Zhengzhou Protech
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High Vacuum CVD System
model:PT-T1400-4CVD

High Vacuum CVD System

    Application:  PT-T1400-4CVD is a compact CVD (Chemical Vapor Deposition) tube furnace system, which consists 60O.D tube furnace, 4 channels precision mass flow meter with gas mixing tank, and Agilent Brand imported turbomolecular pump system. 
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PT-T1400-4CVD is a compact CVD (Chemical Vapor Deposition) tube furnace system, which consists 60O.D tube furnace, 4 channels precision mass flow meter with gas mixing tank, and Agilent Brand imported turbomolecular pump system. X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
Model PT-T1400-4CVD
              Part I: Single Zone Sliding Type Tube Furnace
  Tube FurnaceX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(The furmace will be sliding type)
X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Display LED
Furnace Structure Split type and upper part can be opened.X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Double layer steel casing with air cooling to keep furnace surface temperature lower than 60°C. High purity fibrous alumina insulation for Max. energy saving.
Max. Temperature 1400℃ for short time
Continuous Working Temp. ≤1300℃
Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
Temperature Zone 300mm  single zone
Heating Element SiC rods
Thermocouple K type
Temperature Control Accuracy ±1℃
Processing Tube 60 x 1200mm (OD x L)
Material: High pure Quartz
  Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating). 
Temperature Controller -PID automatic control via SCR (Silicon Controlled Rectifier) power controlX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
-30 programmable segments for precise control of heating rate, cooling rate and dwell time.X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
-Built-in over temperature alarm and protection allows for operation without an attendant.X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
- +/- 1 ºC temperature control accuracy.
Power 220V, 50 Hz, single phase at max. 4KW
Part II:Water Cooling System
Water cooled flange + water chillerX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(Below photo is only for reference,X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
please onlyX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
reference waterX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
cooling part)
X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Water cooled Vacuum Flange  Water Cooled Sealing flange with valveX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
and Mechanical vacuum gauge.X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Made of Stainless Steel with double high temperature silicon O-rings on the flange.   X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Stainless steel needle valve with 1/4" pipe adapter.X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Mechanical vacuum gauge is installed in one side of flange.X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Water Cool System is an ideal tool for supplying cooling water to this flange setX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Water Chiller furnaceX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Max. Flow rate 10L/min
Part III:  4 Channels Mass Flow Meter and Controllers
Mass Flow MeterX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
(touch screen for option need extra cost)
X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Four precision mass flow meters :X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1: Gas flow range from 0~500 sccm   ArX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2: Gas flow range from 0~5 sccm     02X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 3: Gas flow range from 0~20 sccm    CH4X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 4: Gas flow range from 0~100 sccm   H2X7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank is installed on bottom case with liquid release valveX7sMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.
 
Part IV: Turbomolecular Pump System
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Forepump model WXG-4B
Displacement Speed 4L/S
Ultimate pressure(Pa) ≤1.5
Scroll pump leakage rate 1×10-6 Pa.m3/S,special gas can be 1×10-8Pa.m3/S
Water vapor handling capacity 25g/day
Rotational Speed of pump(50HZ) 1450rpm
Inlet flange KF25
Outlet flange KF25
Turbomolecular model FJ-110
Turbo pump speed 110L/S
Inlet flange DN100CF
Compression Ratio N2:>108, H2:5x102
Ultimate vacuum (Pa) 6x10-7Pa
Suggest run vacuum(Pa) <100
Cooling method Air /water
Weight(kg) 52
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