0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER
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| Part I: Standard Parts heating | |||
| Tube Furnace | |||
| Display | LED Display(Computer Control) | ||
| Max. Temperature | 1200 | ||
| Continuous Temp | ≤1100℃ | ||
| Temperature Zone |
150*200*150mm(3 Zones) with independent temperature control |
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| Heating Element | Electric mo with wire | ||
| Thermocouple | K type | ||
| Temperature Accuracy | ±1℃ | ||
| Tube Size |
160x 1000mm (OD x minimum L) 150mm(ID±2mm) Thickness 5mm |
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Material:Quartz tube |
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| Temperature Control |
PID automatic control via SCR power control |
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| Heating curves | 30 steps programmable | ||
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Safety Element |
Over-temperature Alarm Over-current protection Power off when door open Thermocouple broken indication |
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Vacuum Flange |
One side is stainless steel water cooled vacuum flange with valve, the other side is water cooled hinged vacuum flange. Adopt Viton O-rings. Each Outlet has a PSV. Including Air actuated on-off valve, linked to PSV and MFC(when pressure beyond 1 bar, both the MFC and furnace should be cut off, PSV release high pressure. |
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| 3 way Valve |
One for KF25 vacuum valve Second for 1/8” valve Third for 1/2” valve(to bubbler) |
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| Power Supply | 380V 50/60Hz 3 phases | ||
| Output Power | Base on the final design | ||
| Part 2 Vacuum pump system | ||
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Vacuum Pump |
  VRD-8 rotary vane pump with pumping speed 2.2L/s vacuum pump+Flapper valve Vacuum rate: -0.1mpa(Relative pressure) |
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| Part 3 4 way Mass flow meters | ||
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4 Way Mass Flow Meters (Computer control)
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Four precision mass flow meters : MFC1: 0 to 2000 sccm, Accuracy ±-1.5%F.S. H2 MFC2: 0 to 2000 sccm Accuracy ±-1.5%F.S. CO2 MFC3: 0 to 2000sccm Accuracy ±-1.5%F.S. CH4 MFC4: 0 to 2000 sccm Accuracy ±-1.5%F.S. Ar 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually MFC could be controlled on the computer. Mixing gas will be pre-heating at 100-200C before flow into the furnace tube. SS tube with sprial shape  (For reference only) |
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No. 104, building 31, Xingyang equipment manufacturing industrial park, Zhengzhou City, Henan Province, China
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