Zhengzhou Protech
Zhengzhou Protech
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Custom CVD Tube Furnace System
model:PT-T1200CVD

Custom CVD Tube Furnace System

    Application:  Suitable for CVD process, such as silicon carbide coating, ceramic substrate conductivity test, controlled growth of ZnO nanostructures, ceramic capacitor (MLCC) atmosphere sintering and other experiments.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
  
Part I: Standard Parts heating
Tube Furnace
Display LED Display(Computer Control)
Max. Temperature 1200
Continuous  Temp       ≤1100℃
Temperature Zone 150*200*150mm(3 Zones)aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
with independent temperature control
Heating Element Electric mo with wire
Thermocouple K type
Temperature Accuracy  ±1℃
Tube Size 160x 1000mm (OD x minimum L)aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
150mm(ID±2mm) Thickness 5mm
  Material:Quartz tubeaL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 quartz tube
Temperature Control PID  automatic  control  via  SCR poweraL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
control
Heating curves 30 steps programmable
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Safety Element
Over-temperature Alarm Over-current protection Power off when door openaL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Thermocouple broken indication
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Flange
One side is stainless steel water cooled vacuum flange with valve, the other side is water cooled hinged vacuum flange. Adopt Viton O-rings. Each Outlet has a PSV.aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Including Air actuated on-off valve, linked to PSV and MFC(when pressure beyond 1 bar, both the MFC and furnace should be cut off, PSV release highaL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pressure.
3 way Valve One for KF25 vacuum valveaL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Second for 1/8” valveaL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Third for 1/2” valve(to bubbler)
Power Supply 380V 50/60Hz 3 phases
Output Power Base on the final design
aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Part 2 Vacuum pump system
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump
aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
VRD-8 rotary vane pump with pumping speed 2.2L/s vacuum pump+Flapper valveaL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum rate: -0.1mpa(RelativeaL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pressure)aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Part 3 4 way Mass flow meters
  
4 Way Mass Flow Meters (Computer control)
Four precision mass flow meters :aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC1: 0 to 2000 sccm, Accuracy ±-1.5%F.S. H2 MFC2: 0 to 2000 sccm Accuracy ±-1.5%F.S. CO2 MFC3: 0 to 2000sccm Accuracy ±-1.5%F.S. CH4 MFC4: 0 to 2000 sccm Accuracy ±-1.5%F.S. AraL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manuallyaL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC could be controlled on the computer.aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Mixing gas will be pre-heating at 100-200C before flow into the furnace tube.aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
SS tube with sprial shapeaL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 (For reference only)aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CVD system
aL9Muffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
cvd furnace

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