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model:PT-1200T

1200℃ double tube CVD system

Application

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Detailed Parameters Of The Product

Product Overview:
This system is a special dual-tube CVD system, which is specially designed for growing thin films on metal foils, especially for the research on flexible metal foil electrodes of a new generation of energy. The sliding furnace can realize rapid heating and cooling of materials.

Technical Parameter:

product name	1200℃ double tube CVD system
The first part: 1200℃ double tube CVD system
Product number	PT-1200T
Furnace tube size	Double quartz tube Outer tube: OD 100 x ID 96 x 1400 mm Inner tube: OD 80 x ID 75 x 1800 mm
Heating zone	220+220mm
Power supply	230V, single phase, 50HZ
power	4.0 kw
Heating element	Resistance wire
Heating rate	0-20°C/min
Thermocouple	Type K
Part 2: Water cooling system
Flange	1. Water chiller CW-3000 2. Water-cooled, sealed double-tube vacuum flange: Allow reaction gas to react between the two tubes (10mm gap), and the cooling gas is directly passed into the inner tube.
Part Three Vacuum System
Vacuum system	1. Anticorrosive digital display vacuum gauge 2. VRD-16 rotary vane pump, pumping speed 4L/S, including flapper valve KF25 interface, bellows and box
Part Four Air Mixing System
Mass flowmeter Range: MFC 1: 0~10 sccm MFC 2: 0~200 sccm MFC 3: 0~10 slm MFC 3: 0~10 slm .......