Zhengzhou Protech
Zhengzhou Protech
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Custom CVD Tube Furnace System
model:PT-T1200CVD

Custom CVD Tube Furnace System

    Application:  Suitable for CVD process, such as silicon carbide coating, ceramic substrate conductivity test, controlled growth of ZnO nanostructures, ceramic capacitor (MLCC) atmosphere sintering and other experiments.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
  
Part I: Standard Parts heating
Tube Furnace
Display LED Display(Computer Control)
Max. Temperature 1200
Continuous  Temp       ≤1100℃
Temperature Zone 150*200*150mm(3 Zones)bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
with independent temperature control
Heating Element Electric mo with wire
Thermocouple K type
Temperature Accuracy  ±1℃
Tube Size 160x 1000mm (OD x minimum L)bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
150mm(ID±2mm) Thickness 5mm
  Material:Quartz tubebPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 quartz tube
Temperature Control PID  automatic  control  via  SCR powerbPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
control
Heating curves 30 steps programmable
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Safety Element
Over-temperature Alarm Over-current protection Power off when door openbPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Thermocouple broken indication
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Flange
One side is stainless steel water cooled vacuum flange with valve, the other side is water cooled hinged vacuum flange. Adopt Viton O-rings. Each Outlet has a PSV.bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Including Air actuated on-off valve, linked to PSV and MFC(when pressure beyond 1 bar, both the MFC and furnace should be cut off, PSV release highbPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pressure.
3 way Valve One for KF25 vacuum valvebPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Second for 1/8” valvebPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Third for 1/2” valve(to bubbler)
Power Supply 380V 50/60Hz 3 phases
Output Power Base on the final design
bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Part 2 Vacuum pump system
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum Pump
bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
VRD-8 rotary vane pump with pumping speed 2.2L/s vacuum pump+Flapper valvebPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Vacuum rate: -0.1mpa(RelativebPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
pressure)bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 
Part 3 4 way Mass flow meters
  
4 Way Mass Flow Meters (Computer control)
Four precision mass flow meters :bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC1: 0 to 2000 sccm, Accuracy ±-1.5%F.S. H2 MFC2: 0 to 2000 sccm Accuracy ±-1.5%F.S. CO2 MFC3: 0 to 2000sccm Accuracy ±-1.5%F.S. CH4 MFC4: 0 to 2000 sccm Accuracy ±-1.5%F.S. ArbPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manuallybPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
MFC could be controlled on the computer.bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Mixing gas will be pre-heating at 100-200C before flow into the furnace tube.bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
SS tube with sprial shapebPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 (For reference only)bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
CVD system
bPoMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
cvd furnace

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