model:PT-1200T
Automatic pressure control CVD tube furnace
Application: Suitable for CVD process, such as silicon carbide coating, ceramic substrate conductivity test, controlled growth of ZnO nanostructures, ceramic capacitor (MLCC) atmosphere sintering and other experiments.
Contact us for customize
send-email:
info@lab-furnace.com
Detailed Parameters Of The Product
Brief Introduction:
It’s mainly used for the preparation of rare earth, electronic lighting, crystal annealing, bio ceramics, electronic ceramics, special alloys, magnetic materials, precision casting, metal heat treatment and other industrial vacuum sintering, protective atmosphere sintering, vacuum deposition, CVD experiments, material composition measurement occasions.
The main features are as below:
1. Great temperature uniformity.
2. Over temperature protection and alarm
3. PID automatic control via SCR power control
Part I
Technical Parameter:
Model |
PT-1200T |
Display |
LED |
Max. Temp. |
1200C |
Working Temp. |
≤1100℃ |
Heating Rate |
Suggestion 0~10℃/min(max. 20℃/min) |
Temperature Zone |
200mm+200mm+200mm |
Temperature Control Accuracy |
±1℃ |
Tube Size |
Φ50mm x 1200mm OD x L |
Heating Element |
Fe-Cr-Al Alloy doped by Mo |
Thermocouple |
K Type |
Max. Power |
6.0 KW |
Working Voltage |
AC 208V-240V single phase, 50 Hz (or according to your requirement) |
Temperature Control |
PID automatic control via SCR power control |
Heating curves |
30 steps programmable |
Chamber material |
Alumina Fiber |
Warranty |
One year limited warranty (Consumable parts such as heating elements are not covered by the warranty) |
Standard Accessories |
Hook x 1 piece
Tube block x 1 pair
Silicone O rings x 4pcs |
Part II
Pressure Regulation System
One mass flow meter |
Which can regulate according to pump
pressure
 |
pressure sensor
|
(inficon brand: measuring range:3.8x10-5 to 1125
Torr ) installed on outlet of furnace tube.
|
Touch Screen PLC Controller |
Regulate pressure from 50-300torr
|
Notice: |
The regulate pressure is under furnace in horizontal direction.
The result maybe different in vertical direction. |
Part III
Pirani Vacuum Gauge
|
Installed on gas inlet side of furnace
tube
Measuring range: 1×105~1×10-1Pa |
Part IV
4 Channels MFC Gas Mixing Station
Technical Parameter:
Display |
LCD Touch Screen |
Working Temperature |
5~45 ºC |
Max. Pressure: |
3x106 Pa |
Accuracy: |
±1.5% FS |
Liner |
±(0.5-1.5)%F.S. |
Duplicate accuracy: |
±0.2%F.S. |
Structure |
Four precision mass flow meters:
MFC 1: Flow range from 0~600 sccm for Ar
MFC 2: Flow range from 0~600 sccm for N2
MFC3: Flow rang from 0~600 sccm for forming gas (5%H2+95%N2)
MFC4: Oxygen:0-600sccm
One gas mixing tank is installed on bottom case
5 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually. |
Pls note |
Liquid or corrosion not supported. |
Part V
Scroll Vacuum Pump

Item Introduction:
Scroll pump is a new kind of oil-free mechanical pump with features of simple construction,
good sealing, high vacuum ect. As a high technology product, it has highly technical requirement in desigh and manufacture. With benefits of low consumption, long working life, high reliability, and low noise, It has incomparable advantages in the application of clean process and has been popularly used in the market. GVD, GSP series scroll dry pumps are scroll dry pumps with excellent performance and obvious price competitiveness, which are introduced by Baosi Vacuum for the characteristics of downstream applications at home and abroad.
Application:
Clean vacuum, Backing turbomolecular pumps, Library, Analysis equipment, Leak detection, Beam line, Scientific researching, Medical equipment, Distillation/extraction/filtration, Laser, Semiconductor(LED/LCD), Photovoltaic, Coating(PVD/CVD), Battery, Glove box, Beam welding/laser welding, Space simulation.
Technical Parameter
Nominal Rotation Speed |
1800 rpm |
Displacement |
3L/S |
Ultimate Vacuum |
0.008mbar |
Motor Power |
400W |
Voltage Input |
Single Phase 100-240V |
Dimensions |
430×255×290mm (L×W×H) |
Noise Level |
54dBA |
Inlet Flange |
NW 25 |
Exhaust Flange |
NW 25 |
Max Water Vapour Pumping Rate |
100 gh-1 |
Leak Tightness |
< 1×10-6mbar·l/s |
Weight |
28kg |
Cooling System |
Air cooled |
Operating Temperature |
10 to 40℃ |
The cart, bellow and clamp are included for one pump. |
 |
Part VI Cold Trap
Cold Trap |
Customized model,need to cooperate with water chiller
 |
Part VII Water Chiller

Model |
CW-5000 |
Power Supply |
220V 50Hz |
Cooling Capacity |
1000W |
Refrigerant Type |
R134a |
Precision |
± 0.3℃ |
Pump Power |
0.03 kW |
Max. Lift |
8M |
Flow |
10L/min |
Tank Capacity |
7L |
Inlet and Outlet |
Internal Φ8mm speedy connector
Pagoda-shape connectors |
Weight |
28 Kg |
Control Type |
Digital Display |
Dimension |
55*28*43cm (L*W*H) |
Part VIII Filter
Used in the inlet of vacuum pump |
 |