Zhengzhou Protech
Zhengzhou Protech
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High Vacuum 4MFCs CVD system
model:PT-T1600 CVD

High Vacuum 4MFCs CVD system

    Application:  PT-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases for CVD. 
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  X6cMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
PT-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases for CVD. X6cMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 X6cMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
Model PT-T1600 CVD
Part I: Standard Parts
Tube FurnaceX6cMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Display LED
Chamber Split type and upper part can be opened
Max. Temperature 1600℃ for short time
Continuous Woking Temp. ≤1500℃
Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
Temperature Zone 300mm
Heating Element MoSi2 heating element
Thermocouple B type
Temperature Control Accuracy ±1℃
Tube Size 80 x 1000mm (OD x minimum L)
Material: High purity alumina Tube
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange with valve
Power 220V, 50 Hz, single phase at max. 4KW
Vacuum Pump SystemX6cMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Rotary Vane Vacuum Pump+ diffusion vacuum pump Vacuum pump group: Ultimate vacuum 10-6 Torr.X6cMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 X6cMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The rotary vane vacuum pump and diffusion vacuum pump will be designed into a cart with wheel.
Mass Flow Meters Four  precision mass flow meters :X6cMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually
X6cMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Warranty 1 year ( not including consumable parts such as heating element, thermocouple, and tube)
cvd system

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