model:PT-T1600CVD
Touch Screen CVD Tube Furnace
Application: PT-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
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Detailed Parameters Of The Product
Brief Introduction:
PT-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
Model |
PT-T1600 CVD with 3 MFC Gas channels |
Tube Furnace |
Display |
LCD Touch Screen |
Max. Temperature |
1600℃ for short time |
Continuous Working Temp. |
≤1500℃ |
Heating Rate |
Suggestion: 0~10℃/min |
Temperature Zone |
300mm |
Heating Element |
MoSi2 Heaters |
Thermocouple |
B Type |
Temperature Control Accuracy |
±1℃ |
Tube Size |
80x1000mm (OD x L) |
Material: Alumina Tube |
Tube Block |
Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating). |
Temperature Control |
PID automatic control via SCR power control |
Program and Ramps |
30 steps programmable |
Vacuum Flange |
Stainless Steel vacuum flange with valves |
Power |
220V, 50 Hz, single phase at max.6KW |
Mass Flow Meters (LCD Touch Screen) |
Three precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~200 sccm MFC 3: Gas flow range from 0~200 sccm (Gas flow range can be according to your requirement) One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
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