Zhengzhou Protech
Zhengzhou Protech
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Automatic pressure control CVD tube furnace
model:PT-1200T

Automatic pressure control CVD tube furnace

    Application:  Suitable for CVD process, such as silicon carbide coating, ceramic substrate conductivity test, controlled growth of ZnO nanostructures, ceramic capacitor (MLCC) atmosphere sintering and other experiments.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
It’s mainly used for the preparation of rare earth, electronic lighting, crystal annealing, bio ceramics, electronic ceramics, special alloys, magnetic materials, precision casting, metal heat treatment and other industrial vacuum sintering, protective atmosphere sintering, vacuum deposition, CVD experiments, material composition measurement occasions.87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The main features are as below:87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1. Great temperature uniformity.87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2. Over temperature protection and alarm87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
3. PID automatic control via SCR power control
87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Part I
Technical Parameter:87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Model PT-1200T
Display LED
Max. Temp. 1200C
Working Temp. ≤1100℃
Heating Rate Suggestion 0~10℃/min(max. 20℃/min)
Temperature Zone 200mm+200mm+200mm
Temperature Control Accuracy ±1℃
  Tube Size Φ50mm x 1200mm  OD x L
Heating Element Fe-Cr-Al Alloy doped by Mo  
Thermocouple K Type
Max. Power 6.0 KW
Working Voltage AC 208V-240V single phase, 50 Hz (or according to your requirement)
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Chamber material Alumina Fiber
Warranty One year limited warranty (Consumable parts such as heating elements are not covered by the warranty)
Standard Accessories Hook x 1 piece87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Tube block x 1 pair87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Silicone O rings x 4pcs
87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 Part II
Pressure Regulation System
One mass flow meter Which can regulate according to pump87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pressure87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pressure sensor87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
(inficon brand: measuring range:3.8x10-5 to 112587NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Torr ) installed on outlet of furnace tube.87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Touch Screen PLC Controller Regulate pressure from 50-300torr87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Notice: The regulate pressure is under furnace in horizontal direction.87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
The result maybe different in vertical direction.
Part III87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Pirani Vacuum Gauge
  Installed on gas inlet side of furnace87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
tube87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Measuring range: 1×105~1×10-1Pa
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Part IV87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4 Channels MFC Gas Mixing Station87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
Display LCD Touch Screen
Working Temperature 5~45 ºC
Max. Pressure: 3x10Pa
Accuracy: ±1.5% FS
Liner ±(0.5-1.5)%F.S.
Duplicate accuracy: ±0.2%F.S.
Structure Four precision mass flow meters:87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 1: Flow range from 0~600 sccm for Ar87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC 2: Flow range from 0~600 sccm for N287NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC3: Flow rang from 0~600 sccm for forming gas (5%H2+95%N2)  87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC4: Oxygen:0-600sccm87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
One gas mixing tank is installed on bottom case87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.
Pls note Liquid or corrosion not supported.
  87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Part V87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Scroll Vacuum Pump87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Item Introduction:87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Scroll pump is a new kind of oil-free mechanical  pump with features of simple construction,87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
good sealing, high vacuum ect. As a high technology product, it has highly technical  requirement in desigh and manufacture. With benefits of low consumption, long working life, high reliability, and low noise, It has incomparable advantages in the application of clean process and has been popularly used in the market. GVD, GSP series scroll dry pumps are scroll dry pumps with excellent performance and obvious price competitiveness, which are introduced by Baosi Vacuum for the characteristics of downstream applications at home and abroad.87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Application:87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Clean vacuum, Backing turbomolecular pumps, Library, Analysis equipment, Leak detection, Beam line, Scientific researching, Medical equipment, Distillation/extraction/filtration, Laser, Semiconductor(LED/LCD), Photovoltaic, Coating(PVD/CVD), Battery, Glove box, Beam welding/laser welding, Space simulation.87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter
Nominal Rotation Speed 1800 rpm
Displacement 3L/S
Ultimate Vacuum 0.008mbar
Motor Power 400W
Voltage Input Single Phase 100-240V
Dimensions 430×255×290mm (L×W×H)
Noise Level 54dBA
Inlet Flange NW 25
Exhaust Flange NW 25
Max Water Vapour Pumping Rate 100 gh-1
Leak Tightness < 1×10-6mbar·l/s
Weight 28kg
Cooling System Air cooled
Operating Temperature 10 to 40℃
The cart, bellow and clamp are included for one pump.
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Part VI Cold Trap
Cold Trap Customized model,need to cooperate with water chiller87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Part VII Water Chiller87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Model CW-5000
Power Supply 220V 50Hz
Cooling Capacity 1000W
Refrigerant Type R134a
Precision ± 0.3℃
Pump Power 0.03 kW
Max. Lift 8M
Flow 10L/min
Tank Capacity 7L
Inlet and Outlet Internal Φ8mm speedy connector87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Pagoda-shape connectors
Weight 28 Kg
Control Type Digital Display
Dimension 55*28*43cm (L*W*H)
 87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Part VIII Filter
Used in the inlet of vacuum pump
87NMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
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Zhengzhou Protech

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