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model:PT-6-130

Vacuum sublimation equipment

Application

Detailed Parameters Of The Product

item	part	specification
Overall size and layout of the equipment	Device layout	L type
	length	≤2700mm
	width	≤1600mm
	height	≤1800mm
	Part order	outer quartz tube-filter-Main valve-cold trap-Molecular pump
quartz tube	size	OD130mm,Length2500mm，Thickness5mm
quartz tube	connection	Recessed，Groove height＞5mm
sealing falnges & chamber	material	bright stainless stee tube ( SUS 304 )
protection system	Filter	Single layer metal mesh
	Filter	Easy to disassemble,clean and maintain
	Cold trap	Vacuum compartment type cold trap design
		Easy to disassemble,clean and maintain(hand can reach into the cold trap)
		Stainless steel / polished inside & outside
		Single outer diameter180-260mm
Equipment base	Equipment base, body material	Adopt the square tube skeleton base, attached the movable wheel and the horizontal adjustment foot at the bottom, stainless steel as the countertop.( SUS 304 )
	base height（below heating body）	≤ 800mm
	base panel	Easy to remove cover plate, cold plate spray
Thermal field	furnace body	6 sections above and below, 12 points to detect temperature
		heating zone=200+200+400+200+300+200mm
		interval section= 10mm
		distance between Heating furnace side shell and outer tube connection＞100mm
	temp.	max temp software temp control=600°C，
	temp.	max. temp. of hardware＞800°C
	Power control module	40A
	Warming program module	Data can be output, touch screen set temperature program
Furnace brake system	Furnace body switch	Manually open
		Human touch switch
		Physical control switch
cooling system	Cooling fan	High temperature resistant material
Water and electrical requirements	electricity	voltage 380V，power 22Kw
	water	5L/min
	gas	气Pneumatic valve need N2，pressure0.6Mpa
Human machine hardware system	touch screen	10.4inch
Software control	function	Touch screen can add screen lock to prevent accidental touch
		Integrate the operation of each pneumatic valve of the equipment, the switch of each component, and the setting of the heating system
		automatic mode and manual mode
Main pump	Molecular pump	FF250/1600G， pumping rate1600L/s
Main pump	Molecular pump	FF250/1600G， pumping rate1600L/s
High vacuum pumping line	Main pumping line	The vacuum pumping end uses a molecular pump with a diameter of 100mm to directly connect to ensure the high vacuum in the experiment. A plate valve is added in the middle of the diameter straight pipe.
Foreline pump	mechanical pump	pumping rate30m³/h
Foreline pump	mechanical pump	pumping rate30m³/h
Low vacuum pumping line	side pumping line	The ends of the flapper valve are added with a 16mm diameter thin tube bypass branch to prevent the pumping speed from affecting the direction of molecular diffusion in the initial vacuum, resulting in uneven material.
vacuum degree	Low vacuum pump exhaust rate	2x10^-2torr within 20min in main chamber
	High vacuum pump exhaust rate	5x10^-6torr within 20min in main chamber after turining on Molecular pump
	Pressure test	After reaching the ultimate vacuum (5x10^-6torr), close all valves, less than 2x10^-2torr after 30min