model:PT-T1600 CVD
High Vacuum 4MFCs CVD system
Application: PT-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases for CVD.
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Detailed Parameters Of The Product
Brief Introduction:
PT-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases for CVD.
Technical Parameter:
Model |
PT-T1600 CVD |
Part I: Standard Parts |
Tube Furnace |
Display |
LED |
Chamber |
Split type and upper part can be opened |
Max. Temperature |
1600℃ for short time |
Continuous Woking Temp. |
≤1500℃ |
Heating Rate |
Suggestion: 0~10℃/min (max. 20℃/min) |
Temperature Zone |
300mm |
Heating Element |
MoSi2 heating element |
Thermocouple |
B type |
Temperature Control Accuracy |
±1℃ |
Tube Size |
80 x 1000mm (OD x minimum L) |
Material: High purity alumina Tube |
Temperature Control |
PID automatic control via SCR power control |
Heating curves |
30 steps programmable |
Vacuum Flange |
Stainless Steel vacuum flange with valve |
Power |
220V, 50 Hz, single phase at max. 4KW |
Vacuum Pump System |
Rotary Vane Vacuum Pump+ diffusion vacuum pump |
Vacuum pump group: Ultimate vacuum 10-6 Torr. The rotary vane vacuum pump and diffusion vacuum pump will be designed into a cart with wheel. |
Mass Flow Meters |
Four precision mass flow meters : One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually |
Warranty |
1 year ( not including consumable parts such as heating element, thermocouple, and tube) |
