Zhengzhou Protech
Zhengzhou Protech
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Automatic pressure control CVD tube furnace

Automatic pressure control CVD tube furnace

    Application:  Suitable for CVD process, such as silicon carbide coating, ceramic substrate conductivity test, controlled growth of ZnO nanostructures, ceramic capacitor (MLCC) atmosphere sintering and other experiments.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Brief Introduction:  
It’s mainly used for the preparation of rare earth, electronic lighting, crystal annealing, bio ceramics, electronic ceramics, special alloys, magnetic materials, precision casting, metal heat treatment and other industrial vacuum sintering, protective atmosphere sintering, vacuum deposition, CVD experiments, material composition measurement occasions.
The main features are as below:
1. Great temperature uniformity.
2. Over temperature protection and alarm
3. PID automatic control via SCR power control

Part I
Technical Parameter:
Model PT-1200T
Display LED
Max. Temp. 1200C
Working Temp. ≤1100℃
Heating Rate Suggestion 0~10℃/min(max. 20℃/min)
Temperature Zone 200mm+200mm+200mm
Temperature Control Accuracy ±1℃
  Tube Size Φ50mm x 1200mm  OD x L
Heating Element Fe-Cr-Al Alloy doped by Mo  
Thermocouple K Type
Max. Power 6.0 KW
Working Voltage AC 208V-240V single phase, 50 Hz (or according to your requirement)
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Chamber material Alumina Fiber
Warranty One year limited warranty (Consumable parts such as heating elements are not covered by the warranty)
Standard Accessories Hook x 1 piece
Tube block x 1 pair
Silicone O rings x 4pcs

 Part II
Pressure Regulation System
One mass flow meter Which can regulate according to pump
pressure sensor
(inficon brand: measuring range:3.8x10-5 to 1125
Torr ) installed on outlet of furnace tube.
Touch Screen PLC Controller Regulate pressure from 50-300torr
Notice: The regulate pressure is under furnace in horizontal direction.
The result maybe different in vertical direction.
Part III
Pirani Vacuum Gauge
  Installed on gas inlet side of furnace
Measuring range: 1×105~1×10-1Pa
Part IV
4 Channels MFC Gas Mixing Station
Technical Parameter:
Display LCD Touch Screen
Working Temperature 5~45 ºC
Max. Pressure: 3x10Pa
Accuracy: ±1.5% FS
Liner ±(0.5-1.5)%F.S.
Duplicate accuracy: ±0.2%F.S.
Structure Four precision mass flow meters:
MFC 1: Flow range from 0~600 sccm for Ar
MFC 2: Flow range from 0~600 sccm for N2
MFC3: Flow rang from 0~600 sccm for forming gas (5%H2+95%N2)  
MFC4: Oxygen:0-600sccm
One gas mixing tank is installed on bottom case
5 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.
Pls note Liquid or corrosion not supported.
Part V
Scroll Vacuum Pump

Item Introduction:
Scroll pump is a new kind of oil-free mechanical  pump with features of simple construction,
good sealing, high vacuum ect. As a high technology product, it has highly technical  requirement in desigh and manufacture. With benefits of low consumption, long working life, high reliability, and low noise, It has incomparable advantages in the application of clean process and has been popularly used in the market. GVD, GSP series scroll dry pumps are scroll dry pumps with excellent performance and obvious price competitiveness, which are introduced by Baosi Vacuum for the characteristics of downstream applications at home and abroad.
Clean vacuum, Backing turbomolecular pumps, Library, Analysis equipment, Leak detection, Beam line, Scientific researching, Medical equipment, Distillation/extraction/filtration, Laser, Semiconductor(LED/LCD), Photovoltaic, Coating(PVD/CVD), Battery, Glove box, Beam welding/laser welding, Space simulation.
Technical Parameter
Nominal Rotation Speed 1800 rpm
Displacement 3L/S
Ultimate Vacuum 0.008mbar
Motor Power 400W
Voltage Input Single Phase 100-240V
Dimensions 430×255×290mm (L×W×H)
Noise Level 54dBA
Inlet Flange NW 25
Exhaust Flange NW 25
Max Water Vapour Pumping Rate 100 gh-1
Leak Tightness < 1×10-6mbar·l/s
Weight 28kg
Cooling System Air cooled
Operating Temperature 10 to 40℃
The cart, bellow and clamp are included for one pump.
Part VI Cold Trap
Cold Trap Customized model,need to cooperate with water chiller
Part VII Water Chiller

Model CW-5000
Power Supply 220V 50Hz
Cooling Capacity 1000W
Refrigerant Type R134a
Precision ± 0.3℃
Pump Power 0.03 kW
Max. Lift 8M
Flow 10L/min
Tank Capacity 7L
Inlet and Outlet Internal Φ8mm speedy connector
Pagoda-shape connectors
Weight 28 Kg
Control Type Digital Display
Dimension 55*28*43cm (L*W*H)
Part VIII Filter
Used in the inlet of vacuum pump



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