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Zhengzhou Protech
Zhengzhou Protech

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Home > Products > Coating Equipment > CVD System
Large Pipe Diameter CVD Tube Furnace
model:PT-T1200

Large Pipe Diameter CVD Tube Furnace

    Application:  Including a wide range of insulating materials, as well as most metal materials and metal alloy materials, two-dimensional materials, etc., such as silicon carbide coating, ceramic substrate conductivity test, controlled growth of ZnO nanostructures, ceramic capacitor (MLCC) atmosphere sintering, etc. experiment. It can also be used in many research fields such as vacuum sintering, vacuum atmosphere protection sintering, nanomaterial preparation, battery material preparation and so on.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Product overview:
    PT-T1200 Large Diameter CVD Tube Furnace is a splitable tube furnace with 60mm diameter quartz tube, vacuum pump  and three channels mass flow meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion. 
 
Technical Parameter:
Display LCD Touch Screen
Chamber Split type and upper part can be opened
Continuous Woking Temp. ≤1100℃
Heating Rate Suggestion: 0~10℃/min (max. 20℃/min)
Temperature Zone 500mm
Heating Element Resistance wire with Mo
Thermocouple K type
Temperature Control Accuracy ±1℃
Tube Size 200mm OD X Length 1200 mm
Material: Quarz Tube 
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Vacuum Flange Stainless Steel vacuum flange with valve 
Power 380V, 50 Hz, three phases at max.20KW
Rotary Vane Vacuum Pump
Flow rate: 4L/S
The rotary vane vacuum pump will be designed into a cart with wheel.
Vacuum Degree: 10pa (in cold and empty state)
Three precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2: Gas flow range from 0~100 sccm
MFC 3: Gas flow range from 0~100 sccm
(or according to your requirement)
One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
Pirani digital vacuum gauge

cvd furnace

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