model:PT-OTF-1200
Graphene cvd tube furnace
Application: Suitable for CVD process, such as silicon carbide coating, ceramic substrate conductivity test, controlled growth of ZnO nanostructures, ceramic capacitor (MLCC) atmosphere sintering and other experiments.
Contact us for customize
send-email:
info@lab-furnace.com
Detailed Parameters Of The Product
Product Overview:
PT-OTF-1200-80*300-F3 is an idea system for graphene growth, it consists of one split tube furnace with 80mm diameter and 300mm long hot zone, one quartz tube or alumina tube is available. Its tube chamber could reach a high vacuum degree of 6.7*10-3Pa under cold state, it is also good choice for vacuum sintering. The gas-rout is specialy designed for N2 gas, H2 gas and CH4 gas. User can also choose other gases according to actual processing technology.
Technical parameter:
Display |
Touch screen |
Chamber |
Split type |
Max. Temperature |
1200℃ for short time |
Continuous Working Temp. |
≤1100℃ |
Heating Rate |
Suggestion: 0~15℃/min (max. 20℃/min) |
Temperature Zone |
300mm |
Constant Heating Zone |
150mm |
Heating Element |
Resistance Wire with Mo |
Thermocouple |
K type |
Temperature Control Accuracy |
±1℃ |
Tube Size |
80 x 800mm (OD x L) |
|
Material: Alumina |
Temperature Control |
PID automatic control via SCR power control |
Heating curves |
32 steps programmable |
Vacuum gauge |
Composite vacuum gage |
Vacuum Flange |
Stainless Steel vacuum flange with valves and needles |
Power source |
220V, 50 Hz, single phase at max.3KW |
Vacuum Pump Group
Include KF25, KF50 Adpater,bellow for vacuum pump group and mobile cabinet with wheels. |
Ultimate vacuum 6.67*10-3Pa under cold state.
|
Flow scope |
(20, 30, 50, 100, 200, 300, 500) SCCM |
Accuracy |
±1.5 % F.S. |
Repeat accuracy |
±1.5 % F.S. |
Response time |
≦10sec |
Working pressure difference range |
0.1~0.5MPa |
Pressure resistance |
3MPa |
Temperature Coefficient |
Zero: ≤±0.2% F.S./℃; Span: ≤±0.2% F.S./℃ |
Working environment temperature |
5~45℃ |
Input signal |
0 V ~ +5.00 V |
Output signal |
0 V ~ +5.00 V |
Electric plug form |
DB15 pin(Female) |
Power |
+15 V 50 mA
-15V 200 mA |