PRODUCT

0-2000°C RESEARCH MATERIAL & HEATING TREATMENT'S LEADER

model:PT-T1600-CVD

Customized CVD System

Application

Contact us for customize send-email: info@lab-furnace.com

Detailed Parameters Of The Product

1.Tube Furnace Part:
Technical Parameter:

Tube Furnace
Max. Temperature			1600℃
Tube Size			Φ100mm
Heat zone length			300mm
Heating element			MoSi2 rods
Thermo couple			B Type
Display			LED
Tube material			Alumina
Chamber material			Ceramic fiber
Furnace shell material			Carbon steel
Temperature Control			PID automatic control via SCR power control
Heating Rate			0~20℃/max.(Suggest 0-10℃/min)
Temperature control accuracy			±1℃
Temperature uniformity			±5℃
Max. Power			4.0KW
Heating curves			30 steps programmable
Working Voltage			220V, 50HZ (or according to your requirement)
Vacuum Flange			Water cooling flange with valve
Float flowmeter
Four float flowmeters	FFC 1: H2 Gas flow range from 0~500 sccm FFC 2: CH4 Gas flow range from 0~100 sccm FFC 3: Ar1: Gas flow range from 0~700 sccm FFC 4: Ar2: Gas flow range from 0~700 sccm ( Gas flow range according to your requirement)
Mass flowmeter
Mass flowmeter		Four precision Mass flowmeter : MFC 1: H2 Gas flow range from 0~500 sccm MFC 2: CH4 Gas flow range from 0~100 sccm MFC 3: Ar1: Gas flow range from 0~700 sccm MFC 4: Ar2: Gas flow range from 0~700 sccm ( Gas flow range according to your requirement)

2.Gas mixer part:
Technical Parameter :

Display	LED
Max. Temperature	1200℃ for short time
Continuous Working Temp.	≤1100℃
Heating Rate	Suggestion 0~10℃/min(max. 20℃/min)
Tube material	310S
Temperature heating zone	About 200mm(According to design)
Diameter	About OD165mm(According to design)
Temperature Control Accuracy	±1℃
Heating Element	Resistance wire
Thermocouple	K Type
Max. Power	2.0 KW
Working Voltage	220V, 50HZ (or according to your requirement)
Temperature Control	PID automatic control via SCR power control
Heating curves	30 steps programmable
Chamber material	Alumina Fiber

3.Crucible furnace part

Technical Parameter :

Max Temperature	1200℃
Crucible diameter	250mm
Crucible depth	400mm
Heating element	Resistance wire
Thermo couple	K Type
Chamber material	Ceramic fiber
Furnace shell material	Carbon steel
Crucible material	Stainless steel 310S
Temperature Control	PID automatic control
Heating Rate	Max. 0~20℃/min
Temperature control accuracy	±1℃
Temperature uniformity	±5℃
Max. Power	4.5KW
Working Voltage	220V, 50HZ (or according to your requirement)