Touch Screen CVD Tube Furnace
Application: PT-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
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Detailed Parameters Of The Product
PT-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
||PT-T1600 CVD with 3 MFC Gas channels
||LCD Touch Screen
||1600℃ for short time
|Continuous Working Temp.
|Temperature Control Accuracy
||80x1000mm (OD x L)
|Material: Alumina Tube
||Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).
||PID automatic control via SCR power control
|Program and Ramps
||30 steps programmable
||Stainless Steel vacuum flange with valves
||220V, 50 Hz, single phase at max.6KW
|Mass Flow Meters
(LCD Touch Screen)
|Three precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2: Gas flow range from 0~200 sccm
MFC 3: Gas flow range from 0~200 sccm
(Gas flow range can be according to your requirement)
One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually