Zhengzhou Protech
Zhengzhou Protech
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Customized  CVD System
model:PT-T1600-CVD

Customized CVD System

    Application:  PT-T1600-CVD crucible furnace evaporation system forms a dense HfCl4、TiCl4 etc coating on the surface of the target material. It consists of an evaporator, a mixer and a reactor.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
hFnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
1.Tube Furnace Part:hFnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter:
Tube Furnace
Max. Temperature 1600℃
Tube Size Φ100mm
Heat zone length 300mm
Heating element MoSi2 rods
Thermo couple B Type
Display LED
Tube material Alumina
Chamber material Ceramic fiber
Furnace shell material Carbon steel
Temperature Control PID automatic control via SCR power control
Heating Rate 0~20℃/max.(Suggest 0-10℃/min)
Temperature control accuracy ±1℃
Temperature uniformity ±5℃
Max. Power 4.0KW
Heating curves 30 steps programmable
Working Voltage 220V, 50HZ (or 380V)
Vacuum Flange Water cooling flange with valve
flowmeter part
Five flowmeters FFC 1+MFC 1: H2 Gas flow range from 0~500 sccmhFnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
FFC 2+MFC 2: CH4 Gas flow range from 0~100 sccmhFnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
FFC 3+MFC 3: Ar1: Gas flow range from 0~700 sccmhFnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
FFC 4+MFC 4: Ar2: Gas flow range from 0~700 sccmhFnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
FFC 5+MFC 5: Gasification gas:Gas flow range from 0~700 sccmhFnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
( Gas flow range according to your requirement)
hFnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
2.Gas mixer part:hFnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
Technical Parameter :
Display LED
Max. Temperature 1200℃ for short time
Continuous Working Temp. ≤1100℃
Heating Rate Suggestion 0~10℃/min(max. 20℃/min)
Tube material 310S
Temperature heating zone About 200mm(According to design)
Diameter About OD165mm(According to design)
Temperature Control Accuracy ±1℃
Heating Element Resistance wire
Thermocouple K Type
Max. Power 2.0 KW
Working Voltage 220V, 50HZ (or according to your requirement)
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Chamber material Alumina Fiber
hFnMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
  3.Gasification gas part
Technical Parameter :
Max Temperature 1200℃
Crucible diameter 250mm
Crucible depth 400mm
Heating element Resistance wire
Thermo couple K Type
Chamber material Ceramic fiber
Furnace shell material Carbon steel
Crucible material Stainless steel 310S
Temperature Control PID automatic control
Heating Rate Max. 0~20℃/min
Temperature control accuracy ±1℃
Temperature uniformity ±5℃
Max. Power 4.5KW
Working Voltage 220V, 50HZ (or 380V)

Product

Zhengzhou Protech

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