model:PT-T1200CVD
Custom CVD Tube Furnace System
Application: Suitable for CVD process, such as silicon carbide coating, ceramic substrate conductivity test, controlled growth of ZnO nanostructures, ceramic capacitor (MLCC) atmosphere sintering and other experiments.
Contact us for customize
send-email:
info@lab-furnace.com
Detailed Parameters Of The Product
Part I: Standard Parts heating |
Tube Furnace |
Display |
LED Display(Computer Control) |
Max. Temperature |
1200 |
Continuous Temp |
≤1100℃ |
Temperature Zone |
150*200*150mm(3 Zones)
with independent temperature control |
Heating Element |
Electric mo with wire |
Thermocouple |
K type |
Temperature Accuracy |
±1℃ |
Tube Size |
160x 1000mm (OD x minimum L)
150mm(ID±2mm) Thickness 5mm |
|
Material:Quartz tube
 |
Temperature Control |
PID automatic control via SCR power
control |
Heating curves |
30 steps programmable |
Safety Element |
Over-temperature Alarm Over-current protection Power off when door open
Thermocouple broken indication |
Vacuum Flange |
One side is stainless steel water cooled vacuum flange with valve, the other side is water cooled hinged vacuum flange. Adopt Viton O-rings. Each Outlet has a PSV.
Including Air actuated on-off valve, linked to PSV and MFC(when pressure beyond 1 bar, both the MFC and furnace should be cut off, PSV release high
pressure. |
3 way Valve |
One for KF25 vacuum valve
Second for 1/8” valve
Third for 1/2” valve(to bubbler) |
Power Supply |
380V 50/60Hz 3 phases |
Output Power |
Base on the final design |