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model:PT-T1600CVD

Touch Screen CVD Tube Furnace

Application

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Detailed Parameters Of The Product

Brief Introduction:
PT-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.

Technical Parameter:

Model		PT-T1600 CVD with 3 MFC Gas channels
Tube Furnace	Display	LCD Touch Screen
	Max. Temperature	1600℃ for short time
	Continuous Working Temp.	≤1500℃
	Heating Rate	Suggestion: 0~10℃/min
	Temperature Zone	300mm
	Heating Element	MoSi2 Heaters
	Thermocouple	B Type
	Temperature Control Accuracy	±1℃
	Tube Size	80x1000mm (OD x L)
	Tube Size	Material: Alumina Tube
	Tube Block	Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).
	Temperature Control	PID automatic control via SCR power control
	Program and Ramps	30 steps programmable
	Vacuum Flange	Stainless Steel vacuum flange with valves
	Power	220V, 50 Hz, single phase at max.6KW
Mass Flow Meters (LCD Touch Screen)	Three precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~200 sccm MFC 3: Gas flow range from 0~200 sccm (Gas flow range can be according to your requirement) One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually