Zhengzhou Protech
Zhengzhou Protech
Home > Products > Tube Furnace > PECVD Furnace

Product

Contact Us

Leave Message

Contact Us

All products are customizable, leave message immediately, we will reply as soon as possible.

Name

Tel/WhatsApp

E-mail *

Country *

Raw Materia

Message *

Verification code *

I can't see clearly, refresh
High vacuum PECVD system
model:PT-T1200

High vacuum PECVD system

    Application:  This system is widely used to deposit high-quality Sio2 film, Si3N3 film, diamond film, hard film, optical film and carbon nanotube (CNT), C/C composite material, SIC coating, graphite product SiC coating, etc.
Contact us for customize send-email: info@lab-furnace.com
Zhengzhou Protech Zhengzhou Protech
Detailed Parameters Of The Product

Product Overview:
   PT high vacuum PECVD system is composed of tube furnace, vacuum system, gas supply system, radio frequency power supply system, etc. The system is mainly used in the growth of metal thin films, ceramic thin films, composite thin films, graphene, etc. The PECVD system is easy to add functions and can expand the functions of plasma cleaning and etching. The PECVD system has the advantages of high film deposition rate, good uniformity, high consistency and stability.
rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Main Features:rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. Change the gas in the quartz vacuum chamber to an ion state through the radio frequency power supply.rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. PECVD requires a lower temperature than ordinary CVD for chemical vapor deposition.rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3. The stress of the deposited film can be controlled by the frequency of the radio frequency power supply.rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

4. PECVD has higher chemical vapor deposition rate, better uniformity, consistency and stability than ordinary CVD.rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-Si:H).rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Technical Parameter:rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

product namerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

High vacuum PECVD systemrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Slide rail tube furnace partrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Product numberrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PT-T1200rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace tube sizerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Φ50mmX1600mm CustomizablerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace tube materialrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Quartz tuberRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating zonerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

300mm CustomizablerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Operating temperaturerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤ 1100°CrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Maximum temperaturerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1200°CrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature control methodrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

N-type thermocouplerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

way to controlrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Touch screen control, with independent rocker arm, you can adjust the angle of the temperature control screen according to actual needs, making it more convenient to userRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature control accuracyrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

±1℃rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Temperature control protectionrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

With over-temperature and burnout protection functionrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating raterRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

0-20ºC/min, recommended 10ºC/minrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Heating elementrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Molybdenum resistance wirerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace materialrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Alumina polycrystalline fiberrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Furnace structurerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The furnace body has a slide rail, which can realize rapid heating and coolingrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Flange jointrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Standard configuration is equipped with two stainless steel vacuum flanges, mechanical pressure gauge and stainless steel globe valve have been installedrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Sealing systemrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The furnace tube and flange are extruded and sealed with a silica gel O-ring, which is convenient to remove and can be removed repeatedly, and has good air tightness.rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

caserRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Stainless steel housingrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

OptionalrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Auxiliary cooling fanrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

                     Vacuum system partrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

namerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Vacuum systemrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The main parametersrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. Using imported Agilent high vacuum molecular pump set, the ultimate vacuum degree can reach 10-3parRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. KF25 quick connection, stainless steel bellows, manual flapper valve and flange, vacuum pump connection;rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3. Digital vacuum display, its measuring range is 5×10-5-1500mbar, with high measuring accuracyrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Pneumatic system partrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

namerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four-way mass flow meterrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

The main parametersrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Four-channel precision mass flow meter: touch screen control, digital display, automatic control. Flow range Flow range:rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

1. MFC 1-MFC4: 0-1000sccm adjustablerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. A mixing tankrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

3.4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases;rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

4. Air inlet and outlet: 3 in and 1 outrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Flow control: manual rotary adjustmentrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Connection mode: double card sleeve connectionrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Plasma power supply partrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

namerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

500W plasma power supplyrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power rangerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

0-500W (continuously adjustable)rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

working frequencyrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

13.56MHZ+0.005%rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Operating moderRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Continuous outputrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

RF output impedance interfacerRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

N-type, female (50Ω)rRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power stabilityrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

≤2WrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Maximum reflected powerrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

70WrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Power protection settingsrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

DC over current protection, power amplifier over temperature protection, reflected power protectionrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Supply voltage/frequencyrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Single-phase AC (187V-253V) 50-60HZrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

cooling methodrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

Wind coolingrRjMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

PECVD system
Zhengzhou Protech

After-sales serveces

After-sales serveces