High Vacuum 4MFCs CVD system
Application: PT-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases for CVD.
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Detailed Parameters Of The Product
PT-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases for CVD.
|Part I: Standard Parts
||Split type and upper part can be opened
||1600℃ for short time
|Continuous Woking Temp.
||Suggestion: 0~10℃/min (max. 20℃/min)
||MoSi2 heating element
|Temperature Control Accuracy
||80 x 1000mm (OD x minimum L)
|Material: High purity alumina Tube
||PID automatic control via SCR power control
||30 steps programmable
||Stainless Steel vacuum flange with valve
||220V, 50 Hz, single phase at max. 4KW
|Vacuum Pump System
|Rotary Vane Vacuum Pump+ diffusion vacuum pump
||Vacuum pump group: Ultimate vacuum 10-6 Torr.
The rotary vane vacuum pump and diffusion vacuum pump will be designed into a cart with wheel.
|Mass Flow Meters
||Four precision mass flow meters :
One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually
||1 year ( not including consumable parts such as heating element, thermocouple, and tube)