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Graphene Preparation PECVD Equipment

Graphene Preparation PECVD Equipment

    Application:  PT-T1200-S60LC-H2 graphene preparation machine is composed of PT-T1200 open slide rail tube furnace, vacuum system, mass flow meter gas circuit system, and plasma power supply system. It can be applied to graphene growth, etc.
Contact us for customize send-email: info@lab-furnace.com
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Detailed Parameters Of The Product
Device Fundamentals:
Equipment basic structure
PT-T1200-S60LC-H2 graphene preparation machine is composed of PT-T1200 open slide rail tube furnace, vacuum system, mass flow meter gas circuit system, and plasma power supply system. It can be applied to graphene growth, etc.

Main functions and features:
1. PECVD has the advantages of low basic temperature, fast deposition rate, good film quality, less pinholes, and not easy to crack, etc.;
2. The vacuum system consists of a rotary vane vacuum pump and an imported digital vacuum gauge, and the maximum vacuum can reach 10Pa;
3. The digital mass flow control system is composed of multi-channel mass flow meters, flow display instruments, etc., to achieve precise measurement and control of gas flow; touch screen operation, simple and convenient operation.
4. KF quick flange sealing is adopted, which is convenient and quick to load and unload; the pipeline is connected with the world's ferrule, and there is no air leakage;

Main technical parameters of the equipment:

Product name Graphene Growth Furnace (CE Certification)
Open type slide tube furnace section
Model PT-T1200-S60LC-H2
Furnace tube size Φ60mmX1600mm
heating zone 300mm
working temperature 1100℃
Max.temperature 1200℃
Temperature control method Type K thermocouple
The way to control The temperature control system adopts touch screen operation, artificial intelligence adjustment technology, has PID adjustment, self-tuning functions and can compile 30 sections of heating and cooling programs;
Temperature control accuracy ±1℃
Temperature control protection With over temperature protection function
Heating rate 0-20ºC/min  ,Suggest10ºC/min
Heating element Molybdenum resistance wire
Operating Voltage AC 220V single phase 50HZ
heating power 3KW
Furnace material Alumina polycrystalline fiber
sealing system The furnace tube and the flange are extruded and sealed by a silicone O-ring, which is easy to remove, can be removed repeatedly, and has good air tightness.
Furnace structure Slide rail structure, can achieve rapid cooling
Furnace tube quartz tube 
reference picture  
                     vacuum system part
name vacuum system 
The main parameters 1.It is composed of rotary vane vacuum pump and imported digital vacuum gauge, and the vacuum degree can reach 10Pa
2.KF25 quick connection, stainless steel bellows, manual flapper valve is connected with flange, vacuum pump;
3.Imported digital vacuum display gauge, its measuring range is 5×10-5-1500mbar, the measurement accuracy can reach 0.1mbar, and coefficient conversion is not required to measure different gas types

Air system part
name Four-way mass flow meter
The main parameters Four-channel precision mass flowmeter: touch screen control, digital display. Flow range Flow range:
1.MFC 1-MFC4: 0-1000sccm adjustable
2. A mixing tank
3.4 stainless steel needle valves are installed on the left side of the gas supply system, which can manually control 4 kinds of gases;
4. Air inlet and outlet: 4 in and 1 out
Flow Control: Manual Rotary Adjustment
Connection method: double card sleeve connection
Plasma Power Section
name 500W Plasma Power
Power range 0-500W(Continuously adjustable)
working frequency 13.56MHZ+0.005%
Operating mode Continuous output
power stability ≤2W
Maximum reflected power 70W
Power protection settings DC overcurrent protection, power amplifier overtemperature protection, reflected power protection
Supply voltage/frequency single phase AC(187V-253V)50-60HZ
cooling method air cooling
Total Weight 13.5KG
Random gift 1 quartz tube, crucible hook, furnace plug, sealing ring, water cooler, silicone tube, Allen key, instruction manual, warranty card, etc.
After-sales service The whole machine is guaranteed for one year, and the whole machine is guaranteed for life (the heating elements, sealing rings and other random accessories are not included in the warranty scope)



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