model:PT-OTF-1700-80*220*3-F4
High vacuum three zone tube furnace for graphene, 2D material and other coating application
Application: High vacuum three zone tube furnace for graphene, 2D material and other coating application
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Detailed Parameters Of The Product
Model |
PT-OTF-1700-80*220*3-F4 |
Heatings system |
Display |
LED |
Limit Temperature |
1700℃ |
Continuous Working Temp. |
≤1600℃ |
Heating Rate |
Suggestion: 0~15℃/min (max. 20℃/min) |
Temperature Zone Num |
3 |
Length for each zone |
220mm |
Heating Element |
Higy quality MoSi2 rod |
Thermocouple |
B type |
Temperature Control Accuracy |
±1℃ |
Tube Size |
80 x 1400mm for reference (OD x L ) |
Material: Alumina |
Temperature Control |
PID automatic control via SCR power control |
Heating process |
30 steps programmable |
Vacuum gauge |
Composite vacuum gage |
Vacuum Flange |
Stainless Steel vacuum flange with valves and needles |
Power source |
380V, 50 Hz, 3P at max. 11KW |
Vacuum Pump System |
Vacuum Pump Group (rotary vane pump+diffussion pump) Include KF25, KF50 Adpater, bellow for vacuum pump group and mobile cabinet with wheels. |
Ultimate vacuum 6.67*10-3Pa under cold state. |
Gas-route |
Additional reserved port for the fifth gas |
Mass Flow meters |
4 gas-route Ar N2 H2 CH4 |
Flow scope |
H2 200sccm, CH4 100sccm, Ar 300sccm,N2 300sccm |
System max working pressure |
0.02MPa |