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model:PT-T1600 CVD

High Vacuum 4MFCs CVD system

Application

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Detailed Parameters Of The Product

Brief Introduction:
PT-CVD is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump and four channels mass flow meters gas flowing system. It can mix 1-6 types of gases for CVD.

Technical Parameter:

Model		PT-T1600 CVD
Part I: Standard Parts
Tube Furnace	Display	LED
	Chamber	Split type and upper part can be opened
	Max. Temperature	1600℃ for short time
	Continuous Woking Temp.	≤1500℃
	Heating Rate	Suggestion: 0~10℃/min (max. 20℃/min)
	Temperature Zone	300mm
	Heating Element	MoSi2 heating element
	Thermocouple	B type
	Temperature Control Accuracy	±1℃
	Tube Size	80 x 1000mm (OD x minimum L)
	Tube Size	Material: High purity alumina Tube
	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Vacuum Flange	Stainless Steel vacuum flange with valve
	Power	220V, 50 Hz, single phase at max. 4KW
Vacuum Pump System	Rotary Vane Vacuum Pump+ diffusion vacuum pump	Vacuum pump group: Ultimate vacuum 10^-6Torr. The rotary vane vacuum pump and diffusion vacuum pump will be designed into a cart with wheel.
Mass Flow Meters	Four precision mass flow meters : One gas mixing tank is installed on bottom case with 6 stainless steel needle valves is installed on left side of bottom case to control 6 type gases mixing manually
Warranty	1 year ( not including consumable parts such as heating element, thermocouple, and tube)