra Hard Tools
No.26, Dongqing Street, Zhengzhou, China
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