Zhengzhou Protech
Zhengzhou Protech
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CVD Furnace

CVD Furnace

    Application:  Suitable for CVD process, such as silicon carbide coating, ceramic substrate conductivity test, controlled growth of ZnO nanostructures, ceramic capacitor (MLCC) atmosphere sintering and other experiments.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Casing *Double layer steel casing with air cooling.
* Furnace shell <=60℃
Processing Tube *Material: Fused quartz tube (80 mm OD X 1000 mm L, and SS flanges)
Heating Element Fe-Cr-Al Alloy doped by Mo
Working Temperature *Max. Heating Temp.: 1200°C
*Continuous Working Temp.: 1100°C
Heat-up Rate Heat-up rate: 1 - 10°C/min
Heating Zone Length *Total heating zone: 440 mm
*Constant Temp. Zone: 150 mm (± 1°C)
Temperature Control *LCD Touch Screen
*Temperature accuracy: ± 1°C
*Thermocouple: K type built inside the furnace
Vacuum Side One pair of stainless steel vacuum flange (gas and vacuum sides) with:
*one mechanical pressure gauge (compatible with MFC system)
*two needle valves (1/4'')
*one KF-25 connector, KF-25 vacuum block valve, KF-25 SS vacuum bellows, KF-25 quick clamp with rubber o-rings, adjustable flange support (left and right side - 2 pcs) for KF-25 flanges, etc. for the high vacuum station
High Vacuum Station structure *Max. Loading: 100 Lbs on top
*High vacuum station control panel (for basically molecular pump speed and vacuum levels): 
*Inside: Turbo Molecular vacuum pump station
# All connections and fitting and valves between turbo pump and backing pump-dry pump and quartz tube section according to the KF-25 connection norm
Vacuum Level 6.7*10-3pa (under empty and room temp. condition)
Mass flow gas control structure *3 channels:
        #Controller-1: 1 - 100 sccm
        #Controller-2: 1 - 200 sccm
        #Controller-3: 1 - 500 sccm
*Working voltage: AC 220 V / 50 Hz
*7'' color touchscreen control,
*With mechanical pressure gauge, needle valve, gas pipeline, gas mixing tank, stop valves and fittings, etc. included
*Made of 316 stainless steel valve
Total power consumption of the system 5 kW
Rated voltage of the whole system AC 220 V, Single Phase, 50 Hz
Customized Vacuum Flange With Three Feedthoughs, Gas Valve and Mechanical Pressure Gauge Compatible for 80 mm quartz tube (above system), three thermocouple feedthoughs (K type TC) - which will be used only for center and the two ends of constant temperature zones inside the quartz tube (for temperature calibration between PID / TC and real constant zone temperatures). This unit will not be used during the normal processes.
*Made of 304 Stainless Steel with double high-temperature silicone O-ring.
*Three feedthrough, one valve and one mechanical gauge are installed on the flange.
*The feedthroughs are fit to 1/4" O.D steel pipes of thermocouples K-type with K-type cable plugs.
*1/4" tube fitting to make additional gas inlet or outlet is connected to valve.
*The assembly kit will seal 80 mm OD quartz tube.
K type thermocouple Temperature measured by 3 calibration thermocouple will be display on the LCD touch screen of Tube furnace directly.

cvd furnace


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